Abstract
In this chapter, we briefly discuss previous attempts at modeling contamination in IC manufacturing and its effect on yield modeling. The relevance of these models in modern manufacturing environments is also discussed.
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© 1996 Kluwer Academic Publishers
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Khare, J.B., Maly, W. (1996). Background. In: From Contamination to Defects, Faults and Yield Loss. Frontiers in Electronic Testing, vol 5. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-1377-9_2
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DOI: https://doi.org/10.1007/978-1-4613-1377-9_2
Publisher Name: Springer, Boston, MA
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