Beam Deflection

  • Miklos Szilagyi
Part of the Microdevices book series (MDPF)


Particle beams must be deflected for different purposes. The most common and classical type of deflection is used in cathode ray tubes, lithography machines, scanning electron microscopes, and some other analytical instruments. Its purpose is to scan the beam over a surface. The main feature of this type of deflection is that the undeflected beam has a straight optical axis, therefore the analysis of deflection can be based on the principles used in the previous chapters.


Potential Distribution Electrostatic Field Beam Deflection Magnetic Vector Potential Optical Prism 
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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • Miklos Szilagyi
    • 1
  1. 1.University of ArizonaTucsonUSA

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