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Beam Deflection

  • Miklos Szilagyi
Part of the Microdevices book series (MDPF)

Abstract

Particle beams must be deflected for different purposes. The most common and classical type of deflection is used in cathode ray tubes, lithography machines, scanning electron microscopes, and some other analytical instruments. Its purpose is to scan the beam over a surface. The main feature of this type of deflection is that the undeflected beam has a straight optical axis, therefore the analysis of deflection can be based on the principles used in the previous chapters.

Keywords

Potential Distribution Electrostatic Field Beam Deflection Magnetic Vector Potential Optical Prism 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • Miklos Szilagyi
    • 1
  1. 1.University of ArizonaTucsonUSA

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