Summary and Future Processes

  • Wayne M. Moreau
Part of the Microdevices book series (MDPF)


In this chapter I would like to restate the significant materials and processes which have aided the progress of semiconductor lithography. I shall also project into the future with processes for the next decade of submicrometer technology.


Lithographic Process Image Layer Material Safety Data Sheet Negative Photoresist Positive Photoresist 
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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • Wayne M. Moreau
    • 1
  1. 1.General Technology DivisionInternational Business Machines CorporationNew YorkUSA

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