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Subtractive Etching

  • Wayne M. Moreau
Part of the Microdevices book series (MDPF)

Abstract

Dragon’s blood is a sidewall banking agent (Fig. 13-1-1) that is dusted on lithographic plates to reduce lateral undercutting. The banking agent is an early attempt at anisotropic etching of amorphous materials. Since isotropic etching involves neutral species and generally proceeds to etch laterally and vertically in regions defined by a resist mask, the width of the desired feature can be widened by isotropic subtractive etching by as much as twice the thickness of the etched substrate film. On the other hand, anisotropic directional etching involves charged species and can achieve almost perfect reproduction of the opening in the resist mask. Etching is the most critical step in the lithography process since images are irreversibly transferred into a permanent film.

Keywords

Etch Rate Plasma Etching Japanese Patent Anisotropic Etching Silicon Etching 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • Wayne M. Moreau
    • 1
  1. 1.General Technology DivisionInternational Business Machines CorporationNew YorkUSA

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