Abstract
The practicability of using the cold-cathode glow discharge to measure gas pressure in the region below 10−3 mbar was first realized by Penning1, who used a strong magnetic field to increase the electron path length from cathode to anode, so raising the ionization to a measurable level. In 1937 he described a practical gauge in which a discharge took place between an anode (made in the form of a loop), and two zirconium discs connected together electrically (one on each side of the ring) acting as cathode. The geometrical arrangement is shown in Figure 4.1. A permanent magnet was placed with its field parallel to the axis of symmetry. With a field strength of about 0.04 tesla and a constant anode-cathode voltage, the discharge current was found to be proportional to pressure in the range 10−5 to 10−3 mbar. At constant pressure, the current increased with increasing voltage; at 2000 V (the recommended operating value) the current was approximately 1 mA at a nitrogen pressure of 10−3 mbar.
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© 1989 Blackie & Son Ltd.
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Leck, J.H. (1989). Cold-cathode ionization gauges. In: Total and Partial Pressure Measurement in Vacuum Systems. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0877-5_4
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DOI: https://doi.org/10.1007/978-1-4613-0877-5_4
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4612-8224-2
Online ISBN: 978-1-4613-0877-5
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