Measuring and Identifying Particles in Ultrapure Water

  • Marjorie K. Balazs

Abstract

The refinements of particle counters have permitted particle counting down to a level of 0.3μm. Recent problems in IC processing, however, have made it apparent that those unseen particles in the sub-0.3μm sizes are causing catastrophic “yield busts”.

Keywords

Siliceous Shipping Hydrocarbon Rubber Gypsum 

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References

  1. 1.
    B. Stanczyk and T. Chu, The value of SEM particle counting in monitoring DI water, Proceedings of Semiconductor Pure Water Conference, Santa Clara, 1987, p. 194Google Scholar
  2. 2.
    R. Hango, B. Eldred, and B. Frith, D.I. Water: A common sense approach, Proceedings of Semiconductor Pure Water Conference, San Jose, 1984, p. 127Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • Marjorie K. Balazs
    • 1
  1. 1.Balazs Analytical LaboratoryMt. ViewUSA

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