A Real-Time Fallout Monitor for 5–250 Micrometer Particles

  • Peter G. Borden
  • Jon Munson
  • Donald W. Bartelson

Abstract

In many assembly and clean room applications it is desirable to continuously monitor fallout or sedimentation of large particles, typically greater than 5 microns in diameter. The accepted technique for monitoring sedimentation today is to collect particles on a witness plate and count them at periodic intervals. In many cases, however, it is important to observe sedimentation in real-time. For example, in a location where machinery operates, real-time monitoring can provide immediate warning of a problem.

Keywords

Transportation Sedimentation Settling 

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References

  1. 1.
    MIL-STD-1246A, “Product Cleanliness Levels and Contamination Control Program”.Google Scholar
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    W. C. Hinds, editor, “Aerosol Technology,” Chapter 3, Wiley Interscience, New York, 1982.Google Scholar
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    O. Hamberg and E. M. Shon, Particle size determination on surfaces in clean rooms, Proceedings of the Institute of Environmental Sciences Conference, May 1–3, 1984.Google Scholar
  4. 4.
    P. Borden, Y. Baron, and B. McGinley, Monitoring particles in vacuum-process equipment, Microcontamination, 30–34, October 1987.Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • Peter G. Borden
    • 1
  • Jon Munson
    • 1
  • Donald W. Bartelson
    • 2
  1. 1.High Yield TechnologyMountain ViewUSA
  2. 2.Lockheed Space Operations CompanyKennedy Space CenterUSA

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