A Real-Time Fallout Monitor for 5–250 Micrometer Particles
In many assembly and clean room applications it is desirable to continuously monitor fallout or sedimentation of large particles, typically greater than 5 microns in diameter. The accepted technique for monitoring sedimentation today is to collect particles on a witness plate and count them at periodic intervals. In many cases, however, it is important to observe sedimentation in real-time. For example, in a location where machinery operates, real-time monitoring can provide immediate warning of a problem.
KeywordsCritical Surface Overhead Crane Collection Plate Kennedy Space Saturday Afternoon
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- 1.MIL-STD-1246A, “Product Cleanliness Levels and Contamination Control Program”.Google Scholar
- 2.W. C. Hinds, editor, “Aerosol Technology,” Chapter 3, Wiley Interscience, New York, 1982.Google Scholar
- 3.O. Hamberg and E. M. Shon, Particle size determination on surfaces in clean rooms, Proceedings of the Institute of Environmental Sciences Conference, May 1–3, 1984.Google Scholar
- 4.P. Borden, Y. Baron, and B. McGinley, Monitoring particles in vacuum-process equipment, Microcontamination, 30–34, October 1987.Google Scholar