Abstract
We have two amplitude and phase measuring acoustic microscopes, one at low frequency (3-10 MHz) which is used for measurements in metals and composites, and the other operating at frequencies of up to 200 MHz which is used for higher resolution measurements. The added dimension of having phase information allows us to use image processing for a variety of applications. We have demonstrated the following applications with these two microscopes: V(z) inversion for reflectance function calculations, depth determination for delaminations in composite materials, slowness curve measurements in anisotropic materials, image enhancement of subsurface defects, measurements of depth of trenches in aluminum samples (scaled problem of silicon trenches), and measurement of visco-elastic properties of thin surfactant films on a water surface.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
K.K. Liang, G. S. Kino, and B. T. Khuri-Yakub, IEEE Sonics and Ultrasonics SU-32 (2), 213 (March 1985).
P. Reinholdtsen and B. T. Khuri-Yakub, “Acoustic Microscopy Using Amplitude and Phase Measurements, Review of Progress in Quantitative Nondestructive Evaluation.” Vol. 6A, Eds: D. O. Thompson and D. E. Chimenti, 543–551 (Plenum Press, New York, 1987).
P. A. Reinholdtsen, C-H. Chou, and B. T. Khuri-Yakub, “Quantitative Acoustic Microscopy Using Amplitude and Phase Imaging,” Proc. IEEE Ultrasonics Symp., October 14–16, 1987, Denver, Colorado (1987).
P. A. Reinholdtsen and B. T. Khuri-Yakub, “Removing the Effects of Surface Roughness from Acoustic Images,” Review of Progress in Quantitative NDE. Eds: D.O. Thompson and D. E. Chimenti (Plenum Press, New York, 1988).
G. Ewing, “Slicks, Surface Films, and Internal Waves,”J. Marine Res. 2., 161–187 (1950).
W.D. Garrett and J. D. Boltman, “Capillary-Wave Damping by Insoluble Organic Monolayers,” J. Colloid Sci. 8l, 798–801 (1963).
R.S. Hansen and J.A. Mann, “Propagation Characteristics of Capillary Ripples: I. The Theory of Velocity Dispersion and Amplitude Attenuation of Plane Capillary Waves on Visco-Elastic Films”J. Appl. Phys. 35 152–158 (1964).
G. D. Crapper, Introduction to Water Waves. Ellis Harwood, Chichester (1984).
J.W. Goodman, Introduction to Fourier Optics. McGraw-Hill (1968).
P. C. D. Hobbs, R. L. Jungerman, and G. S. Kino, “Proc. of SPIE”, Vol.565, Micron and Submicron Integrated Circuit Metrology (1985).
F.J. Harris, Proc. IEEE fifi. (1), 51 (January 1978).
R. A. Lemons and C. F. Quate, Appl. Phys. Lett. 24, 163 (1974).
C. F. Quate, A. Atalar, and H. K. Wickramasinghe, Proc. IEEE 67, 1052 (1979).
A. Atalar, J. Appl. Phys. 45., 5130–5139 (October 1979).
See IEEE Trans, on Sonics and Ultrasonics, Special Issue on Acoustic Microscopy SU-32(2)(March 1985).
K. Liang, S.D. Bennett, B. T. Khuri-Yakub, and G. S. Kino, “Precision Phase Measurements with the Acoustic Microscope,” IEEE Trans, on Sonics & Ultrasonics SU-32 (2), 266–273 (March 1985).
B. A. Auld, Acoustic Waves and Fields in Solids. Wiley-lnterscience (New York, 1973).
B. T. Khuri-Yakub, P. A. Reinholdtsen, C-H. Chou, J. F. Vesecky, and C. C. Teague, Appl. Phys. Lett. 52.(19), 1571 (9 May 1988).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1989 Plenum Press, New York
About this chapter
Cite this chapter
Khuri-Yakub, B.T., Reinholdtsen, P., Chou, CH., Parent, P., Cinbis, C. (1989). Amplitude and Phase Acoustic Microscopy and its Application to QNDE. In: Shimizu, H., Chubachi, N., Kushibiki, Ji. (eds) Acoustical Imaging. Acoustical Imaging, vol 17. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0791-4_18
Download citation
DOI: https://doi.org/10.1007/978-1-4613-0791-4_18
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4612-8084-2
Online ISBN: 978-1-4613-0791-4
eBook Packages: Springer Book Archive