Amplitude and Phase Acoustic Microscopy and its Application to QNDE

  • B. T. Khuri-Yakub
  • P. Reinholdtsen
  • C-H Chou
  • P. Parent
  • C. Cinbis
Part of the Acoustical Imaging book series (ACIM, volume 17)

Abstract

We have two amplitude and phase measuring acoustic microscopes, one at low frequency (3-10 MHz) which is used for measurements in metals and composites, and the other operating at frequencies of up to 200 MHz which is used for higher resolution measurements. The added dimension of having phase information allows us to use image processing for a variety of applications. We have demonstrated the following applications with these two microscopes: V(z) inversion for reflectance function calculations, depth determination for delaminations in composite materials, slowness curve measurements in anisotropic materials, image enhancement of subsurface defects, measurements of depth of trenches in aluminum samples (scaled problem of silicon trenches), and measurement of visco-elastic properties of thin surfactant films on a water surface.

Keywords

Surfactant Anisotropy Attenuation Convolution Trench 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    K.K. Liang, G. S. Kino, and B. T. Khuri-Yakub, IEEE Sonics and Ultrasonics SU-32 (2), 213 (March 1985).Google Scholar
  2. 2.
    P. Reinholdtsen and B. T. Khuri-Yakub, “Acoustic Microscopy Using Amplitude and Phase Measurements, Review of Progress in Quantitative Nondestructive Evaluation.” Vol. 6A, Eds: D. O. Thompson and D. E. Chimenti, 543–551 (Plenum Press, New York, 1987).Google Scholar
  3. 3.
    P. A. Reinholdtsen, C-H. Chou, and B. T. Khuri-Yakub, “Quantitative Acoustic Microscopy Using Amplitude and Phase Imaging,” Proc. IEEE Ultrasonics Symp., October 14–16, 1987, Denver, Colorado (1987).Google Scholar
  4. 4.
    P. A. Reinholdtsen and B. T. Khuri-Yakub, “Removing the Effects of Surface Roughness from Acoustic Images,” Review of Progress in Quantitative NDE. Eds: D.O. Thompson and D. E. Chimenti (Plenum Press, New York, 1988).Google Scholar
  5. 5.
    G. Ewing, “Slicks, Surface Films, and Internal Waves,”J. Marine Res. 2., 161–187 (1950).Google Scholar
  6. 6.
    W.D. Garrett and J. D. Boltman, “Capillary-Wave Damping by Insoluble Organic Monolayers,” J. Colloid Sci. 8l, 798–801 (1963).CrossRefGoogle Scholar
  7. 7.
    R.S. Hansen and J.A. Mann, “Propagation Characteristics of Capillary Ripples: I. The Theory of Velocity Dispersion and Amplitude Attenuation of Plane Capillary Waves on Visco-Elastic Films”J. Appl. Phys. 35 152–158 (1964).ADSMATHCrossRefGoogle Scholar
  8. 8.
    G. D. Crapper, Introduction to Water Waves. Ellis Harwood, Chichester (1984).MATHGoogle Scholar
  9. 9.
    J.W. Goodman, Introduction to Fourier Optics. McGraw-Hill (1968).Google Scholar
  10. 10.
    P. C. D. Hobbs, R. L. Jungerman, and G. S. Kino, “Proc. of SPIE”, Vol.565, Micron and Submicron Integrated Circuit Metrology (1985).Google Scholar
  11. 11.
    F.J. Harris, Proc. IEEE fifi. (1), 51 (January 1978).Google Scholar
  12. 12.
    R. A. Lemons and C. F. Quate, Appl. Phys. Lett. 24, 163 (1974).ADSCrossRefGoogle Scholar
  13. C. F. Quate, A. Atalar, and H. K. Wickramasinghe, Proc. IEEE 67, 1052 (1979).ADSCrossRefGoogle Scholar
  14. 14.
    A. Atalar, J. Appl. Phys. 45., 5130–5139 (October 1979).Google Scholar
  15. 15.
    See IEEE Trans, on Sonics and Ultrasonics, Special Issue on Acoustic Microscopy SU-32(2)(March 1985).Google Scholar
  16. 16.
    K. Liang, S.D. Bennett, B. T. Khuri-Yakub, and G. S. Kino, “Precision Phase Measurements with the Acoustic Microscope,” IEEE Trans, on Sonics & Ultrasonics SU-32 (2), 266–273 (March 1985).Google Scholar
  17. 17.
    B. A. Auld, Acoustic Waves and Fields in Solids. Wiley-lnterscience (New York, 1973).Google Scholar
  18. 18.
    B. T. Khuri-Yakub, P. A. Reinholdtsen, C-H. Chou, J. F. Vesecky, and C. C. Teague, Appl. Phys. Lett. 52.(19), 1571 (9 May 1988).ADSCrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • B. T. Khuri-Yakub
    • 1
  • P. Reinholdtsen
    • 1
  • C-H Chou
    • 1
  • P. Parent
    • 1
  • C. Cinbis
    • 1
  1. 1.Edward L. Ginzton LaboratoryStanford UniversityStanfordUSA

Personalised recommendations