Abstract
The modern energy-dispersive x-ray spectrometer (EDS) coupled with a computer-based multichannel analyzer (MCA) provides a powerful analytical facility in the SEM lab. The purpose of this laboratory is to introduce the student to the wide range of analytical capabilities of the EDS/MCA system and to illustrate the basic appearance and characteristics of electron-excited x-ray spectra. Procedures for both qualitative and quantitative analysis will be examined. More detail on these subjects can be found in SEMXM, Chapters 6, 7, and 8.
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© 1990 Plenum Press, New York
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Lyman, C.E. et al. (1990). Energy-Dispersive X-Ray Microanalysis. In: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0635-1_6
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DOI: https://doi.org/10.1007/978-1-4613-0635-1_6
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-306-43591-1
Online ISBN: 978-1-4613-0635-1
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