Bulk Specimens for SEM and X-Ray Microanalysis

  • Charles E. Lyman
  • Joseph I. Goldstein
  • Alton D. RomigJr.
  • Patrick Echlin
  • David C. Joy
  • Dale E. Newbury
  • David B. Williams
  • John T. Armstrong
  • Charles E. Fiori
  • Eric Lifshin
  • Klaus-Ruediger Peters

Abstract

The purpose of this laboratory is to prepare samples of metallic, ceramic, polymeric, and biological specimens for examination and analysis in the SEM. The organization is such that under each type of material sample preparations are discussed for surface topography (e.g., fracture surface), microstructural analysis (e.g., phase morphology), and x-ray microanalysis. Special procedures for semiconductor devices, polymers, and biological samples are also considered. The objective is to provide a brief outline and enough general references to enable the reader to produce all of the specimens used in this workbook. The outlined methods should not be considered comprehensive, however, and the reader is strongly urged to consult the references listed. For further discussion, see SEMXM, Chapters 9–12.

Keywords

Titanium Nickel Dioxide Dust Graphite 

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References

  1. [1]
    G. F. vanderVoort, Metallography: Principles and Practice, McGraw-Hill, New York (1984).Google Scholar
  2. [2]
    L. E. Samuels, Metallographic Polishing by Mechanical Methods, Third Edition, American Society for Metals, Metals Park, Ohio (1982).Google Scholar
  3. [3]
    J. L. McCall and W. M. Mueller, Metallographic Specimen Preparation: Optical and Electron Microscopy, Plenum Press, New York (1974).Google Scholar
  4. [4]
    W. Tegart, Electrolytic and Chemical Polishing of Metals in Research and Industry, Second Edition, Pergammon, New York (1959).Google Scholar
  5. [5]
    ASM Metals Handbook, Metallography and Microstructures, 5, ASM International, Metals Park, Ohio (1985).Google Scholar
  6. [6]
    ASTM, Methods of Metallographic Specimen Preparation, ASTM, STP 284, American Society for Testing Materials, Philadelphia, Pennsylvania. (1960).Google Scholar
  7. [7]
    D. B. Holt and D. C. Joy, eds., SEM Microcharacterization of Semiconductors, Academic Press, New York (1989).Google Scholar
  8. [8]
    Petrographic Sample Preparation, AB Met. Dig. 12/13(1), Buehler Ltd., Evanston, Illinois (1973).Google Scholar
  9. [9]
    D. G. W. Smith, ed., Microbeam Techniques, A Short Course Handbook, 1, Minearological Association of Canada (1976).Google Scholar
  10. [10]
    D. E. Caldwell and P. W. Weiblem, Economic Geology, 60 (1965) 1320.CrossRefGoogle Scholar
  11. [11]
    C. M. Taylor and A. S. Radtke, Economic Geology, 60 (1965) 1306.CrossRefGoogle Scholar
  12. [12]
    L. C. Sawyer and D. T. Grubb, Polymer Microscopy, Chapman and Hall, New York (1987).Google Scholar
  13. [13]
    A. S. Holik et al, Grinding and polishing techniques for thin sectioning of polymeric materials for transmission light microscopy, Microstructural Science, 7 (1979) 357–367.Google Scholar
  14. [14]
    U. Linke and W. U. Kopp, Preparation of polished specimens and thin sections of plastics, Praktische Metallographie, 17 (1980) 479–488.Google Scholar
  15. [15]
    D. G. Robinson et al., Methods of Preparation for EM, Springer-Verlag, Berlin (1987).Google Scholar
  16. [16]
    M. A. Hayat, Fixation for Electron Microscopy, Academic Press, New York (1982).Google Scholar
  17. [17]
    M. A. Hayat, Basic Techniques for Transmission Microscopy, Academic Press, New York (1986).Google Scholar
  18. [18]
    A. M. Glauert, ed., Practical Methods in Electron Microscopy, 3 and 5, Elsevier-North Holland (1975–1977).Google Scholar
  19. [19]
    P. B. DeNee, Scanning Electron Microscopy/1978, O. Johari ed., SEM, Inc., AMF O’Hare, Illinois (1978) 479.Google Scholar
  20. [20]
    D. A. Walker, Scanning Electron Microscopy, O. Johari ed., SEM, Inc., AMF O’Hare, Illinois (1978) 185.Google Scholar
  21. [21]
    P. J. Goodhew in “Specimen Preparation for Transmission Electron Microscopy of Materials”, Materials Research Society Symposium Series Vol. 115, J. G. Bravman, R. M. Anderson, and M. L. McDonald eds. (1988) 51.Google Scholar

Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • Charles E. Lyman
    • 1
  • Joseph I. Goldstein
    • 1
  • Alton D. RomigJr.
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • Dale E. Newbury
    • 5
  • David B. Williams
    • 1
  • John T. Armstrong
    • 6
  • Charles E. Fiori
    • 5
  • Eric Lifshin
    • 7
  • Klaus-Ruediger Peters
    • 8
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.Sandia National LaboratoriesAlbuquerqueUSA
  3. 3.University of CambridgeCambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.National Institute of Standards and TechnologyGaithersburgUSA
  6. 6.California Institute of TechnologyPasadenaUSA
  7. 7.GE Corporate Research and DevelopmentSchenectadyUSA
  8. 8.The University of Connecticut Health CenterFarmingtonUSA

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