Abstract
The purpose of this laboratory is to demonstrate quantitative x-ray microanalysis as practiced on an electron column instrument equipped with an energy-dispersive spectrometer (EDS) and a computer-based multichannel analyzer (MCA). Although the difficult calculations of quantitative x-ray microanalysis are performed automatically in the MCA, the analyst must be aware of the responsibility to select operating conditions that optimize accuracy and precision. As with the WDS, increasing the accelerating voltage will improve the x-ray count rate and peak-to-background ratio and therefore the precision and sensitivity, respectively. However, increasing the beam voltage will also increase the absorption of lower-energy x-ray lines such as aluminum. More details may be found in SEMXM, Chapters 3, 5, and 7.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 1990 Plenum Press, New York
About this chapter
Cite this chapter
Lyman, C.E. et al. (1990). Quantitative Energy-Dispersive X-Ray Microanalysis. In: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0635-1_19
Download citation
DOI: https://doi.org/10.1007/978-1-4613-0635-1_19
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-306-43591-1
Online ISBN: 978-1-4613-0635-1
eBook Packages: Springer Book Archive