Quantitative Wavelength-Dispersive X-Ray Microanalysis
The purpose of this laboratory is to demonstrate quantitative x-ray microanalysis as practiced on an electron column instrument equipped with a wavelength-dispersive spectrometer (WDS) and appropriate detector electronics. Although the calculation of composition is performed automatically in the computer, the analyst must be aware of the responsibility to select operating conditions that optimize accuracy and precision. The experimental measurements will show that increasing the beam voltage will increase x-ray count rate and the peak-to-background ratio and therefore the precision and sensitivity. But, at the same time, higher voltages dramatically increase the absorption of lower-energy (longer-wavelength) x-ray lines. More details may be found in SEMXM, Chapters 3, 5, and 7.
KeywordsLithium Fluoride Percent Relative Error Select Operating Condition Quantitative Analysis Procedure Crystal Interplanar Spacing
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