Abstract
The purpose of this laboratory is to understand voltage contrast (VC) and electron beam induced contrast (EBIC) as important tools for the examination of semiconductor materials which aid in the production of microcircuit devices. More details may be found in ASEMXM, Chapter 2.
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© 1990 Plenum Press, New York
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Lyman, C.E. et al. (1990). Voltage Contrast and EBIC. In: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0635-1_15
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DOI: https://doi.org/10.1007/978-1-4613-0635-1_15
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-306-43591-1
Online ISBN: 978-1-4613-0635-1
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