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High-Resolution SEM Imaging

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Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy

Abstract

Secondary electron (SE) images of various specimens will be taken at different magnifications and accelerating voltages and will be compared to the BSE image. High-resolution SE-I image features will be demonstrated and the SE-I imaging conditions defined. This technique has been developed since the publication of SEMXM and so additional explanatory material is given in Section 11.1. More details can be found in references [1–3].

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References

  1. K.-R. Peters, Microbeam Analysis, A. D. Romig and J. I. Goldstein (eds.), San Francisco Press (1984) 77–80.

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  2. D. C. Joy, Journal of Microscopy, 136 (1984) 241–258.

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  3. K.-R. Peters, Scanning Microscopy (1985) 1519–1544.

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  4. K. Murata, J. Appl. Phys., 45 (1974) 4110.

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Author information

Authors and Affiliations

  1. Lehigh University, Bethlehem, Pennsylvania, USA

    Charles E. Lyman, Joseph I. Goldstein & David B. Williams

  2. Sandia National Laboratories, Albuquerque, New Mexico, USA

    Alton D. Romig Jr.

  3. University of Cambridge, Cambridge, England

    Patrick Echlin

  4. University of Tennessee, Knoxville, Tennessee, USA

    David C. Joy

  5. National Institute of Standards and Technology, Gaithersburg, Maryland, USA

    Dale E. Newbury & Charles E. Fiori

  6. California Institute of Technology, Pasadena, California, USA

    John T. Armstrong

  7. GE Corporate Research and Development, Schenectady, New York, USA

    Eric Lifshin

  8. The University of Connecticut Health Center, Farmington, Connecticut, USA

    Klaus-Ruediger Peters

Authors
  1. Charles E. Lyman
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  2. Joseph I. Goldstein
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  3. Alton D. Romig Jr.
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  4. Patrick Echlin
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  5. David C. Joy
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  6. Dale E. Newbury
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  7. David B. Williams
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  8. John T. Armstrong
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  9. Charles E. Fiori
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  10. Eric Lifshin
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  11. Klaus-Ruediger Peters
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© 1990 Plenum Press, New York

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Lyman, C.E. et al. (1990). High-Resolution SEM Imaging. In: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0635-1_11

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  • DOI: https://doi.org/10.1007/978-1-4613-0635-1_11

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-43591-1

  • Online ISBN: 978-1-4613-0635-1

  • eBook Packages: Springer Book Archive

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