Low-Voltage SEM

  • Charles E. Lyman
  • Joseph I. Goldstein
  • Alton D. RomigJr.
  • Patrick Echlin
  • David C. Joy
  • Dale E. Newbury
  • David B. Williams
  • John T. Armstrong
  • Charles E. Fiori
  • Eric Lifshin
  • Klaus-Ruediger Peters

Abstract

This laboratory explores some of the principal phenomena observed at low beam energies. Images prepared at “conventional” beam energies, e.g., 15 keV and above, are compared with low-beam-energy images, e.g., 5 keV and below. The possibility of examining uncoated insulators by taking advantage of enhanced emission of secondary electrons at low energy is also examined.

Keywords

Quartz Calcite Polystyrene 

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Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • Charles E. Lyman
    • 1
  • Joseph I. Goldstein
    • 1
  • Alton D. RomigJr.
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • Dale E. Newbury
    • 5
  • David B. Williams
    • 1
  • John T. Armstrong
    • 6
  • Charles E. Fiori
    • 5
  • Eric Lifshin
    • 7
  • Klaus-Ruediger Peters
    • 8
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.Sandia National LaboratoriesAlbuquerqueUSA
  3. 3.University of CambridgeCambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.National Institute of Standards and TechnologyGaithersburgUSA
  6. 6.California Institute of TechnologyPasadenaUSA
  7. 7.GE Corporate Research and DevelopmentSchenectadyUSA
  8. 8.The University of Connecticut Health CenterFarmingtonUSA

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