This laboratory explores some of the principal phenomena observed at low beam energies. Images prepared at “conventional” beam energies, e.g., 15 keV and above, are compared with low-beam-energy images, e.g., 5 keV and below. The possibility of examining uncoated insulators by taking advantage of enhanced emission of secondary electrons at low energy is also examined.
KeywordsBeam Energy Beam Damage High Beam Energy Electron Beam Damage Polystyrene Latex Sphere
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