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HOLZ Diffraction from Semiconductor Superlattices

  • H. Gong
  • C. D. de Haan
  • F. W. Schapink
Part of the NATO ASI Series book series (NSSB, volume 203)

Abstract

Superlattice higher-order Laue zone (HOLZ) rings of diffraction are observed to occur in CBED patterns taken in plan view from GaAs/AlAs superlattices. The fine structure of these superlattice reflections is characteristically different from the corresponding structure of fundamental reflections originating from the average lattice. These diffraction effects, induced by composition modulation, are discussed and compared with strain modulation effects occurring in CBED patterns from other systems such as GaAs/InGaAs or Si/GeSi.

Keywords

Average Lattice Diffraction Effect Strain Modulation Superlattice Reflection Electron Diffraction Study 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • H. Gong
    • 1
  • C. D. de Haan
    • 1
  • F. W. Schapink
    • 1
  1. 1.Laboratory of MetallurgyDelft University of TechnologyDelftThe Netherlands

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