Convergent Beam Electron Diffraction Studies of Defects, Strains and Composition Profiles in Semiconductors
This paper shows how convergent beam electron diffraction has been used at Bristol to study strains, defects and composition profiles in plan-view semiconductor multilayers. It is shown that epitaxial strains in bicrystals and multilayers can be measured down to ~ 0.1% and that varying strain fields near dislocations and interfaces can be investigated with high sensitivity. It is also shown that convergent beam diffraction gives a powerful new method of examining superlattice reflections from both periodic and irregular multilayer structures and studies of single quantum well samples of AlGaAs/GaAs and InP/InGaAs, which give well thicknesses to near monolayer precision, are also described.
KeywordsMisfit Dislocation Composition Profile Superlattice Reflection Convergent Beam Electron Diffraction Super Lattice
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