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Summary of Discussion on Instrumental Requirements for the Evaluation of Advanced Semiconductor Materials by Electron Microscopy

  • J. M. Gibson
Conference paper
Part of the NATO ASI Series book series (NSSB, volume 203)

Abstract

The discussion was divided into three sections: 1) instruments for in-situ studies of surfaces; 2) funding of instruments in Europe and 3) general discussion of instrumentation and post-mortem on the workshop. Thoughout the informal and animated discussions there were several common themes. There was enthusiastic response to the need for in-situ studies: that is the use of the electron microscope as other than a post-mortem method of characterizing structures and more as an experimental tool. This was viewed to be particularly important for semiconductors because of the need for complementary information and well-controlled conditions. The importance of complementary studies of the same sample, whether in-situ or exsitu, was viewed as of paramount importance for progress with semiconductor science, particularly in understanding the relationship between electrical properties and structure. The semiconductor field, despite its “high-tech” image, still relies heavily on empiricism and reproducibility of electrical data is not of the highest level, even in the same lab. As a result, individual microscopists working only on the structural aspects of an otherwise uncharacterized material, will have less of value to contribute than the concerted collaborative effort involving complementary techniques. A final theme arose strongly during funding discussions and that was the need to present a coherent front as a community in stimulating grants.

Keywords

Scanning Tunneling Microscope Scanning Tunneling Microscope Imaging European Economic Community Animated Discussion Reflection Electron Diffraction 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    European Workshop on the “Future of Electron Microscopy-Prospects and Instrumentation, ” Toulouse, Jan. 1987, Final Report ed., B. Jouffrey.Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • J. M. Gibson
    • 1
  1. 1.AT&T Bell LaboratoriesMurray HillUSA

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