Abstract
Modern optoelectronic devices such as quantum well lasers contain thin layers (20-100 Å) of different semiconductor materials. Mostly one uses III-V compound semiconductors for example GaAs, AlGaAs, InP, InGaAs etc. These structures are grown using MOCVD, MBE or CBE growth technologies1. All these techniques have in common that one operates under a large excess of group V elements, which serves to stabilize the surface.
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© 1996 Plenum Press, New York
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van Hall, P.J., Kökten, H., Leys, M.R., Bosch, M. (1996). Monte Carlo Simulation of Mbe Growth of GaAs Analysis of Rheed. In: Gonis, A., Turchi, P.E.A., Kudrnovský, J. (eds) Stability of Materials. NATO ASI Series, vol 355. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0385-5_16
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DOI: https://doi.org/10.1007/978-1-4613-0385-5_16
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