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Forward Recoil Spectrometry pp 85–125Cite as

Elastic Spectrometry

Fundamental and Practical Aspects

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Abstract

The scattering of energetic ions by elemental target atoms has proved to be a useful tool in studying materials (e.g., thin films, surfaces, bulk solids). The parameters accessible to measurement by an elastic interaction can be divided into two groups: physicals parameters attached to the ion trajectory and the collision process, for example, cross sections, stopping powers, ranges and path lengths, resonances, etc.; the inventory of the target sample, for instance, target thickness, roughness of target surface, elemental constituents, depth profiles, elemental impurities, etc.

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Author information

Authors and Affiliations

  1. SECTOR, Courtaboeuf, France

    Jorge Tirira

  2. DTA/CEREM/DECM/SRMP, CEA Saclay, France

    Yves Serruys

  3. CEA-CNRS Laboratoire Pierre Sue, DSM/DRECAM, CEA Saclay, France

    Patrick Trocellier

Authors
  1. Jorge Tirira
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  2. Yves Serruys
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  3. Patrick Trocellier
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© 1996 Plenum Press, New York

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Tirira, J., Serruys, Y., Trocellier, P. (1996). Elastic Spectrometry. In: Forward Recoil Spectrometry. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0353-4_4

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  • DOI: https://doi.org/10.1007/978-1-4613-0353-4_4

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-8012-2

  • Online ISBN: 978-1-4613-0353-4

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