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Applications of Elastic Recoil Spectrometry to Hydrogen Determination in Solids

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Forward Recoil Spectrometry

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Abstract

A large number of application examples of ERDA spectrometry were given in previous chapters concerning the determination of hydrogen isotopes as depth profiling other light elements (Chapters 5–9). These examples are classified on the basis of the ERDA spectrometry involved. In Chapter 12 we focus on hydrogen isotope determination using conventional ERDA. We illustrate the wide range of application fields covered by this type of investigation.

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References

  1. Russell, T. P., The characterization of polymer interfaces, Ann. Rev. Mater Sci. 21, 249 (1991).

    Article  CAS  Google Scholar 

  2. Chou, N. J., Marwick, A. D., Goldblatt, R. D., Li, L., Coleman, G., Heidenreich, J. E., and Paraszczak, J. R., An isotope approach to characterization of microwave-water-plasma-modified polyimide surfaces, J. Vac. Sci. Technol. A 10, 248 (1992).

    Article  CAS  Google Scholar 

  3. Tead, S.F., Kramer, E. J., Russell, T. P., and Volksen, W., Interdiffusion at polyimide interfaces, Polymer 33, 3382 (1992).

    Article  CAS  Google Scholar 

  4. Shull, K. R., Dai, K. H., Kramer, E. J., Fetters, L. J., Antonietti, M., and Silelescu, H., Diffusion by constraint release in branched macromolecular matrices, Macromolecules 24, 505 (1991).

    Article  CAS  Google Scholar 

  5. Shull, K. R., Kramer, E. J., Bates, F. S., and Rosedale, J. H., Self-diffusion of symmetric diblock copolymer melts near the ordering transition, Macromolecules 24, 1383 (1991).

    Article  CAS  Google Scholar 

  6. Composto, R. J., Kramer, E. J., and White, D. M., Reptation in polymer blends. Polymer 31, 2320 (1990).

    Article  CAS  Google Scholar 

  7. Zhao, X., Zhao, W., Sokolov, J., Rafailovich, M. H., Schwarz, S. A., Wilkens, B. J., Jones, R. A. L., and Kramer, E. J., Determination of the concentration profile at the surface of d-PS/h-PS blends using high-resolution ion-scattering techniques, Macromolecules 24, 5991 (1991).

    Article  CAS  Google Scholar 

  8. Dai, K. H., Kramer, E. J., and Shull, K. R., Interfacial segregation in two-phase polymer blends with diblock copolymer additives: The effect of homopolymer molecular weight, Macromolecules 25, 220 (1992).

    Article  CAS  Google Scholar 

  9. Krausch, G., Dai, C. A., Kramer, E. J., Marko, J. F., and Bates, F. S., Interference of spinodal waves in thin polymer films, Macromolecules 26, 5566 (1993).

    Article  CAS  Google Scholar 

  10. Green, P. E, Adolf, D. B., and Gilliom, L. R., Dynamics of polystyrene/poly(vinyl methyl ether) blends, Macromolecules 24, 3377 (1991).

    Article  CAS  Google Scholar 

  11. Mills, P. J., Green, P. E, Palmstrom, C. J., Mayer, J. W., and Kramer, E. J., Analysis of diffusion in polymers by forward recoil spectrometry, Appl. Phys. Lett. 45, 957 (1984).

    Article  CAS  Google Scholar 

  12. Bruder, F., and Brenn, R., Measuring the binodal by interdiffusion in blends of deuterated polystyrene and poly(styrene-co-4-bromostyrene), Macromolecules 24, 5552 (1991) and Spinodal decomposition in thin films of a polymer blend, Phys. Rev. Lett. 69, 624 (1992).

    Article  CAS  Google Scholar 

  13. Green, P. E, and Russell, T. P., Segregation of low molecular weight symmetric diblock copolymers at the interface of high molecular weight homopolymers, Macromolecules 24, 2931 (1991).

    Article  CAS  Google Scholar 

  14. Green, P. E, and Russell, T. P., Adsorption of copolymer chains from a melt onto a flat surface, Macromolecules 25, 783 (1992).

    Article  CAS  Google Scholar 

  15. Lewis, M. B., and Lee, E. H., Residual gas and ion beam analysis of ion-irradiated polymers, Nucl. lnstrum. Methods Phys. Res. Sect. B 61, 457 (1991).

    Article  Google Scholar 

  16. Calcagno, L., and Foti, G., Interdiffusion in polystyrene crosslinked by keV ion irradiation, J. Appl. Phys. 71, 3216 (1992).

    Article  CAS  Google Scholar 

  17. Wang, Y., Mohite, S. S., Bridwell, L. B., Gield, R. E., and Sofield, C. J., Modification of high-temperature and high-performance polymers by ion implantation, J. Mater. Res. 8, 388 (1993).

    Article  CAS  Google Scholar 

  18. Tirira, J., Frontier, J. P., Trocellier, P., and Trouslard, P., Development of a simulation algorithm for energy spectra of elastic recoil spectrometry, Nucl. Instrum. Methods Phys. Res. Sect. B 54, 328 (1991).

    Article  Google Scholar 

  19. Wang, W., Lin, S., Bao, J., Rong, T., Wan, H., and Sun, J., The n-type doping of polyaniline films by ion implantation, Nucl. Instrum. Methods Phys. Res. Sect. B 74, 514 (1993).

    Article  Google Scholar 

  20. Kaiser, R. I., Lauterwein, J., Müller, P., and Roessler, K., Energy density effects in the formation of organic residues in frozen methane by MeV ions, Nucl. Instrum. Methods Phys. Res. Sect. B 65, 463 (1992).

    Article  Google Scholar 

  21. Earwaker, L. G., Briggs, M. C., Nasir, M. I., Fan, J. P. G., and Keen, J. M., Characterisation of thin layers in processed silicon, Nucl. Instrum. Methods Phys. Res. Sect. B 66, 23 (1992).

    Article  Google Scholar 

  22. Gusinskii, G. M., Kudryavtsev, I. V., Kudoyarova, V. Kh., Naïdenov, V. O., and Rassadin, L. A., A method for investigation of light-element distribution in the surface layers of semiconductors and dielectrics, Semicond. Sci. Technol. 7, 881 (1992).

    Article  CAS  Google Scholar 

  23. Ascheron, C., Lehmann, D., Neeljmeijer, C., Schindler, A.. and Bigl, F., Hydrogen depth profiling in bevelled proton-implanted semiconductors by 4He ERDA and 19F NRA, Nucl. Instrum. Methods Phys. Res. Sect. B 63, 412 (1992).

    Article  Google Scholar 

  24. Meda, L., Cerofolini, G. E, Ottaviani, G., Tonini, R., Corni, E, Balboni, R., Anderle. M., Canteri, R., and Dierckx, R., Evidence for molecular hydrogen in single-crystal silicon, Physica B 170, 259 (1991).

    Article  CAS  Google Scholar 

  25. Ramm, J., Beck, E., Zueger, A., Dommann, A., and Pixley, R. E., Hydrogen cleaning of silicon wafers: Investigation of the wafer surface after plasma treatment, Thin Solid Films 228, 23 (1993).

    Article  CAS  Google Scholar 

  26. Naitoh, M., Morioka, H., Shoji, E, and Oura, K., Coadsorption of hydrogen and deuterium on Si(100) surfaces studied by elastic recoil detection analysis, Surf. Sci. 297, 135 (1993).

    Article  CAS  Google Scholar 

  27. Umezawa, K., Yamane, J., Kuroi, T., Oura, K., and Hanawa, T., Nuclear reaction analysis and elastic recoil detection analysis of the retention of deuterium and hydrogen implanted into Si and GaAs crystals, Nucl. Instrum. Methods Phys. Res. Sect. B 33, 638 (1988).

    Article  Google Scholar 

  28. Bae, Y. W., Du, H., Gallois, B., Gonsalves, K. E., and Wilkens, B. J., Structure and chemistry of silicon nitride and silicon carbonitride thin films deposited from ethylsilazane in ammonia or hydrogen, Chem. Mater. 4, 478 (1992).

    Article  CAS  Google Scholar 

  29. Markwitz, A., Bachmann, M., Baumann, H., Bethge, K., and Krimmel, E., Hydrogen profiles of thin PVD silicon nitride films using elastic recoil detection analysis, Nucl. Instrum. Methods Phys. Res. Sect. B 68, 218 (1992).

    Article  Google Scholar 

  30. Niu, H., Wu, S., Huang, S., Lin, J., and Deng, R., Hydrogen depth profiling of SiNX films by the detection of recoiled protons, Nucl. Instrum. Methods Phys. Res. Sect. B 79, 536 (1993).

    Article  Google Scholar 

  31. Ermolieff, A., Sindzingre, T., Marthon, S., Martin, P., Pierre, E, and Pecoud, L., PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS, and ESR, Appl. Surf. Sci. 64, 175 (1993).

    Article  CAS  Google Scholar 

  32. Whitlow, H. J., Andersson, A. B. C., and Petersson, C. S., Thermally grown SiO2 film standards for elastic recoil detection analysis, Nucl. Instrum. Methods Phys. Res. Sect. B 36, 53 (1989).

    Article  Google Scholar 

  33. Finger, F., Kroll, U., Viret, V., Shah, A., Beyer, W., Tang, X. M., Weber, J., Howling, A., and HoIlenstein, Ch., Influences of a high-excitation frequency (70 Mhz) in the glow discharge technique on the process plasma and the properties of hydrogenated amorphous silicon, J. Apps. Phys. 71, 5665 (1992).

    Article  CAS  Google Scholar 

  34. Paquin, L., Leclerc, G., and Wertheimer, M. R., Electrochemical effects in metals-a-Si:H-metal2 structures, Can. J. Phys. 68, 1396 (1990).

    Article  CAS  Google Scholar 

  35. Diawara, Y., Currie, J. E, Najafi, S. I., Brebner, J. L., Cochrane, R. W., and Gujrathi, S. C., Caractérisation des dispositifs photovoltaïques au a-Si:H, Can. J. Phys. 69, 530 (1991).

    Article  CAS  Google Scholar 

  36. Stolze, F., Zacharias, M., Schippel, S., and Garke, B., Compositional investigation of sputtered amorphous SiOX:H, Solid State Commun. 87, 805 (1993).

    Article  CAS  Google Scholar 

  37. Zellama, K., Labidi, H., Germain, P., Von Bardeleben, H. J., Chahed, L., Theye, M. L., Roca I, Cabarrocas, P., Godet C., and Stoquert, J., Systematic study of light-induced effects in hydrogenated amorphous silicon, Phys. Rev. B: Condens. Matter 45, 13314 (1992).

    Article  CAS  Google Scholar 

  38. Amato, G., Della Mea, G., Fizzotti, E. Manfredotti, C., Marchisio, R., and Paccagnella, A., Hydrogen bonding in amorphous silicon with use of the low-pressure chemical-vapor-deposition technique, Phys. Rev. B: Condens. Matter 43, 6627 (1991).

    Article  CAS  Google Scholar 

  39. Cerofolini, G. E, Meda, L., Balboni, R., Corni, E, Frabboni, S., Ottaviani, G., Tonini, R., Anderle, M., and Canteri, R., Hydrogen-related complexes as the stressing species in high-fluence. hydrogen-implanted, single-crystal silicon, Phys. Rev. B: Condens. Matter 46, 2061 (1992).

    Article  CAS  Google Scholar 

  40. Van den Boogaard, M. J., Arnoldbik, W. M., Habraken, F. H. P. M., and Van der Weg, W. F., Deuterium diffusion in a-Si:H studied with elastic recoil detection, J. Non Cryst. Solids 137/138, 29 (1991).

    Google Scholar 

  41. Tang, X. M., Weber, J., Baer, A., and Finger, F. Annealing-temperature influence on the dispersive diffusion of hydrogen in undoped a-Si:H, Phys. Rev. B: Condens. Matter 42, 7277 (1990).

    Article  CAS  Google Scholar 

  42. Mathe, E. L., Naudon, A., Elliq, M., Fogarassy, E., and de Unamuno, S., Influence of hydrogen on the structure and surface morphology of pulsed ArF excimer laser-crystallized amorphous silicon thin films, Appl. Surf. Sci. 54, 392 (1992).

    Article  CAS  Google Scholar 

  43. Asano, A., Slow structural transitions of hydrogen in hydrogenated amorphous silicon during low-temperature annealing, Physica B 170, 277 (1991).

    Article  CAS  Google Scholar 

  44. Demichelis, E, Crovini, G., Perri, C. E, Tresso, E., Giamello, E., and Della Mea, G., Hydrogen evolution in amorphous silicon carbide, Physica B 170, 149 (1991).

    Article  CAS  Google Scholar 

  45. Laidani, N., Capelletti, R., Elena, M., Guzman, L., Mariotto G., Miotello, G. A., and Ossi, P. M., Spectroscopic characterization of thermally treated carbon-rich Si1_„C,, films, Thin Solid Films 223, 114 (1993).

    Article  CAS  Google Scholar 

  46. Herremans, H., Grevendonk, W., van Swaaij, R. A. C. M. M., van Sark, W. G. J. H., Berntsen, A. J. M., Arnoldbik, W. M., and Bezemer, J., Structural, compositional, and optical properties of hydrogenated amorphous silicon-carbon alloys, Philos. Mag. B 66, 787 (1992).

    Article  CAS  Google Scholar 

  47. Kudoyarova, V. Kh., Gusinsky, G. M., Rassadin, L. A., and Kudryavtsev, I. V., Hydrogen depth profile measurement in a a-Sii_XCx:H films by elastic recoil detection, Appl. Surf. Sci. 50, 173 (1991).

    Article  CAS  Google Scholar 

  48. Jean, A., Chaker, M., Diawara, Y., Leung, P. K., Gat, E., Mercier, P. P., Pepin, H., Gujrathi, S., Ross, G. G., and Kieffer, J. C., Characterization of a a-SiC:H films produced in a standard plasma-enhanced chemical vapor deposition system for X-ray mask application, J. Appl. Phys. 72, 3110 (1992).

    Article  CAS  Google Scholar 

  49. Wang, Y., Huang, B., Cao, D., Cao, J., Zhu, D., and Shen, K., Analysis of hydrogen in oxygen-doped polysilicon by 4He+ -H elastic recoil detection, Nucl. Instrum. Methods Phys. Res. Sect. B 84, 111 (1994).

    Article  CAS  Google Scholar 

  50. Barbour, J. C., Stein, H. J., Popov, O. A., Yoder, M., and Outten, C. A., Silicon nitride formation from a silane-nitrogen electron cyclotron resonance plasma, J. Vac. Sci. Technol. A 9, 480 (1991).

    Article  CAS  Google Scholar 

  51. Compagnini, G., Calacagno, L., and Foti, G., Properties of fully implanted Si„Ci_x:H alloys, Nucl. Instrum. Methods Phys. Res. Sect. B 80/81, 978 (1993).

    Google Scholar 

  52. Graeff, C. E O., Freire, E L., Jr., and Chambouleyron, I., Hydrogen and deuterium incorporation and release processes in RF-sputtered hydrogenated or deuterated amorphous germanium films, Philos. Mag. B 67, 691 (1993).

    Article  CAS  Google Scholar 

  53. Feuser, U., Vianden, R., Alves, E., da Silva, M. F., Szildgyi, E., Pâszti, F., and Soares, J. C., Vacancy-acceptor complexes in germanium produced by ion implantation, Nucl. Instrum. Methods Phys. Res. Sect. B 59/60, 1049 (1991).

    Article  Google Scholar 

  54. Scott, W. P. Jones, J., Turner, W. A., and Wickboldt, P., Structural properties of amorphous hydrogenated germanium., J. Non-Cryst. Solids 141, 271 (1992).

    Article  Google Scholar 

  55. Graeff, C. F O., Freire, F. L., Jr., and Chambouleyron, I., Hydrogen diffusion in RF-sputtering a-Ge:H thin films, J. Non-Cryst. Solids 137/138, 41 (1991).

    Google Scholar 

  56. Shimizu, K., Katayama, M., Funaki, H., Arai, E., Nakata, M., Ohji, Y., and Imura, R., Stoichiometry measurement and electrics characteristics of thin-film Ta205 insulator for ultralarge-scale integration, J. Appl. Phys. 74, 375 (1993).

    Article  CAS  Google Scholar 

  57. Gordon, R. G., Riaz, U., and Hoffman, D. M., Chemical vapor deposition of aluminum nitride thin films, J. Mater. Res. 7, 1679 (1992).

    Article  CAS  Google Scholar 

  58. Wu, H. Z., Chou, T. C., Mishra, A., Anderson, D. R., and Lampert, J. K., Characterization of titanium nitride thin films, Thin Solid Films 191, 55 (1990).

    Article  CAS  Google Scholar 

  59. Zdaniewski, W. A., Wu, J., Gujrathi, S.C., and Oxorn, K., Preparation and characterization of sputtered TiB2 films, J. Mater. Res. 6, 1066 (1991).

    Article  CAS  Google Scholar 

  60. Fix, R., Gordon, R. G., and Hoffman, D. M., Chemical vapor deposition of titanium, zirconium, and hafnium nitride thin films, Chem. Mater. 3, 1138 (1991).

    Article  CAS  Google Scholar 

  61. Gordon, R. G., Hoffman, D. M., and Riaz, U., Low-temperature atmospheric pressure chemical vapor deposition of polycrystalline tin nitride thin films, Chem. Mater. 4, 68 (1992).

    Article  CAS  Google Scholar 

  62. Yamada, Y., Kasukabe, Y., Nagata, S., and Yamaguchi, S., Spontaneous hydrogenation of Ti films evaporated on NaCI substrates I, Jpn. J. Appl. Phys. 29, L1888 (1990).

    Article  CAS  Google Scholar 

  63. Krist, Th., Briere, M., and Cser, L., H in Ti thin films, Thin Solid Films 228, 141 (1993).

    Article  CAS  Google Scholar 

  64. Sugizaki, Y., Furuya, T., and Satoh, H., Influence of nitrogen implantation on the hydrogen absorption by titanium, Nucl. Instrum. Methods Phys. Res. Sect. B 59/60, 722 (1991).

    Google Scholar 

  65. Naitoh, M., Shoji, E, and Oura, K., Hydrogen-termination effects on the growth of Ag thin films on Si(111) surfaces, Surf. Sci. 242, 152 (1991).

    Article  CAS  Google Scholar 

  66. Bhattacharya, R. S., Rai, A. K., and McCormick, A. W., Ion-beam-assisted deposition of Al2O3 thin films, Surf. Coat. Technol. 46, 155 (1991).

    Article  CAS  Google Scholar 

  67. Roux, B., Chevarier, A., Chevarier, N., El Bouanani, M., Gerlic, E., Stern, M., Bosland, P., and Guemas, F., Ion beam analysis using alpha particles and protons for compositional determination of niobium-superconducting compound films, Nucl. Instrum. Methods Phys. Res. Sect. B 64, 184 (1992).

    Article  Google Scholar 

  68. Wang, M., Schmidt, K., Reichelt, K., Dimigen, H., and Hübsch, H., Characterization of metal-containing amorphous hydrogenated carbon films, J. Mater. Res. 7, 667 (1992).

    Article  CAS  Google Scholar 

  69. Okada, M., Kono, T., Tanaka, K., Sato, M., and Fujimoto, K., Properties and structure of carbon films prepared by ion beam deposition, Surf. Coat. Technol. 47, 233 (1991).

    Article  CAS  Google Scholar 

  70. Wang, M., Schmidt, K., Reicheilt, K., Jiang, X., Hübsch, H., and Dimigen, H., The properties of W-C:H films deposited by reactive RF sputtering, J. Mater. Res. 7, 1465 (1992).

    Article  CAS  Google Scholar 

  71. Von Seggern, J., Wienhold, P., Esser, H. G., Winter, J., Gorodetsky, A., Grashin, S., Gudowska, L, and Ross, G. G., Properties of a-C/B:H films relevant to plasma-surface interactions, J. Nucl. Mater. 176/177, 357 (1990).

    Google Scholar 

  72. Godet, C., Schmirgeld, L., Zuppiroli, L., Sardin, G., Gujrathi, S. C., and Oxorn, K., Optical properties and chemical reactivity of hydrogenated amorphous boron thin films, J. Mater. Sci. 26, 6408 (1991).

    Article  CAS  Google Scholar 

  73. Paynter, R. W., Ross, G. G., Boucher, C., Pageau, J. E, and Stansfield, B., Analysis of a-C/B:H layers deposited in TdeV, J. Nucl. Mater. 196–198, 553 (1992).

    Article  Google Scholar 

  74. Raveh, A., Martinu, L., Gujrathi, S. C., Klemberg-Sapieha, J. E., and Wertheimer, M. R., Structure-property relationships in dual-frequency plasma deposited on hard a-C:H films, Surf. Coat. Technol. 53, 275 (1992).

    Article  CAS  Google Scholar 

  75. Compagnini, G., Calcagno, L., and Foti, G., Hydrogen effect on atomic configuration of keV-ion-irradiated carbon, Phys. Rev. Lett. 69, 454 (1992).

    Article  CAS  Google Scholar 

  76. Matsunami, N., A study of carbon thin films by ion beams, Nucl. Instrum. Methods Phys. Res. Sect. B 64, 800 (1992).

    Article  Google Scholar 

  77. Freire, F. L., Jr., Achete, C. A., Franceschini, D. E, Gatts, C., and Mariotto, G., Characterization of hard amorphous carbon films implanted with nitrogen ions, Nucl. Instrum. Methods Phys.. Res. Sect. B 80/81, 1464 (1993).

    Google Scholar 

  78. Wang, M., Schmidt, K., Reichelt, K., Dimigen, H., and Hübsch, H., The properties of titanium-containing amorphous hydrogenated carbon films, Surf. Coat. Technol. 47, 691 (1991).

    Article  CAS  Google Scholar 

  79. Boutard, D., Möller, W., and Scherzer, B. M. U., Hydrogen isotope exchange in amorphous hydrocarbon layers: Plasma-deposited a-C:H and ion-saturated carbon, Rad. Eff and Defects in Solids 114, 281 (1990).

    Article  CAS  Google Scholar 

  80. Boutard, D., Möller, W., and Scherzer, B. M. U., Isotopic exchange in hard amorphous carbonized layers, J. Appl. Phys. 67, 163 (1990).

    Article  CAS  Google Scholar 

  81. Perrière, J., Laurent, A., and Enard, J. P., Study of the growth mechanisms of amorphous carbon films by isotopic tracing methods, Mater. Sci. Eng. B 11, 347 (1992).

    Article  Google Scholar 

  82. Grill, A., Patel, V., and Meyerson, B. S., Temperature and bias effects on the physical and tribological properties of diamondlike carbon, J. Electrochem. Soc. 138, 2362 (1991).

    Article  CAS  Google Scholar 

  83. Grill, A., and Patel, V, Characterization of diamondlike carbon by infrared spectroscopy, Appl. Phys. Lett. 60, 2089 (1992).

    Article  CAS  Google Scholar 

  84. Cuomo, J. J., Doyle, J. P., Bruley, J., and Liu, J. C., Ion-beam-sputtered diamondlike carbon with densities of 2.9 g/cc, J. Vac. Sci. Technol. A 9, 2210 (1991).

    Article  CAS  Google Scholar 

  85. Long, X., Peng, X., He, F., Liu, M., and Lin, X., The hydrogen concentration of diamondlike amorphous carbon films by elastic recoil detection analysis, Nucl. Instrum. Methods Phys. Res. Sect. B 68, 266 (1992).

    Article  Google Scholar 

  86. Tanaka, K., Okada, M., Kohno, T., Yanokura, M., and Aratani, M., Hydrogen content and bonding structure of diamondlike carbon films deposited by ion beam deposition, Nucl. Instrum. Methods Phys. Res. Sect. B 58, 34 (1991).

    Article  Google Scholar 

  87. Dekempeneer, E. H. A., Jacobs, R., Smeets, J., Meneve, J., Eersls, L., Blanpain, B., Roos, J., and Oostra, D. J., RF-plasma-assisted chemical vapour deposition of diamondlike carbon: Physical and mechanical properties, Thin Solid Films 217, 56 (1992).

    Article  CAS  Google Scholar 

  88. Wu, R. L. C., Miyoshi, K., Vuppuladhadium, R., and Jackson, H. E., Physical and tribological properties of rapid thermal-annealed diamondlike carbon films, Surf. Coat. Technol. 54/55, 576 (1992).

    Article  Google Scholar 

  89. Nabot, J. P., André, B., and Païdassi, S., Diamondlike carbon films prepared by various ion-beam-assisted techniques, Surf. Coat. Technol. 43/44, 71 (1990).

    Article  Google Scholar 

  90. Peebles, D. E., and Pope, L. E., Analytical and mechanical evaluation of diamond films on silicon, J. Mater. Res. 5, 2589 (1990).

    Article  CAS  Google Scholar 

  91. Kuiper, A. E. T., and Habraken, F H. P. M., Ion beam analysis of interface reactions, Nucl. Instrum. Methods Phys. Res. Sect. B 64, 739 (1992).

    Article  Google Scholar 

  92. Arnold, G. W., Westrich, H. R., and Casey, W. H., Application of ion beam analysis (RBS and ERD) to the surface chemistry study of leached minerals, Nucl. Instrum. Methods Phys. Res. Sect. B 64, 542 (1992).

    Article  Google Scholar 

  93. Matzke, HI., and Turos, A., Mechanisms and kinetics of leaching of UO2 in water, Solid State Ionics 49, 189 (1991).

    Article  CAS  Google Scholar 

  94. Matzke, HI., Della Mea, G., Dran, J. C., Rigato, V., and Bevilacqua, A., Chemical and physical modifications in waste glasses ion implanted at different temperatures, in Modifications Induced by Irradiation in Glasses ( P. Mazzoldi, ed.) ( Elsevier Science, Amsterdam, 1992 ), pp. 25–31.

    Google Scholar 

  95. Freire, F L., Jr., Hydrogen analysis of the surface layers in sodium (3“-alumina crystals by elastic recoil detection, Jpn. J. Appl. Phys. 30, 1428 (1991).

    Article  CAS  Google Scholar 

  96. Freire, F L., Jr., Effects of ion implantation on the hydration of NA(3“-alumina crystals, J. Phys. D Appl. Phys. 25, 974 (1992).

    Article  CAS  Google Scholar 

  97. Keddie, J. L., and Giannelis, E. P., Ion beam analysis of silica sol-gel films: Structural and compositional evolution, J. Am. Ceram. Soc. 73, 3106 (1990).

    Article  CAS  Google Scholar 

  98. Guglielmi, M., Colombo, P., Rigato, V., Battaglin, G., Boscolo-Boscoletto, A., and De Battisti, A., Compositional and microstructural characterization of Ru02-TiO2 catalysts synthesized by the sol-gel method, J. Electrochem. Soc. 139, 1655 (1992).

    Article  CAS  Google Scholar 

  99. Lappalainen, R., Wang, E. L., and Hirvonen, J. P., Application of nuclear methods to the study of transfer wear of PTFE on stainless steel and silicon, Surf. Int. Anal. 16, 385 (1990).

    Article  CAS  Google Scholar 

  100. Ronkainen, H., Likonen, J., and Koskinen, J., Tribological properties of hard-carbon films produced by the pulsed vacuum arc discharge method, Surf Coat. Technol. 54/55, 570 (1992).

    Article  Google Scholar 

  101. Neelmeijer, C., Grötzschel, R., Hentschel, E., Klabes, R., Kolitsch, A., and Richter, E., Ion beam analysis of steel surfaces modified by nitrogen ion implantation, Nucl. Instrum. Methods Phys. Res. Sect. B 66, 242 (1992).

    Article  Google Scholar 

  102. Whitlow, H. J., Johansson, E., Anders Ingemarsson, P., and Hogmark, S., Recoil spectrometry of oil-additive-associated compositional changes in sliding metal surfaces, Nucl. Instrum. Methods Phys. Res. Sect. B 63, 445 (1992).

    Article  Google Scholar 

  103. Rickards, J., Trejo-Luna, R., Ortiz, M. E., Andrade, E., Chavez, E., Zironi, E. P., del Castillo, H., and Sanchez, M., Hydrogen pick-up in ion nitrided steels, Mater. Sci. Technol. 9, 536 (1993).

    CAS  Google Scholar 

  104. Rigato, V., and Della Mea, G., Thin-film stoichiometry and impurity concentration analysis studied by nuclear techniques, Nucl. Instrum. Methods Phys. Res. Sect. A 334, 203 (1993).

    Article  CAS  Google Scholar 

  105. Ila, D., Jenkins, G. M., Holland, L. R., Thompson. J., Evelyn, L., and Hodges, A., Measurement of accumulated contaminants in glassy carbon by RBS, ERD, and NRA, Nucl. Instrum. Methods Phys. Res. Sect. B 64, 439 (1992).

    Article  Google Scholar 

  106. Freire, E L., Jr., Lepienski, C. M., and Achete, C. A., Characterization by Rutherford backscattering, elastic recoil, and nuclear reaction analysis of near-surface modifications of glasses submitted to a DC potential, Nucl. Instrum. Methods Phys. Res. Sect. B 68, 227 (1992).

    Article  Google Scholar 

  107. Wagner, W., Rauch, E, Ottermann, C., and Bange, K., Analysis of tungsten oxide films using MeV ion beams, Nucl. Instrum. Methods Phys. Res. Sect. B 68, 262 (1992).

    Article  Google Scholar 

  108. Jimbou, R., Saidoh, M., Ogiwara, N., Ando, T., Morita, K., and Muto, Y., Retention of deuterium implanted into B4C-overlaid isotropic graphites and hot-pressed B4C, J. Nucl. Mater. 196–198, 958 (1992).

    Article  CAS  Google Scholar 

  109. Kawamura, H., Ishituka, E., Sagara, A., Nakata, H., Saito, M., and Hutamura, Y., Retention of deuterium implanted in hot-pressed beryllium, J. Nucl. Mater. 176/177, 661 (1990).

    Article  Google Scholar 

  110. Rottschalk, M., Bachmann, T., and Witzmann, A., Investigation of proton-exchanged optical wave guides in LiNbO3 using elastic recoil detection, Nucl. Instrum. Methods Phys. Res. Sect. B 61, 91 (1991).

    Article  Google Scholar 

  111. Fournier, D., Ross, G. G., and Saint-Jacques, R. G., The influence of the implantation temperature on the hydrogen and deuterium retention in TiC, Nucl. Instrum. Methods Phys. Res. Sect. B 52, 154 (1990).

    Article  Google Scholar 

  112. Petitpierre, O., Möller, W., and Scherzer, B. M. U., Low-temperature dynamic depth profile measurements of implanted deuterium in nickel: Precipitation of nickel deuteride, J. Appl. Phys. 68, 3169 (1990).

    Article  CAS  Google Scholar 

  113. Mosbah, M., Clocchiatti, R., Tirira, J., Gosset, J., Massiot, P., and Trocellier, P., Study of hydrogen in melt inclusions trapped in quartz with a nuclear microprobe, Nucl. Instrum. Methods Phys. Res. Sect. B 54, 298 (1991).

    Article  Google Scholar 

  114. Ross, G. G., Paynter, R. W., and Michaud, D., Hydrogen and impurity fluxes in the scrape of layer of the Tokamak de Varennes, J. Nucl. Mater. 176/177, 962 (1990).

    Article  Google Scholar 

  115. Ishii, M., Nakashima, K., Tajima, I., and Yamamoto, M., Investigation of hydrogen-plasma-etched Si surfaces, Jpn. J. Appl. Phys. 31, 4422 (1992).

    Article  CAS  Google Scholar 

  116. Nygren, R. E., Doyle, B. L., Walsh, D. S., Ottenberger, W., Brooks, J. N., and Krauss, A. Low-energy helium implantation in evaporated nickel surfaces. J. Nucl. Mater. 196–198, 558 (1992).

    Article  Google Scholar 

  117. Morita, K., and Muto, Y., Isotopic effect in thermal reemission of hydrogen from graphite at elevated temperatures, J. Nucl. Mater. 196–198, 963 (1992).

    Article  CAS  Google Scholar 

  118. Hasebe, Y., Sonobe, M., and Morita, K., Isotopic effect in ion-induced reemission of hydrogen implanted into graphite, J. Nucl. Sci. Technol. 29, 859 (1992).

    Article  CAS  Google Scholar 

  119. Antoni, V., Bagatin, M., Buffa, A., Della Mea, G., Desideri, D., Freire, E L., Jr., Mazzoldi, P., and Romanato, E, Edge plasma investigation on the reversed field pinch ETA BETA II, J. Nucl. Mater. 176/177, 1076 (1990).

    Google Scholar 

  120. Naitoh, M., Ohnishi, H., Ozaki, Y., Shoji, F, and Oura, K., Hydrogen-induced reordering of the Si(111)-’ x Ad-Al surface studied by ERDA/LEED, Appl. Surf. Sci. 60/61, 190 (1992).

    Article  Google Scholar 

  121. Ross, G. G., and Richard, I., Influence of the ion-beam-induced desorption on the quantitative depth profiling of hydrogen in a variety of materials, Nucl. Instrum. Methods Phys. Res. Sect. B 64, 603 (1992).

    Article  Google Scholar 

  122. Ascheron, C., Proton beam modification of selected AIIIBv compounds, Phys. Status Solidi A 124, 11 (1991).

    Article  CAS  Google Scholar 

  123. Tirira, J., Trocellier, P., Mosbah, M., and Metrich, N., Study of hydrogen content in solids by ERDA and radiation-induced damage, Nucl. Instrum. Methods Phys. Res. Sect. B 56/57, 839 (1991).

    Article  Google Scholar 

  124. Boivin, R., Ross, G. G., and Terreault, B., A method of pulsed-laser desorption of hydrogen, J. Appl. Phys. 73, 1936 (1993).

    Article  CAS  Google Scholar 

Bibliography

  • Arnoldbik, W. M., Marée, C. H. M., and Habraken, E H. P. M., Deuterium diffusion into plasma-deposited silicon oxynitride films, Appl. Surf Sci. 74, 103 (1994).

    Article  CAS  Google Scholar 

  • Arnoldbik, W. M., Marée, C. H. M., Maas, A. J. H., van den Boogaard, M. J., Habraken, F. H. P. M., and Kuiper, A. E. T., Dynamic behavior of hydrogen in silicon nitride and oxynitride films made by low-pressure chemical vapor deposition, Phys. Rev. B: Condens. Matter 48, 5444 (1993).

    Article  CAS  Google Scholar 

  • Denisse, C. M. M., Smulders, H. E., Habraken, F H. P. M., and van der Weg, W. E, Oxidation of plasma-enhanced chemical-vapour-deposited silicon nitride and oxynitride films, Appl. Surf. Sci. 39, 25 (1989).

    Article  CAS  Google Scholar 

  • Habraken, E H. P. M., Geerlings, E. L. J., Tijhaar, R. H. G., Slomp, A., and van der Weg, W. E, Thermal nitridation of SiOXHY films, J. Appl. Phys. 62, 2573 (1987).

    Article  CAS  Google Scholar 

  • Krooshof, G. J. P., Habraken, E H. P. M., van der Weg, W. F, van den Hove, L., Maex, K., and De Keermaecker, R. F., Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection I: Ti on Si, J. Appl. Phys. 63, 5104 (1988).

    Article  CAS  Google Scholar 

  • Krooshof, G. J. P., Habraken, F H. P. M., van der Weg, W. E. van den Hove, L., Maex, K., and De Keermaecker, R. F., Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection II: Ti on SiO2, J. Appl. Phys. 63, 5110 (1988).

    Article  CAS  Google Scholar 

  • Kuiper, A. E. T., Willemsen, M. E C., Mulder, J. M. L., Oude Elferink, J. B., Habraken, F H. P. M., and van der Weg, W. F., Thermal oxidation of silicon nitride and silicon oxynitride films, J. Vac. Sci. Technol. B 7, 455 (1989).

    Article  CAS  Google Scholar 

  • Kuiper, A. E. T., Willemsen, M. E C., Theunissen, A. M. L., van de Wijgert, W. M., Habraken, E H. P. M., Tijhaar, R. H. G., and van der Weg, W. F, Hydrogenation during thermal nitridation of silicon dioxide, J. Appl. Phys. 59, 2765 (1986).

    Article  CAS  Google Scholar 

  • Oude Elferink, J. B., Habraken, F H. P. M., van der Weg, W. E, Dooms, E., Heyns, M., and De Keersmaecker, R., Rapid thermal nitridation of SiO2 films, Appl. Surf. Sci. 39, 219 (1989).

    Article  CAS  Google Scholar 

  • Vanden Brande, E, Lucas, S., Winand, R., Weymeersch, A., and Renard, L., Determination of the chemical and physical properties of hydrogenated carbon deposits produced by DC magnetron reactive sputtering, Surf Coat. Technol. 68/69, 656 (1994).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. SECTOR, Courtaboeuf, France

    Jorge Tirira

  2. DTA/CEREM/DECM/SRMP, CEA Saclay, France

    Yves Serruys

  3. CEA-CNRS Laboratoire Pierre Sue, DSM/DRECAM, CEA Saclay, France

    Patrick Trocellier

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  1. Jorge Tirira
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  3. Patrick Trocellier
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© 1996 Plenum Press, New York

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Tirira, J., Serruys, Y., Trocellier, P. (1996). Applications of Elastic Recoil Spectrometry to Hydrogen Determination in Solids. In: Forward Recoil Spectrometry. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0353-4_12

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  • DOI: https://doi.org/10.1007/978-1-4613-0353-4_12

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