Stress-induced warpage in micro-accelerometers

Micro-Electro Mechanical Systems (MEMS) are mechanical systems fabricated by microelectronic technology, i.e., the technology of making integrated circuits. The fabrication process includes chemical vapor deposition (CVD), which takes place under high temperature and low pressure conditions. Under normal operating conditions, typically room temperature and (one) atmospheric pressure, the variations in the heat expansion coefficient throughout the mechanical device induce stress (compressive or tensile) which causes warpage and results in performance degradation of the device.