Abstract
We begin our transduction mechanism discussion with transducers which are based on changes in the energy stored in an electric field. This class of mechanisms is capacitive. Some of these transducers accomplish energy conversion in a manner that is structurally dependent; some in a manner that is material dependent.
Keywords
- Transduction Mechanism
- Electric Permittivity
- Condenser Microphone
- Parallel Plate Geometry
- Parallel Plate Capacitor
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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References
P. Lorrain and D. R. Corson, Electromagnetic Fields and Waves (W. H. Freeman, San Francisco, 1970).
E. M. Purcell, Electricity and Magnetism (McGraw-Hill, New York, 1965).
W. H. Hayt, Jr., Engineering Electromagnetics (McGraw-Hill, New York, 1981).
L. Eyges, The Classical Electromagnetic Field (Addison-Wesley, Reading, MA, 1972).
H. H. Woodson and J. R. Melcher, Electromechanical Dynamics (Wiley, New York, 1968).
G. M. Sessler and J. E. West, Self-Biased Condenser Microphone with High Capacitance, J. Acoust. Soc. Am. 34, 1787 (1962). Reprinted in I. Groves (ed.), Acoustic Transducers (Hutchinson Ross, Stroudsburg, PA, 1981).
G. M. Sessler and J. E. West, Foil Electret Microphones, J. Acoust. Soc. Am. 40, 1433 (1966).
G. M. Sessler (ed.), Electrets, 2nd ed. (Springer-Verlag, Berlin, 1987).
F. W. Fraim, P. V. Murphy, and R. J. Ferran, Electrets In Miniature Microphones, J. Acoust. Soc. Am. 53, 1601 (1973).
Mechanical Technology Incorporated, Advanced Products Division, 968 Albany-Shaker Road, Latham, NY 12110, USA.
G. J. Philips and F. Hirschfeld, Rotating Machinery Bearing Analysis, Mechanical Engineering, 28 (1980).
M. R. Neuman and C. C. Liu, Fabrication of Biomedical Sensors Using Thin and Thick Film Microelectronic Technology, in C. Fung, P. W. Cheung, W. H. Ko, and D. G. Fleming (ed.), Micromachining and Micropackaging of Transducers (Elsevier, Amsterdam, 1985).
M. Despont, G. A. Racine, P. Renaud, and N. F. dr Rooij, New Design of a Micromachined Capacitive Force Sensor, J. Micromech. Microengng. 3, 239 (1993).
Setra Systems, Inc., 159 Swanson Rd., Boxborough, MA 01719, USA.
S. D. Whitaker and D. B. Call, A New Hand-Held Barometer/Altimeter Offers Portable Accuracy, Sixth Symp. on Meterolog. Obs. and Instrum., Jan. 1987. New Orleans, LA, USA.
Atmospheric Instrumentation Research, Inc., 8401 Baseline Rd., Boulder, CO 80303, USA.
E. C. Wente, The Sensitivity and Precision of the Electrostatic Transmitter for Measuring Sound Intensities, Phys. Rev. 19, 498 (1922). Reprinted in I. Groves (ed.), Acoustic Transducers (Hutchinson Ross, Stroudsburg, PA, 1981).
G. Rasmussen, P. V. Bruel, F. Skode, K. S. Hansen, and R. Frederiksen, Measuring Microphones (Bruel and Kjaer, Denmark, 1971).
M. Rossi, Acoustics and Electroacoustics (Artech, Norwood, MA, 1988).
J. J. Bernstein, Micromachined Acoustic Sensors, in M. D. McCollum, B. F. Hamonic, and O. B. Wilson (ed.), Transducers for Sonics and Ultrasonics (Technomic, Orlando, FL, 1992).
J. Fraden, AIP Handbook of Modern Sensors: Physics, Designs, and Applications (AIP Press, New York, 1993).
S. T. Cho and K. D. Wise, A High Performance Microflowmeter with Built-In Self Test, in Digest of Technical Papers, Transducers ’91 (IEEE, New York, 1991).
K. Sato and M. Shikida, Electrostatic Film Actuator with a Large Vertical Displacement, IEEE Micro Electro Mechanical Systems, Napa Valley, CA, p. 82, 1990.
T. W. Kenny, W. J. Kaiser, S. B. Waltman, and J. K. Reynolds, Novel Infrared Detector Based on a Tunneling Displacement Transducer, Appl. Phys. Lett. 59, 1820 (1991).
K. Minami, S. Kawamura, and M. Esashi, Fabrication of Distributed Electrostatic Actuator (DEMA), J. MEMS. 2, 121 (1993).
GMC Instruments, Inc., 250 Telser Rd., Unit F, Lake Zurich, IL 60047.
L. S. Fan, R. M. White, and R. S. Muller, A Mutual Capacitive Normal-and Shear-Sensitive Tactile Sensor, Proc. IEEE Int. Electron. Devices Mtg., 1984, p. 220.
O. Jefimenko, Electrostatic Motors (Electret Scientific, Star City, WVA, 1973).
J. Brysek, K. Petersen, J. R. Mallon Jr., L. Christel, and F. Pourahmadi, Silicon Sensors and Microstructures (NovaSensor, Fremont, CA, 1990).
M. J. Daneman, N. C. Tien, O. Solgaard, A. P. Pisano, K. Y. Lau, and R. S. MullerLinear Microvibromotor for Positioning Optical Components, J. MEMS, 5, 159 (1996).
M. G. Lim, J. C. Chang, D. P. Schultz, R. T. Howe, and R. M. WhitePolysilicon Microstructures to Characterize Static Friction, Proc. IEEE Micro Electro Mechanical Systems, Napa Valley, CA, p. 82, 1990.
Turck, Inc., 3000 Campus Drive, Plymouth, MN 55441, USA.
Hy Cal Sensing Products, Division of Micro Switch, 9650 Telstar Avenue, El Monte, CA 91731, USA.
K. Uchino, Electrostrictive Actuators: Materials and Applications, Ceramic Bull. 65, 647 (1986).
E. H. Anderson, D. M. Moore, J. L. Fanson, and M. A Ealey, Development of an Active Truss Element for Control of Precision Structures, Optical Engrg. 29, 1333 (1990).
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© 1999 Springer Science+Business Media New York
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Busch-Vishniac, I.J. (1999). Transduction Based on Changes in the Energy Stored in an Electric Field. In: Electromechanical Sensors and Actuators. Mechanical Engineering Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4612-1434-2_3
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DOI: https://doi.org/10.1007/978-1-4612-1434-2_3
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