Transport-reaction processes are characterized by the coupling of chemical reaction with significant convection, diffusion, and dispersion phenomena, and are essential in making many high-value industrial products. Examples include the plug-flow and packed-bed reactors used to produce specialty chemicals, the Czochralski crystallization of high-purity crystals, and the chemical vapor deposition of thin films for microelectronics manufacturing, as well as the solidification of liquid solution coatings for photographic films
KeywordsUncertain Variable Output Feedback Controller Inertial Manifold Ordinary Differential Equation System Rapid Thermal Chemical Vapor Deposition
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