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Abstract

Transport-reaction processes are characterized by the coupling of chemical reaction with significant convection, diffusion, and dispersion phenomena, and are essential in making many high-value industrial products. Examples include the plug-flow and packed-bed reactors used to produce specialty chemicals, the Czochralski crystallization of high-purity crystals, and the chemical vapor deposition of thin films for microelectronics manufacturing, as well as the solidification of liquid solution coatings for photographic films

Keywords

Uncertain Variable Output Feedback Controller Inertial Manifold Ordinary Differential Equation System Rapid Thermal Chemical Vapor Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2001

Authors and Affiliations

  • Panagiotis D. Christofides
    • 1
  1. 1.Department of Chemical EngineeringUniversity of CaliforniaLos AngelesUSA

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