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Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications pp 49–55Cite as

Fabrication of Fluid Control Microdevices

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Part of the book series: SpringerBriefs in Applied Sciences and Technology ((BRIEFSAPPLSCIENCES))

Abstract

Fluid control microdevices such as microvalves, micropumps, and micromixers are key components in microfluidic systems. Femtosecond laser direct writing of glass followed by wet chemical etching (i.e., femtosecond-laser-assisted wet chemical etching) allows freely movable structures that are internally encapsulated inside microfluidic devices to be fabricated by a single continuous process. Such structures can function as fluid control microdevices that can be used to control the flow rate and direction of fluids in microfluidic channels. This chapter describes fabrication of a freely movable microplate and microrotor whose motions are controlled by air pressure, optical force, or an external micromotor. The microplate functions as a microvalve, whereas the microrotor functions as a micropump.

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Authors and Affiliations

  1. Laser Technology Laboratory, RIKEN, Saitama, Japan

    Koji Sugioka

  2. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, People’s Republic of China

    Ya Cheng

Authors
  1. Koji Sugioka
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  2. Ya Cheng
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Corresponding author

Correspondence to Koji Sugioka .

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Sugioka, K., Cheng, Y. (2014). Fabrication of Fluid Control Microdevices. In: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications. SpringerBriefs in Applied Sciences and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-5541-6_5

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  • DOI: https://doi.org/10.1007/978-1-4471-5541-6_5

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  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-5540-9

  • Online ISBN: 978-1-4471-5541-6

  • eBook Packages: EngineeringEngineering (R0)

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