Fabrication of Fluid Control Microdevices

Chapter
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Abstract

Fluid control microdevices such as microvalves, micropumps, and micromixers are key components in microfluidic systems. Femtosecond laser direct writing of glass followed by wet chemical etching (i.e., femtosecond-laser-assisted wet chemical etching) allows freely movable structures that are internally encapsulated inside microfluidic devices to be fabricated by a single continuous process. Such structures can function as fluid control microdevices that can be used to control the flow rate and direction of fluids in microfluidic channels. This chapter describes fabrication of a freely movable microplate and microrotor whose motions are controlled by air pressure, optical force, or an external micromotor. The microplate functions as a microvalve, whereas the microrotor functions as a micropump.

Keywords

Lithium Torque Syringe Metasilicate 

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Copyright information

© The Author(s) 2014

Authors and Affiliations

  1. 1.Laser Technology LaboratoryRIKENSaitamaJapan
  2. 2.State Key Laboratory of High Field Laser PhysicsShanghai Institute of Optics and Fine Mechanics, Chinese Academy of SciencesShanghaiPeople’s Republic of China

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