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Current Techniques for Fabricating Microfluidic and Optofluidic Devices

  • Koji SugiokaEmail author
  • Ya Cheng
Chapter
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Abstract

A wide variety of techniques have been developed for fabricating microfluidic and optofluidic components and devices using polymer, glass, and silicon substrates. This chapter gives a brief overview of these techniques, which can be categorized into two classes: parallel processing techniques based on photolithography and serial processing techniques based on direct writing. Some representative examples of these two categories are discussed, including photolithography on glass, soft lithography on poly(dimethylsiloxane) (PDMS), and femtosecond-laser-induced two-photon polymerization. The main advantages and disadvantages of parallel and serial processing are compared. Polymers are currently the most commonly used material for microfluidic and optofluidic applications because fabrication in polymers is easy, rapid, and cost effective. In contrast, glass offers better chemical durability and optical performance. Femtosecond laser direct writing enables microfluidic and integrated optofluidic structures with complex three-dimensional geometries to be directly embedded in glass, eliminating the need to use multistep procedures such as stacking and bonding.

Keywords

Photonic Crystal Femtosecond Laser Microfluidic Channel Microfluidic System Soft Lithography 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© The Author(s) 2014

Authors and Affiliations

  1. 1.Laser Technology LaboratoryRIKENSaitamaJapan
  2. 2.State Key Laboratory of High Field Laser PhysicsShanghai Institute of Optics and Fine Mechanics, Chinese Academy of SciencesShanghaiPeople’s Republic of China

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