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Designs of Tuneable FBARs

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Tuneable Film Bulk Acoustic Wave Resonators

Part of the book series: Engineering Materials and Processes ((EMP))

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Abstract

In this chapter, the basic design features of intrinsically tuneable FBARs are considered focusing on the Bragg reflectors for the solidly mounted resonators. Effects of the electrodes and other layers on the tuneable performance of the FBARs including tuneability, Q-factor, and electromechanical coupling coefficient are also addressed.

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Notes

  1. 1.

    In some cases, the film may be self aligned with spontaneous polarization normal to the plane of the film.

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Authors and Affiliations

  1. Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg, 41296, Sweden

    Spartak Gevorgian & Andrei Vorobiev

  2. LC IMX STI Station 12, Lausanne, 1015, Switzerland

    Alexander K. Tagantsev

Authors
  1. Spartak Gevorgian
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  2. Alexander K. Tagantsev
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  3. Andrei Vorobiev
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Corresponding author

Correspondence to Spartak Gevorgian .

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© 2013 Springer-Verlag London

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Gevorgian, S., Tagantsev, A.K., Vorobiev, A. (2013). Designs of Tuneable FBARs. In: Tuneable Film Bulk Acoustic Wave Resonators. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-4471-4944-6_6

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  • DOI: https://doi.org/10.1007/978-1-4471-4944-6_6

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  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-4943-9

  • Online ISBN: 978-1-4471-4944-6

  • eBook Packages: EngineeringEngineering (R0)

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