Abstract
This chapter explores the possibilities of tuning the resonant and anti-resonant frequencies of fixed-frequency FBARs. The first two sections address the possibilities of intrinsic tuning where the stiffness of the piezoelectric film is changed through applied high DC electric field and by heating. The rest of the chapter deals with extrinsically tuneable FBARs. In this case, the tuning is imposed by tuneable inductors and capacitors shunt or series connected with an FBAR. The maximum reported intrinsic tuning of the AlN resonators under applied DC field and heating is about 1 %, while the maximum extrinsic tuneability is less than 2 %.
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Gevorgian, S., Tagantsev, A.K., Vorobiev, A. (2013). Making Non-tuneable Piezoelectric FBARs Tuneable. In: Tuneable Film Bulk Acoustic Wave Resonators. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-4471-4944-6_4
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DOI: https://doi.org/10.1007/978-1-4471-4944-6_4
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