Abstract
This chapter starts with brief discussions about needs in tuneable resonators focusing on advanced agile microwave communication systems. To assist in reading of the following chapters, vibrational modes in FBARs are reviewed. The concept of electrostriction-mediated induced piezoelectric effect in paraelectrics, used in intrinsically tuneable ferroelectric FBARs, is discussed. A summary of the state-of-the-art in intrinsically tuneable FBARs concludes the chapter.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Aigner R (2007) Bringing BAW technology into volume production: the ten commandments and the seven deadly sins. 3rd international symposium acoustic wave devices for future mobile communication systems
Aigner R (2008) Tuneable RF filters: pursuing the ‘Holy Grail’ of acoustic filter R&D. Microw J 49:23–29
Berge J, Gevorgian S (2011) Tuneable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and HfO2/SiO2 Bragg reflector. IEEE Tr Ultrason Ferroel Freq Control 58:2768–2771
Berge J, Vorobiev A, Steichen W, Gevorgian S (2007) Tuneable solidly mounted thin film bulk acoustic resonators based on BaxSr1 xTiO3 films. IEEE Microwave Wirel Compon Lett 17:655–657
Berge J, Norling M, Vorobiev A, Gevorgian S (2008) Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tuneable thin film bulk acoustic resonators. J Appl Phys 103:064508
Capanu M, Bernacki T, Zelner M, Woo P, Cervin-Lawry A, Divita C (2008) DC-switchable and tuneable piezoelectricity in RF thin-film BST capacitors. EuMC2008, pp 123–126
Chandrahalim H, Bhave SA, Polcawich RG, Pulskamp J, Kaul R (2009) A Pb(Zr0.55Ti0.45)O3-transduced fully differential mechanically coupled frequency agile filter. IEEE Electron Device Lett 30:1296–1298
Cheng Y, Liu XJ, Wu DJ (2011) Temperature tuneable Lamb wave based on BST. J Acoust Soc Am 129:1157–1160
Conde J, Muralt P (2008) Characterization of Sol-Gel Pb(Zr0.53Ti0.47)O3 in thin film bulk acoustic resonators. IEEE Ultrason Ferroelectr Freq Control 55:1373–1379
Gevorgian S, Lewin T, Jacobsson H, Vorobiev A (2004) Bulk acoustic resonator (TFBAR). International patent application PCT/SE2004/001099
Gevorgian S, Lewin T, Jacobsson H, Vorobiev A (2008) Bulk acoustic resonator (TFBAR). US patent 2008/0055023 A1, 6 Mar 2008
Gevorgian S, Vorobiev A, Deleniv A (2009) Ferroelectrics in microwave devices, circuits and systems. Springer, London
Hashimoto K (2009) RF bulk acoustic wave filters for communications. Artech House, Norwood
Ivira B, Reinhardt A, Defaÿ E, Aid M (2008) Integration of electrostrictive Ba0.7Sr0.3TiO3 thin films into bulk acoustic wave resonator for RF-frequency tuning under DC bias. IEEE International Frequency Control Symposium, pp 254–258
Kadota, M, Kimura T, Ida Y (2009) Nagaokakyoshi, Japan, ultra wide band resonator composed of grooved Cu-electrode on LiNbO3 and its application to tuneable filter. IEEE Int Ultrason Symp (IUS’2009) 2668–2671
Kadota M, Ogami T (2010) 5.4 GHz Lamb wave resonator using LiNbO3 crystal thin plate and application to tuneable filter LiNbO3. Proc Symp Ultrason Electron 31:337–338
Khanna APS et al (2003) A 2 GHz voltage tuneable FBAR oscillator. IEEE IMS’2003, pp 717–720
Kim JJ, Zhang H, Pang W et al (2005) Low phase noise, FBAR-based voltage controlled oscillator without varactor, Transducers ‘05. IEEE international conference on solid-state sensors and actuators (Seoul, Korea), pp 1063–1066
Lee V, Sis SA, Zhu X, Mortazawi A (2010) Intrinsically switchable interdigitated barium titanate thin film contour mode resonators. IMS, pp 1448–1450
Mahon S, Zepess J, Andrews M (2008) BAW flip-chip switched filter bank delivers dramatic form factor reduction. High Freq Electron (August) 24–28
Mason WP (1948) Electrostrictive effect in barium titanate ceramics. Phys Rev 74:1134–1147
Muralt P, Antifakos J, Cantoni M, Lanz R, Martin F (2005) Is there a better material for thin film BAW applications than A1 N? IEEE ultrasonics symposium, pp 315–320
Noeth A, Yamada T, Sherman VO, Muralt P, Tagantsev AK, Setter N (2007) Tuning of direct current bias-induced resonances in micromachined Ba0.3Sr0.7TiO3 thin-film capacitors. J Appl Phys 1(02):114110
Noeth A, Yamada T, Tagantsev AK et al (2008) Electrical tuning of dc bias induced acoustic resonances in paraelectric thin films. J Appl Phys 104:094102–094110
Noeth A, Yamada T, Muralt P, Tagantsev AK, Setter N (2010) Tuneable thin film bulk acoustic wave resonator based on BaxSr1-xTiO3 thin film. IEEE Trans Ultrason Ferroelectr Freq Control 57:379–385
Rinaldi M et al (2009) 5–10 GHz AlN contour-mode nanoelectromechanical resonators. IEEE 22nd international conference on micro electro mechanical systems, MEMS’2009, pp 916–919
Rocha-Gaso M-I, March-Iborra C, Montoya-Baides Á, Arnau-Vives A (2009) Surface generated acoustic wave biosensors for the detection of pathogens: a review. Sensors 9:5740–5769
Roy MK, Richer J (2006) Tunable ferroelectric filters for software defined tactical radios. ISAF 2006
Saddik GN, Boesch DS, Stemmer S, York RA (2007) dc electric field tuneable bulk acoustic wave solidly mounted resonator using SrTiO3. Appl Phys Let 91:043501
Saddik GN, Boesch DS, Stemmer S, York RA (2008) Strontium titanate DC electric field switchable and tuneable bulk acoustic wave solidly mounted resonator. IEEE IMS’2008
Schreiter M, Gabl R, Pitzer D, Primig R, Wersing W (2004) Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators. J Eur Ceram Soc 24:1589–1592
Sis SA, Lee V, Phillips JD, Mortazawi A (2012) Intrinsically switchable thin film ferroelectric resonators. IEEE IMS’2012
Volatier A, Defaÿ E, Aïd M, N’hari A, Ancey P (2008) Switchable and tuneable strontium titanate electrostrictive bulk acoustic wave resonator integrated with a Bragg mirror. Appl Phys Lett 92:032906
Vorobiev A, Gevorgian S (2010) Tuneable thin film bulk acoustic wave resonators with improved Q-factor. Appl Phys Lett 96:212904
Vorobiev A, Gevorgian S (2012) Improved tuneable performance of high Q-factor BaxSr1-xTiO3 film bulk acoustic wave resonators. Proceedings of EuMIC’2012
Wang Q-M, Zhang T, Chena Q, Dub X-H (2003) Effect of DC bias field on the complex materials coefficients of piezoelectric resonators. Sens Actuators A 109:149–155
Yasue T, Komatsu T, Nakamura N, Hashimoto K, Hirano H, Esashi M, Tanaka S (2011) Wideband tuneable Love wave filter using electrostatically-actuated MEMs variable capacitors integrated on lithium niobate. Transducers’2011
Zhu X, Phillips JD, Mortazawi A (2007) A DC voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film. IEEE IMS’2007, pp 671–674
Zinck C, Defay E, Volatier A, Caruyer G, Pellissier TD, Figuier L (2004) Design, integration and characterization of PZT tuneable FBAR. IEEE international ultrasonics, ferroelectrics, and frequency control joint 50th anniversary conference, pp 29–32
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Copyright information
© 2013 Springer-Verlag London
About this chapter
Cite this chapter
Gevorgian, S., Tagantsev, A.K., Vorobiev, A. (2013). Introduction. In: Tuneable Film Bulk Acoustic Wave Resonators. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-4471-4944-6_1
Download citation
DOI: https://doi.org/10.1007/978-1-4471-4944-6_1
Published:
Publisher Name: Springer, London
Print ISBN: 978-1-4471-4943-9
Online ISBN: 978-1-4471-4944-6
eBook Packages: EngineeringEngineering (R0)