Skip to main content

Introduction

  • Chapter
  • First Online:

Part of the book series: Engineering Materials and Processes ((EMP))

Abstract

This chapter starts with brief discussions about needs in tuneable resonators focusing on advanced agile microwave communication systems. To assist in reading of the following chapters, vibrational modes in FBARs are reviewed. The concept of electrostriction-mediated induced piezoelectric effect in paraelectrics, used in intrinsically tuneable ferroelectric FBARs, is discussed. A summary of the state-of-the-art in intrinsically tuneable FBARs concludes the chapter.

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

References

  • Aigner R (2007) Bringing BAW technology into volume production: the ten commandments and the seven deadly sins. 3rd international symposium acoustic wave devices for future mobile communication systems

    Google Scholar 

  • Aigner R (2008) Tuneable RF filters: pursuing the ‘Holy Grail’ of acoustic filter R&D. Microw J 49:23–29

    Google Scholar 

  • Berge J, Gevorgian S (2011) Tuneable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and HfO2/SiO2 Bragg reflector. IEEE Tr Ultrason Ferroel Freq Control 58:2768–2771

    Article  Google Scholar 

  • Berge J, Vorobiev A, Steichen W, Gevorgian S (2007) Tuneable solidly mounted thin film bulk acoustic resonators based on BaxSr1 xTiO3 films. IEEE Microwave Wirel Compon Lett 17:655–657

    Article  Google Scholar 

  • Berge J, Norling M, Vorobiev A, Gevorgian S (2008) Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tuneable thin film bulk acoustic resonators. J Appl Phys 103:064508

    Article  Google Scholar 

  • Capanu M, Bernacki T, Zelner M, Woo P, Cervin-Lawry A, Divita C (2008) DC-switchable and tuneable piezoelectricity in RF thin-film BST capacitors. EuMC2008, pp 123–126

    Google Scholar 

  • Chandrahalim H, Bhave SA, Polcawich RG, Pulskamp J, Kaul R (2009) A Pb(Zr0.55Ti0.45)O3-transduced fully differential mechanically coupled frequency agile filter. IEEE Electron Device Lett 30:1296–1298

    Article  Google Scholar 

  • Cheng Y, Liu XJ, Wu DJ (2011) Temperature tuneable Lamb wave based on BST. J Acoust Soc Am 129:1157–1160

    Article  Google Scholar 

  • Conde J, Muralt P (2008) Characterization of Sol-Gel Pb(Zr0.53Ti0.47)O3 in thin film bulk acoustic resonators. IEEE Ultrason Ferroelectr Freq Control 55:1373–1379

    Article  Google Scholar 

  • Gevorgian S, Lewin T, Jacobsson H, Vorobiev A (2004) Bulk acoustic resonator (TFBAR). International patent application PCT/SE2004/001099

    Google Scholar 

  • Gevorgian S, Lewin T, Jacobsson H, Vorobiev A (2008) Bulk acoustic resonator (TFBAR). US patent 2008/0055023 A1, 6 Mar 2008

    Google Scholar 

  • Gevorgian S, Vorobiev A, Deleniv A (2009) Ferroelectrics in microwave devices, circuits and systems. Springer, London

    Book  Google Scholar 

  • Hashimoto K (2009) RF bulk acoustic wave filters for communications. Artech House, Norwood

    Google Scholar 

  • Ivira B, Reinhardt A, Defaÿ E, Aid M (2008) Integration of electrostrictive Ba0.7Sr0.3TiO3 thin films into bulk acoustic wave resonator for RF-frequency tuning under DC bias. IEEE International Frequency Control Symposium, pp 254–258

    Google Scholar 

  • Kadota, M, Kimura T, Ida Y (2009) Nagaokakyoshi, Japan, ultra wide band resonator composed of grooved Cu-electrode on LiNbO3 and its application to tuneable filter. IEEE Int Ultrason Symp (IUS’2009) 2668–2671

    Google Scholar 

  • Kadota M, Ogami T (2010) 5.4 GHz Lamb wave resonator using LiNbO3 crystal thin plate and application to tuneable filter LiNbO3. Proc Symp Ultrason Electron 31:337–338

    Google Scholar 

  • Khanna APS et al (2003) A 2 GHz voltage tuneable FBAR oscillator. IEEE IMS’2003, pp 717–720

    Google Scholar 

  • Kim JJ, Zhang H, Pang W et al (2005) Low phase noise, FBAR-based voltage controlled oscillator without varactor, Transducers ‘05. IEEE international conference on solid-state sensors and actuators (Seoul, Korea), pp 1063–1066

    Google Scholar 

  • Lee V, Sis SA, Zhu X, Mortazawi A (2010) Intrinsically switchable interdigitated barium titanate thin film contour mode resonators. IMS, pp 1448–1450

    Google Scholar 

  • Mahon S, Zepess J, Andrews M (2008) BAW flip-chip switched filter bank delivers dramatic form factor reduction. High Freq Electron (August) 24–28

    Google Scholar 

  • Mason WP (1948) Electrostrictive effect in barium titanate ceramics. Phys Rev 74:1134–1147

    Article  Google Scholar 

  • Muralt P, Antifakos J, Cantoni M, Lanz R, Martin F (2005) Is there a better material for thin film BAW applications than A1 N? IEEE ultrasonics symposium, pp 315–320

    Google Scholar 

  • Noeth A, Yamada T, Sherman VO, Muralt P, Tagantsev AK, Setter N (2007) Tuning of direct current bias-induced resonances in micromachined Ba0.3Sr0.7TiO3 thin-film capacitors. J Appl Phys 1(02):114110

    Article  Google Scholar 

  • Noeth A, Yamada T, Tagantsev AK et al (2008) Electrical tuning of dc bias induced acoustic resonances in paraelectric thin films. J Appl Phys 104:094102–094110

    Article  Google Scholar 

  • Noeth A, Yamada T, Muralt P, Tagantsev AK, Setter N (2010) Tuneable thin film bulk acoustic wave resonator based on BaxSr1-xTiO3 thin film. IEEE Trans Ultrason Ferroelectr Freq Control 57:379–385

    Article  Google Scholar 

  • Rinaldi M et al (2009) 5–10 GHz AlN contour-mode nanoelectromechanical resonators. IEEE 22nd international conference on micro electro mechanical systems, MEMS’2009, pp 916–919

    Google Scholar 

  • Rocha-Gaso M-I, March-Iborra C, Montoya-Baides Á, Arnau-Vives A (2009) Surface generated acoustic wave biosensors for the detection of pathogens: a review. Sensors 9:5740–5769

    Google Scholar 

  • Roy MK, Richer J (2006) Tunable ferroelectric filters for software defined tactical radios. ISAF 2006

    Google Scholar 

  • Saddik GN, Boesch DS, Stemmer S, York RA (2007) dc electric field tuneable bulk acoustic wave solidly mounted resonator using SrTiO3. Appl Phys Let 91:043501

    Article  Google Scholar 

  • Saddik GN, Boesch DS, Stemmer S, York RA (2008) Strontium titanate DC electric field switchable and tuneable bulk acoustic wave solidly mounted resonator. IEEE IMS’2008

    Google Scholar 

  • Schreiter M, Gabl R, Pitzer D, Primig R, Wersing W (2004) Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators. J Eur Ceram Soc 24:1589–1592

    Article  Google Scholar 

  • Sis SA, Lee V, Phillips JD, Mortazawi A (2012) Intrinsically switchable thin film ferroelectric resonators. IEEE IMS’2012

    Google Scholar 

  • Volatier A, Defaÿ E, Aïd M, N’hari A, Ancey P (2008) Switchable and tuneable strontium titanate electrostrictive bulk acoustic wave resonator integrated with a Bragg mirror. Appl Phys Lett 92:032906

    Article  Google Scholar 

  • Vorobiev A, Gevorgian S (2010) Tuneable thin film bulk acoustic wave resonators with improved Q-factor. Appl Phys Lett 96:212904

    Article  Google Scholar 

  • Vorobiev A, Gevorgian S (2012) Improved tuneable performance of high Q-factor BaxSr1-xTiO3 film bulk acoustic wave resonators. Proceedings of EuMIC’2012

    Google Scholar 

  • Wang Q-M, Zhang T, Chena Q, Dub X-H (2003) Effect of DC bias field on the complex materials coefficients of piezoelectric resonators. Sens Actuators A 109:149–155

    Article  Google Scholar 

  • Yasue T, Komatsu T, Nakamura N, Hashimoto K, Hirano H, Esashi M, Tanaka S (2011) Wideband tuneable Love wave filter using electrostatically-actuated MEMs variable capacitors integrated on lithium niobate. Transducers’2011

    Google Scholar 

  • Zhu X, Phillips JD, Mortazawi A (2007) A DC voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film. IEEE IMS’2007, pp 671–674

    Google Scholar 

  • Zinck C, Defay E, Volatier A, Caruyer G, Pellissier TD, Figuier L (2004) Design, integration and characterization of PZT tuneable FBAR. IEEE international ultrasonics, ferroelectrics, and frequency control joint 50th anniversary conference, pp 29–32

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Spartak Gevorgian .

Rights and permissions

Reprints and permissions

Copyright information

© 2013 Springer-Verlag London

About this chapter

Cite this chapter

Gevorgian, S., Tagantsev, A.K., Vorobiev, A. (2013). Introduction. In: Tuneable Film Bulk Acoustic Wave Resonators. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-4471-4944-6_1

Download citation

  • DOI: https://doi.org/10.1007/978-1-4471-4944-6_1

  • Published:

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-4943-9

  • Online ISBN: 978-1-4471-4944-6

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics