Abstract
This paper deals with the latest development of MEMS(micro electro mechanical systems) and its application to robotics. The MEMS technology is expected to have impacts on Robotics in three ways: (1) providing sensors and actuators, (2) introducing a new intelligent system concept, such as an autonomous distributed systems, and (3) realizing micro robots. Bacis ideas and some examples are discussed.
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Fujita, H. (2000). What can MEMS do for Robotics?. In: Hollerbach, J.M., Koditschek, D.E. (eds) Robotics Research. Springer, London. https://doi.org/10.1007/978-1-4471-0765-1_46
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DOI: https://doi.org/10.1007/978-1-4471-0765-1_46
Publisher Name: Springer, London
Print ISBN: 978-1-4471-1254-9
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