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What can MEMS do for Robotics?

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Abstract

This paper deals with the latest development of MEMS(micro electro mechanical systems) and its application to robotics. The MEMS technology is expected to have impacts on Robotics in three ways: (1) providing sensors and actuators, (2) introducing a new intelligent system concept, such as an autonomous distributed systems, and (3) realizing micro robots. Bacis ideas and some examples are discussed.

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© 2000 Springer-Verlag London

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Fujita, H. (2000). What can MEMS do for Robotics?. In: Hollerbach, J.M., Koditschek, D.E. (eds) Robotics Research. Springer, London. https://doi.org/10.1007/978-1-4471-0765-1_46

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  • DOI: https://doi.org/10.1007/978-1-4471-0765-1_46

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-1254-9

  • Online ISBN: 978-1-4471-0765-1

  • eBook Packages: Springer Book Archive

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