What can MEMS do for Robotics?

  • Hiroyuki Fujita
Conference paper

Abstract

This paper deals with the latest development of MEMS(micro electro mechanical systems) and its application to robotics. The MEMS technology is expected to have impacts on Robotics in three ways: (1) providing sensors and actuators, (2) introducing a new intelligent system concept, such as an autonomous distributed systems, and (3) realizing micro robots. Bacis ideas and some examples are discussed.

Keywords

Vortex Catheter Resis Sorting Polyimide 

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Copyright information

© Springer-Verlag London 2000

Authors and Affiliations

  • Hiroyuki Fujita
    • 1
  1. 1.Institute of Industrial ScienceUniversity of TokyoMinato-ku, TokyoJapan

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