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Soft Computing pp 237–249Cite as

Modeling and Control of RTP Systems

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Part of the book series: Advanced Textbooks in Control and Signal Processing ((C&SP))

Abstract

In the case study reported in this chapter, it will be evidenced how soft computing techniques, and in particular the integration of analytical and neural-type procedures, will allow us to model and control the complex systems encountered in the semiconductor industry.

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References

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Authors and Affiliations

  1. Dipartimento Elettrico Elettronico e Sistemistico, Università di Catania, Viale A. Doria 6, 95125, Catania, Italy

    Professor Luigi Fortuna, Professor Giuseppe Nunnari, Professor M. Gabriella Xibilia & Doctor Riccardo Caponetto

  2. STMicroelectronics, Stradale Primosole 50, 95121, Catania, Italy

    Doctor Gianguido Rizzotto & Doctor Mario Lavorgna

Authors
  1. Professor Luigi Fortuna
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  2. Doctor Gianguido Rizzotto
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  3. Doctor Mario Lavorgna
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  4. Professor Giuseppe Nunnari
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  5. Professor M. Gabriella Xibilia
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  6. Doctor Riccardo Caponetto
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© 2001 Springer-Verlag London

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Fortuna, L., Rizzotto, G., Lavorgna, M., Nunnari, G., Xibilia, M.G., Caponetto, R. (2001). Modeling and Control of RTP Systems. In: Soft Computing. Advanced Textbooks in Control and Signal Processing. Springer, London. https://doi.org/10.1007/978-1-4471-0357-8_14

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  • DOI: https://doi.org/10.1007/978-1-4471-0357-8_14

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-85233-308-9

  • Online ISBN: 978-1-4471-0357-8

  • eBook Packages: Springer Book Archive

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