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Development of High-Throughput Control Techniques for Tip-Based Nanofabrication

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Tip-Based Nanofabrication

Abstract

In this chapter, we will discuss recent developments of advanced control techniques for nanoscale precision motion in general and probe-based nanofabrication (PBN) in specific. First, from the control perspective viewpoint, the advantages and challenges in parallel-probe based approach will be discussed to clarify the needs of high-speed PBN, particularly for areas such as nanoscale rapid prototyping and self-assembly based nanomanufacturing using chemical evaporation deposition (CVD). Then secondly, control challenges encountered in high-speed PBN will be discussed to introduce three main approaches to address these challenges: the robust-control based approach, the system-inversion based approach, and the iterative control approach. The basic idea and the main results obtained in these three approaches will be comparatively discussed. We finish our discussion with a few remarks.

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Abbreviations

CCF-ILC:

Current-cycle-feedback ILC

CVD:

Chemical evaporation deposition

DOF:

Degree-of-freedom

HOPG:

Highly oriented pyrolytic graphite

IIC:

Inversion-based Iterative Control

ILC:

Iterative learning control

LQR:

Linear quadratic optimization

MAIIC:

Multi-axis Inversion-based Iterative Control

MIIC:

Model-less Inversion-based Iterative Control

MIMO:

Multi-input-multi-output

PBN:

Probe-based nanofabrication

PID:

Proportional-Integral-Derivative

SISO:

Single-input-single-output

SPM:

Scanning probe microscope

STM:

Scanning tunneling microscope

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Acknowledgments

The authors would like to thank co-workers Dr. Ying Wu, Dr. Kyong-soo Kim, and Ms. Yan Yan, for their contributions (as referred in the writing). The authors also would like to thank Prof. Zhiqun Lin from Iowa State University and Dr. Chanmin Su from the Bruker-Nano Instrument Inc. for their help in sample preparation (Lin) and SPM instrumentation (Su), respectively. The research was funded through NSF Grants No. CMMI 0624597, DUE 0632908, and CAREER-award CMMI-1066055.

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  1. Department of Mechanical and Aerospace Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ, 08854, USA

    Haiming Wang & Qingze Zou

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  1. Haiming Wang
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Correspondence to Qingze Zou .

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  1. Dept. Mechanical &, Aerospace Engineering, Arizona State University, Tempe, Arizona, USA

    Ampere A. Tseng

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Wang, H., Zou, Q. (2011). Development of High-Throughput Control Techniques for Tip-Based Nanofabrication. In: Tseng, A. (eds) Tip-Based Nanofabrication. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-9899-6_9

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