Development of High-Throughput Control Techniques for Tip-Based Nanofabrication

Chapter

Abstract

In this chapter, we will discuss recent developments of advanced control techniques for nanoscale precision motion in general and probe-based nanofabrication (PBN) in specific. First, from the control perspective viewpoint, the advantages and challenges in parallel-probe based approach will be discussed to clarify the needs of high-speed PBN, particularly for areas such as nanoscale rapid prototyping and self-assembly based nanomanufacturing using chemical evaporation deposition (CVD). Then secondly, control challenges encountered in high-speed PBN will be discussed to introduce three main approaches to address these challenges: the robust-control based approach, the system-inversion based approach, and the iterative control approach. The basic idea and the main results obtained in these three approaches will be comparatively discussed. We finish our discussion with a few remarks.

Keywords

High-speed probe-based nanofabrication Piezoelectric actuator nanopositioning control Stable-inversion Preview-based control Iterative learning control Robust control Feedforward-feedback control Cross-axis dynamics coupling Mechanical-scratching 

Abbreviations

CCF-ILC

Current-cycle-feedback ILC

CVD

Chemical evaporation deposition

DOF

Degree-of-freedom

HOPG

Highly oriented pyrolytic graphite

IIC

Inversion-based Iterative Control

ILC

Iterative learning control

LQR

Linear quadratic optimization

MAIIC

Multi-axis Inversion-based Iterative Control

MIIC

Model-less Inversion-based Iterative Control

MIMO

Multi-input-multi-output

PBN

Probe-based nanofabrication

PID

Proportional-Integral-Derivative

SISO

Single-input-single-output

SPM

Scanning probe microscope

STM

Scanning tunneling microscope

Notes

Acknowledgments

The authors would like to thank co-workers Dr. Ying Wu, Dr. Kyong-soo Kim, and Ms. Yan Yan, for their contributions (as referred in the writing). The authors also would like to thank Prof. Zhiqun Lin from Iowa State University and Dr. Chanmin Su from the Bruker-Nano Instrument Inc. for their help in sample preparation (Lin) and SPM instrumentation (Su), respectively. The research was funded through NSF Grants No. CMMI 0624597, DUE 0632908, and CAREER-award CMMI-1066055.

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© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  1. 1.Department of Mechanical and Aerospace EngineeringRutgers, The State University of New JerseyPiscatawayUSA

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