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Building 3D Micro- and Nanostructures Through Nanoimprint

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Three-Dimensional Nanoarchitectures

Abstract

In this chapter, the fabrication of polymer 3D micro- and nanostructures by nanoimprint is reviewed. Multi-level and hierarchical 3D polymer structures can be directly fabricated by nanoimprint with prefabricated 3D molds or templates. Key applications of 3D nanoimprint, such as the fabrication of dual damascene structure for microelectronic fabrication and the fabrication of compound lenses for micro-optics are discussed. For multilayer 3D polymer structures, transfer bonding and sequential layer stacking are the standard fabrication techniques. Process details and fabrication examples are presented. Critical challenges in transfer bonding are also discussed and suggestions are provided for optimizing processing parameters to fabricate multilayer polymer micro- and nanostructures with high yield.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Texas A&M University, College Station, TX, 77843-3128, USA

    Xing Cheng

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Editors and Affiliations

  1. College of Sciences, Advanced Materials Research Institute, University of New Orleans, Lakeshore Drive 2000, New Orleans, 70148, Louisiana, USA

    Weilie Zhou

  2. Center for Nanotechnology &, Nanoscience, Georgia Institute of Technology, Ferst Dr. NW. 771, Atlanta, 30332-0245, Georgia, USA

    Zhong Lin Wang

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© 2011 Springer Science+Business Media, LLC outside the People's Republic of China, Weilie Zhou and Zhong Lin Wang in the People's Republic of China

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Cheng, X. (2011). Building 3D Micro- and Nanostructures Through Nanoimprint. In: Zhou, W., Wang, Z. (eds) Three-Dimensional Nanoarchitectures. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-9822-4_3

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