Vibration Reduction of an Atomic Force Microscope in the Point of the Mechanical Design

Abstract

Vibration is one of most influential factors which need a great caution in designing the mechanical components for a high precision and high speed atomic force microscopy(AFM) since the scanned image can be contaminated by the AFM mechanical components’ vibrations caused by the various external and internal vibration sources. It is required to design the mechanical components so that they have resonant frequencies higher than the external and internal vibration frequencies. In this work, the mechanical vibration in a conventional AFM system is analyzed by considering its mechanical components, and a vibration reduction is then achieved by reconfiguring the mechanical components.