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Local Oxidation Nanolithography

Mechanism, Feature Size and Applications

  • Chapter
Alternative Lithography

Part of the book series: Nanostructure Science and Technology ((NST))

Abstract

The potential of scanning probe microscopes for the atomic and nanometer scale mod-ification and manipulation of materials was recognized right after the invention of the scanning tunneling microscope STM.1,2 Atomic scale desorption and fragmentation was demonstrated on Si(lll) 7x7 surfaces.3 A paradigmatic example of single atom mod-ification was provided by moving individual atoms of xenon on a nickel surface.4 Since then, a number of methods have been proposed and applied to manipulate mod-ification with atomic and nanometer-scale features.5–9 However, just a few of the mod-ification methods are suitable for the development of a scanning probe-based lithography. Ultra high vacuum requirements, low temperatures or unreliable pattern definition mod-ification considerably the number of methods suitable for lithographic purposes. In this context lithography means a method for large scale patterning of surfaces and device fabrication.

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Authors and Affiliations

  1. Instituto de Microelectrónica de Madrid, CSIC, Madrid, Spain

    Ricardo Garcia

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  1. Ricardo Garcia
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  1. University of Wuppertal, Wuppertal, Germany

    Clivia M. Sotomayor Torres

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Garcia, R. (2003). Local Oxidation Nanolithography. In: Sotomayor Torres, C.M. (eds) Alternative Lithography. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-9204-8_11

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  • DOI: https://doi.org/10.1007/978-1-4419-9204-8_11

  • Publisher Name: Springer, Boston, MA

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