The Design and Implementation of the Ultramicro Mass Measure Device

Abstract

Trace and ultratrace measurement is an important frontier problem in the modern detection technology. This chapter puts forward a method to measure the ultramicro mass. It converted the measure of the ultramicro mass into the measure of the ultramicro angle through a conversion device. It adopted high accuracy and high rotary microaerostatic bearing as the main shaft of the conversion device. It employed a laser triangular device to convert tiny angles into tiny electric signals and the piezoelectric ceramic feedback actuator to control the balance of the beam. Thus a closed loop system was formed, raising the systematic precision and stability. We came up with the design ideas, the structure, the working principle, and designed the hardware and software of this device measurement circuit. Experiments were conducted and the results proved that the system was feasible.