Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications

  • S. Yagnamurthy
  • I. Chasiotis
Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)

Abstract

The elastic and failure mechanical properties, the d31 piezoelectric coefficient and the effect of applied stress on the hysteresis curves of freestanding PZT composite films, comprised of SiO2, Pt, PZT and Pt, were measured from microscale tension specimens. The d31 coefficient was measured from the out-of-plane deflection of biased PZT specimens with dimensions similar to those of MEMS components. An analytical solution for the bending of a multilayered piezoelectric beam was used to compute a first estimate of d31 as 176±27 pm/V. The field induced inplane stress hysteresis loops were asymmetric at small in-plane stresses becoming of similar magnitude as the applied stress was increased beyond 300 MPa. Similarly, the intersection of the hysteresis loops shifted from negative to positive electric field at stresses larger than 150 MPa. The applied stress resulted in reduction of the hysteresis magnitude due to mechanical constraints imposed on 90° domain switching. The effect of high in-plane stress on domain switching was also the reason for the hysteretic non-linear stress-strain curves that were recorded for unbiased PZT films.

Keywords

Microwave Zirconate Titanate Brittle Lamination 

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References

  1. 1.
    Polcawich, R., Judy, D., Pulskamp, J., Trolier-McKinstry, S., Dubey, M., “Advances in Piezoelectrically Actuated RF MEMS Switches and Phase Shifters”, Microwave Symposium IEEE/MTT-S International, pp. 2083-2086, 2007Google Scholar
  2. 2.
    Bhar, D., Robach, J., Wright, J., Francis, L., Gerberich, W., “Mechanical deformation of PZT thin films for MEMS applications”, Materials science and Engineering, 259, pp. 126-131, 1999CrossRefGoogle Scholar
  3. 3.
    Fang, T., Jian, S., Chuu, D., “Nanomechanical properties of lead zirconate titanate thin films by nanoindentation”, Journal of Physics: Condensed Matter, 15, pp. 5253-5259, 2003CrossRefGoogle Scholar
  4. 4.
    Zhou, J., McMcollough, T., Mantell, S., Zurn, S., “Young's Modulus Measurement of Thin Film PZT”, Proceedings of 13 biennial Microelectronics symposium, pp. 153-157, 1999Google Scholar
  5. 5.
    Hong, S., Kim, M., Lee, S., Lee, C.S., “Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head”, Journal of Microelectro Mechanical Systems, 17 (5), pp. 1155-1163, 2008CrossRefGoogle Scholar
  6. 6.
    Wakabayashi, S., Totani, H., Sakata, M., Ikeda, M., Goto, H., Takeuchi, M., Yada, T., “Study on mechanical characteristics of PZT thin film for sensors and actuators”, Proceedings of SPIE - The International Society for Optical Engineering, 2639, pp. 304-314, 1995CrossRefGoogle Scholar
  7. 7.
    Yagnamurthy, S., Chasiotis, I., Lambros, J., Polcawich, R., Pulskamp, J., Dubey, M., “Mechanical Properties of PZT Films and their Composites for RF-MEMS”, Proceedings of Society of Experimental Mechanics, Orlando, June 2008Google Scholar
  8. 8.
    Tagawa, N., Seki, H., Kitamura, K., Mori, A. “Development of novel PZT thin films for active sliders based on head load/unload on demand systems”, Microsystem Technologies, 8 (2-3), pp. 133-138, 2002CrossRefGoogle Scholar
  9. 9.
    Kobayashi, T., Tsaur, J., Ichiki, M., Maeda, R., “Fabrication and performance of a flat piezoelectric cantilever obtained using a sol–gel derived PZT thick film deposited on a SOI wafer”, Smart Materials and Structures, 15 (1), pp. S137-S140, 2006CrossRefGoogle Scholar
  10. 10.
    Zhao, Z., Luo, Z., Liu, C., Wu, W., Gao, C., Lu, Y., “Quantitative measurement of piezoelectric coefficient of thin film using a scanning evanescent microwave microscope”, Review of Scientific Instruments, 79 (6), 064704, 2008CrossRefGoogle Scholar
  11. 11.
    Ong, R.J., Berfield, T.A., Sottos, N.R., Payne, D.A., “Sol-Gel derived Pb(Zr,Ti)O3 thin films: Residual stress and electrical properties”, Journal of the European Ceramic Society, 25, pp. 2247-2251, 2005Google Scholar
  12. 12.
    Berfield, T.A., Ong, R.J., Payne, D.A., Sottos, N.R., “Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films”, Journal of Applied Physics, 101 (2), 024102, 2007Google Scholar
  13. 13.
    Jonnalagadda, K., Chasiotis, I., Yagnamurthy, S., Lambros, J., Pulskamp, J., Polcawich, R., Dubey, M., “Experimental Investigation of Strain Rate Dependence of Nanocrystalline Pt Films”, Experimental Mechanics, 50 (1), pp. 25-35, 2010CrossRefGoogle Scholar
  14. 14.
    Chasiotis, I., Knauss, W., “A New Microtensile Tester for the Study of MEMS Materials with the aid of Atomic Force Microscopy”, Experimental Mechanics, 42 (1), pp. 51-57, 2002CrossRefGoogle Scholar
  15. 15.
    Cho, S., Chasiotis, I., “Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS,” Experimental Mechanics, 47 (1), pp. 37-49, 2007CrossRefGoogle Scholar
  16. 16.
    Ballas, R., Schlaak, H., Schmid, A., “The constituent equations of piezoelectric multilayer bending actuators in closed analytical form and experimental results”, Sensors and Actuators, A: Physica,l 130-131, pp. 91-98.2006CrossRefGoogle Scholar
  17. 17.
    Jaffe, B., Cook, W.R., Jaffe, H., “Piezoelectric Ceramics”, Academic Press London and Newyork, 1971Google Scholar
  18. 18.
    Fan, J., Stoll, W., Lynch, C. “Nonlinear constitutive behavior of soft and hard PZT: Experiments and modeling”, Acta Materialia, 47 (17), pp. 4415-4425, 1999CrossRefGoogle Scholar
  19. 19.
    Xu, F., Trolier-McKinstry, S., Ren, W., Xu, B., Xie, Z., Hemker, K., “Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films”, Journal of Applied Physics, 89 (2), pp. 1336-1348, 2001CrossRefGoogle Scholar

Copyright information

© Springer Science + Business Media, LLC 2011

Authors and Affiliations

  • S. Yagnamurthy
    • 1
  • I. Chasiotis
    • 1
  1. 1.Aerospace EngineeringUniversity of Illinois at Urbana-ChampaignUrbanaUSA

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