Design of Microswitch Systems Avoiding Stiction due to Surface Contact

  • Ling Wu
  • L. Noels
  • V. Rochus
  • M. Pustan
  • J. C. Golinval
Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)


Stiction which results from contact between surfaces is a major failure mode in micro electro-mechanical systems (MEMS). Increasing restoring forces using high spring constant allows avoiding stiction but leads to an increase of the actuation voltage so that the switch’s efficiency is threatened. A statistical rough surfaces interaction model, based on Maugis’ and Kim’s formulations is applied to estimate the adhesive forces in MEMS switches. Based on the knowledge of these forces, the proper design range of the equivalent spring constant, which is the main factor of restoring force in MEMS switches, can be determined. The upper limit of equivalent spring constant depends mainly on the expected actuator voltage and on the geometric parameters, such as initial gap size and thickness of dielectric layer. The lower limit is assessed on the value of adhesive forces between the two contacting rough surfaces. It mainly depends on the adhesive work of contact surfaces and on the surfaces’ roughness. In order to study more complicated structures, this framework will be used in a multiscale model: resulting unloading micro adhesive contact-distance curves of two rough surfaces will be used as contact forces in a finite-element model. In this paper the extraction of these curves for the particular case of gold to gold micro-switches is pursued.


Contact Force Adhesive Contact Asperity Height Total Contact Force Major Failure Mode 
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  1. 1.
    A. Hariri, J. W. Zu and R. Ben Mrad, Modeling of dry stiction in micro electro-mechanical systems (MEMS), J. Micromech. Microeng. 16 (2006) 1195–1206.CrossRefGoogle Scholar
  2. 2.
    Johnson K. L., Kendall, K. and Roberts, A. D., (1971), Surface Energy and the Contact of Elastic Solids, Proc. R. Soc. Lond, A 324, pp. 301-313.Google Scholar
  3. 3.
    Derjaguin B. V., Muller V. M. and Toporov Y. P., (1975), Effect of contact deformation on the adhesion of elastic solids, J. Colloid Interface Sci. 53, pp. 314–26.CrossRefGoogle Scholar
  4. 4.
    Maugis D., Adhesion of Spheres: The JKR-DMT Transition Using a Dugdale Model, J. Colloid and Interface Science, vol.150 (1992), pp. 243-269.CrossRefGoogle Scholar
  5. 5.
    Greenwood J. A. and Williamson J. B. P., Contact of nominally flat surfaces Proc. R. Soc. Lond., A vol. 295, pp. 300–19 1966.Google Scholar
  6. 6.
    Greenwood J A and Tripp J H 1971 The contact of two nominally flat rough surfaces Proc. Instn Mech. Eng. 185 625–33.Google Scholar
  7. 7.
    L. Wu, V. Rochus, L. Noels, and J. C. Golinval, Influence of adhesive rough surface contact on microswitches, J. Appl. Phys. 106, 113502 (2009).CrossRefGoogle Scholar
  8. 8.
    L. Wu, L. Noels V. Rochus, M. Pustan, and J. C. Golinval, A Multiscale Approach to Overcome Stiction due to Surface Contact in Micro electro-mechanical Systems (In preparation).Google Scholar
  9. 9.
    Kim K. S., McMeeking R. M. and Johnson K. L. J., Adhesion, Slip, Cohesive Zones and Energy Fluxes for Elastic Spheres in Contact, Mech. Phys. Solids 46 243–66, 1998.MathSciNetMATHCrossRefGoogle Scholar
  10. 10.
    R.J. Stokes, D.F. Evans, Fundamentals of Interfacial Engineering, Wiley–VCH, New York, 1997.Google Scholar
  11. 11.
    Ning Yu, Andreas A. Polycarpou, Adhesive contact based on the Lennard–Jones potential: a correction to the value of the equilibrium distance as used in the potential, Journal of Colloid and Interface Science 278 (2004) 428–435.CrossRefGoogle Scholar
  12. 12.
    Poon C. Y. and Bhushan B., Comparison of surface roughness measurements by stylus profile AFM and non-contact optical profiler, Wear, 1995, vol. 190, pp. 76–88.CrossRefGoogle Scholar
  13. 13.
    McCool, J. I., 1986, “Predicting Microfracture in Ceramics Via a Microcontact Model,” ASME J. Tribol., 108, pp. 380–386.CrossRefGoogle Scholar
  14. 14.
    Zong Zong, Yifang Cao, Nima Rahbar, and Wole Soboyejo, Nano- and microscale adhesion energy measurement for Au–Au contacts in microswitch structures, Journal of Applied Physics 100, 104313 (2006).Google Scholar

Copyright information

© Springer Science + Business Media, LLC 2011

Authors and Affiliations

  • Ling Wu
    • 1
    • 2
  • L. Noels
    • 1
  • V. Rochus
    • 1
  • M. Pustan
    • 1
    • 3
  • J. C. Golinval
    • 1
  1. 1.Aerospace and Mechanical Engineering DepartmentUniversity of LiegeLiegeBelgium
  2. 2.School of AeronauticsNorthwestern Polytechnical UniversityXi’anChina
  3. 3.Technical University of Cluj-NapocaCluj-NapocaRomania

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