Abstract
Miniature bulk acoustic wave (BAW) resonators are components that exhibit very interesting properties for communication systems, as confirmed by their extensive use nowadays in front-end filters for mobile phones. This chapter reviews the technology enabling the fabrication of these devices and the different models used to describe their electrical performances. Finally, a simple empirical model, mainly based on geometrical parameters, is proposed. It does not require massive computing power, but it can nevertheless predict very accurately the main characteristics of the thin-film BAW resonators.
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Dubois, MA., Muller, C. (2013). Thin-Film Bulk Acoustic Wave Resonators. In: Enz, C., Kaiser, A. (eds) MEMS-based Circuits and Systems for Wireless Communication. Integrated Circuits and Systems. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-8798-3_1
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