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Thin-Film Bulk Acoustic Wave Resonators

  • Marc-Alexandre Dubois
  • Claude Muller
Chapter
Part of the Integrated Circuits and Systems book series (ICIR)

Abstract

Miniature bulk acoustic wave (BAW) resonators are components that exhibit very interesting properties for communication systems, as confirmed by their extensive use nowadays in front-end filters for mobile phones. This chapter reviews the technology enabling the fabrication of these devices and the different models used to describe their electrical performances. Finally, a simple empirical model, mainly based on geometrical parameters, is proposed. It does not require massive computing power, but it can nevertheless predict very accurately the main characteristics of the thin-film BAW resonators.

Keywords

Surface Acoustic Wave Coupling Coefficient Lamb Wave Spurious Mode Bulk Acoustic Wave 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2013

Authors and Affiliations

  1. 1.Centre Suisse d’Electronique et de Microtechnique (CSEM)NeuchâtelSwitzerland

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