Abstract
Carbon Nanotube Field Effect Transistors (CNFETs), consisting of semiconducting single walled Carbon Nanotubes (CNTs), show great promise as extensions to silicon CMOS. While there has been significant progress at a single-device level, a major gap exists between such results and their transformation into VLSI CNFET technologies. Major CNFET technology challenges include mis-positioned CNTs, metallic CNTs, and wafer-scale integration. This work presents design and processing techniques to overcome these challenges. Experimental results demonstrate the effectiveness of the presented techniques.
Mis-positioned CNTs can result in incorrect logic functionality of CNFET circuits. A new layout design technique produces CNFET circuits implementing arbitrary logic functions that are immune to a large number of mis-positioned CNTs. This technique is significantly more efficient compared to traditional defect- and fault-tolerance. Furthermore, it is VLSI-compatible and does not require changes to existing VLSI design and manufacturing flows.
A CNT can be semiconducting or metallic depending upon the arrangement of carbon atoms. Typical CNT synthesis techniques yield ~33% metallic CNTs. Metallic CNTs create source-drain shorts in CNFETs resulting in excessive leakage (Ion/Ioff< 5) and highly degraded noise margins. A new technique, VLSI-compatible Metallic-CNT Removal (VMR), overcomes metallic CNT challenges by combining layout design with CNFET processing. VMR produces CNFET circuits with Ion/Ioff in the range of 103-105, and overcomes the limitations of existing metallic-CNT removal techniques.
We also present the first experimental demonstration of VLSI-compatible CNFET combinational circuits (e.g., computational elements such as half-adder sum-generators) and storage circuits (e.g., sequential elements such as D-latches) that are immune to inherent CNT imperfections. These experimentally-demonstrated circuits form essential building blocks for large-scale digital computing systems.
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Notes
- 1.
CNT density of >100 CNTs/µm is needed for CNFETs to be competitive with silicon CMOS [Deng 07, Patil 09a].
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Patil, N., Lin, A., Zhang, J., Wei, H., Wong, HS.P., Mitra, S. (2011). Imperfection-Immune Carbon Nanotube VLSI Circuits. In: Jha, N., Chen, D. (eds) Nanoelectronic Circuit Design. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-7609-3_8
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