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Scanning Transmission Electron Microscopy pp 523–536Cite as

Application to Semiconductors

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Abstract

In this chapter, we discuss the application of scanning transmission electron microscopy in the field of semiconductor research, using specific examples from the literature.

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Acknowledgments

Melody Agustin provided the image shown in Figure 12–1 of this chapter. We would like to also thank the following collaborators for providing samples: Joshua Zide, Jeramy Zimmerman, Art Gossard, Andrei Kolmakov, Martin Moscovitz, Hao Li, Darrell Schlom, Paul McIntyre, Dominique Bougeard, Jacob Hooker, Qi Hu, and Chris Palmstrøm. We thank the U.S. National Science Foundation (Grant No. DMR-0804631) and the Department of Energy for support (Grant No. DE-FG02-06ER45994). J.M.L. also thanks the U.S. Department of Education for support under the GAANN program (Grant No. P200A07044).

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Authors and Affiliations

  1. Materials Department, University of California, Santa Barbara, CA, USA

    James M. LeBeau & Susanne Stemmer

  2. FEI Company, Eindhoven, The Netherlands

    Dmitri O. Klenov

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  1. James M. LeBeau
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  2. Dmitri O. Klenov
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  3. Susanne Stemmer
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Correspondence to James M. LeBeau .

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Editors and Affiliations

  1. Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, 37831-6056, Tennessee, USA

    Stephen J. Pennycook

  2. , Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, United Kingdom

    Peter D. Nellist

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LeBeau, J.M., Klenov, D.O., Stemmer, S. (2011). Application to Semiconductors. In: Pennycook, S., Nellist, P. (eds) Scanning Transmission Electron Microscopy. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-7200-2_12

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