Abstract
Methods of sensor fabrication are numerous and specific for each particular design. They comprise processing of semiconductors, optical components, metals, ceramics, and plastics. Here, we briefly describe some materials and the most often used techniques.
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Notes
- 1.
Silicon should not be confused with silicone that is made by hydrolyzing silicon organic chloride such as dimethyl silicon chloride. Silicones are used as insulators, lubricants, and for production of silicone rubber.
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Fraden, J. (2010). Sensor Materials and Technologies. In: Handbook of Modern Sensors. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-6466-3_18
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DOI: https://doi.org/10.1007/978-1-4419-6466-3_18
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