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Mechanical Shock in MEMS

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MEMS Linear and Nonlinear Statics and Dynamics

Part of the book series: Microsystems ((MICT,volume 20))

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Abstract

This chapter addresses a reliability issue of MEMS that is crucial for their commercialization, which is their survivability under mechanical shocks. Unlike conventional electronics of passive elements, MEMS contain flexible components that are deliberately designed to undergo some kind of motion. Thus, a natural question comes of how these microstructures respond when they are subjected to dynamic shock loads? What about short circuit and stiction when they make contacts with the substrate or stationary electrodes due to shock loads? These are some of the issues that are treated in this chapter. In addition, the impact of electrostatic forces on the dynamic response is illustrated. The interaction of the motion of microstructures with the printed circuit boards where they are mounted on is also discussed.

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Authors and Affiliations

  1. Department of Mechanical Engineering, State University of New York, Binghamton, NY, USA

    Mohammad I. Younis Ph.D.

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  1. Mohammad I. Younis Ph.D.
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Correspondence to Mohammad I. Younis Ph.D. .

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Younis, M.I. (2011). Mechanical Shock in MEMS. In: MEMS Linear and Nonlinear Statics and Dynamics. Microsystems, vol 20. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-6020-7_8

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  • DOI: https://doi.org/10.1007/978-1-4419-6020-7_8

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  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-6019-1

  • Online ISBN: 978-1-4419-6020-7

  • eBook Packages: EngineeringEngineering (R0)

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