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Position Control of MEMS

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Book cover Feedback Control of MEMS to Atoms

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Abstract

The miniaturization of actuators by microelectromechanical systems (MEMS) allows an increased mechanical bandwidth that can be utilized for improving response speed and control accuracy. MEMS also brings new control problems, such as control of electrostatic microactuators, to inspire both the MEMS and control communities to work together. This chapter will present recent developments of MEMS feedback control from the perspectives of application, design method, and implementation.

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Authors and Affiliations

  1. Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China

    Michael S.-C. Lu

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  1. Michael S.-C. Lu
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Correspondence to Michael S.-C. Lu .

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  1. Technology (NIST), Intelligent Systems Division, National Institute of Standards &, Bureau Drive 100, Gaithersburg, 20899, Maryland, USA

    Jason J. Gorman

  2. Fischell Department of Bioengineering, University of Maryland, 1226 Kim Building 3178, College Park, 20742, Maryland, USA

    Benjamin Shapiro

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Lu, M.SC. (2012). Position Control of MEMS. In: Gorman, J., Shapiro, B. (eds) Feedback Control of MEMS to Atoms. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-5832-7_7

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  • DOI: https://doi.org/10.1007/978-1-4419-5832-7_7

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