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Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles

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Feedback Control of MEMS to Atoms

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Abstract

In this chapter, we demonstrate automated control approaches to micro/nanomanipulation with an atomic force microscope (AFM) to increase speed and reliability. A combination of micro/nanoscale physical models, mathematical transformations, and control theory is utilized to achieve our objectives. We use fast and robust particle detection algorithms to detect positions of spherical micro/nanoparticles on a substrate from visual or topographical feedback, respectively. We demonstrate through experimental results that it is possible to push and pull particles on a flat surface into defined patterns, autonomously using an AFM probe tip, with an error less than the particle diameter and with success rates as high as 86%. By detecting contact loss through either visual or force feedback for micro- and nanomanipulation, we bring control to the conventional blind push-and-look approach. Patterns or assemblies of particles are made using a commanding task planner that orders individual manipulation operations based on a minimization of a trajectory blockage metric.

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Authors and Affiliations

  1. Computer Science and Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA

    Cagdas D. Onal

  2. Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA, USA

    Onur Ozcan & Metin Sitti

Authors
  1. Cagdas D. Onal
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  2. Onur Ozcan
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  3. Metin Sitti
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Correspondence to Cagdas D. Onal .

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Editors and Affiliations

  1. Technology (NIST), Intelligent Systems Division, National Institute of Standards &, Bureau Drive 100, Gaithersburg, 20899, Maryland, USA

    Jason J. Gorman

  2. Fischell Department of Bioengineering, University of Maryland, 1226 Kim Building 3178, College Park, 20742, Maryland, USA

    Benjamin Shapiro

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Onal, C.D., Ozcan, O., Sitti, M. (2012). Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles. In: Gorman, J., Shapiro, B. (eds) Feedback Control of MEMS to Atoms. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-5832-7_4

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  • DOI: https://doi.org/10.1007/978-1-4419-5832-7_4

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