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Transparent Conductive Zinc Oxide and Its Derivatives

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Abstract

Zinc oxide (ZnO) is a ceramic material and was used early in history, for instance as a precursor material for brass manufacturing in old china. ZnO occurs naturally as the mineral zincite (Fig. 7.1a). In 1810 it was discovered by Bruce in Franklin (New Jersey, USA) as red oxide of zinc, in 1845 named as zincite by Haidinger [1]. It can be found at different places on earth: Franklin (New Jersey, USA), Sarawezza (Tuscany, Italy), Tsumeb (Namibia), Olkusz (Poland), Spain, Tasmania and Australia. Most of the natural crystals are small, but freely-formed crystals up to 25 mm were reported, which are exceedingly rare [2].

Ed. D. Ginley, H. Hosono, Y. Shigesato “Transparent Conductors: Materials, Processing and Applications (From Transparent Conducting Oxides to Transparent Electronics)”.

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References

  1. W. Haidinger, “Handbuch der bestimmenden Mineralogie”, (Wien, 1845).

    Google Scholar 

  2. P. Dunn, “Franklin and Sterling Hill: the World's Most Magnificent Mineral Deposits”, (Excalibur Mineral Company, Peekskill, NY, 2004).

    Google Scholar 

  3. A. A. Somerville, Phys. Rev. I, 34(1912)311.

    Google Scholar 

  4. O. Fritsch, Ann. Phys., [5], 22(1935)375.

    Article  Google Scholar 

  5. A. R. Hutson, Phys. Rev. Lett., 4(1960)505.

    Article  Google Scholar 

  6. F. S. Hickernell, J. Appl. Phys., 44(1973)1061.

    Article  Google Scholar 

  7. G. Heiland, E. Mollwo and F. Stöckmann, Solid State Phys., 8(1959)191.

    Article  Google Scholar 

  8. W. Hirschwald, in “Current Topics in Material Science”, Ed.: E. Kaldis (North-Holland, Amsterdam, 1981), p. 144.

    Google Scholar 

  9. K. L. Chopra and S. Major, Proc. Electrochem. Soc., 83(1983)346.

    Google Scholar 

  10. C. Klingshirn and H. Haug, Phys. Rep., 70(1981)315.

    Article  Google Scholar 

  11. G. Fasol, Phys. Biol., 51(1995)925.

    Google Scholar 

  12. S. J. Pearton and C. Kuo, MRS Bull., 22(1997)17.

    Google Scholar 

  13. C. Klingshirn, M. Grundmann, A. Hoffmann, B. Meyer and A. Waag, Phys. J. 5(2006)33.

    Google Scholar 

  14. B. K. Meyer, J. Sann, D. M. Hofmann, C. Neumann and A. Zeuner, Semicond. Sci. Technol., 20(2005)S62.

    Article  Google Scholar 

  15. U. Özgür, Y. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho and H. Morkoc, J. Appl. Phys., 98(2005)041301.

    Article  Google Scholar 

  16. “Zinc Oxide-A Material for Micro- and Optoelectronic Applications”; edited by N. H. Nickel and E. Terukov (Springer, Dordrecht, 2005).

    Google Scholar 

  17. “Zinc Oxide Bulk, Thin Films and Nanostructures”; edited by C. Jagadish and S. Pearton (Elsevier, Amsterdam, 2006).

    Google Scholar 

  18. “Transparent Conductive Zinc Oxide: Basics and Applications in Thin Film Solar Cells”; edited by K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008).

    Google Scholar 

  19. W. L. Bragg, Phil. Mag., 39(1920)647.

    Article  Google Scholar 

  20. G. Heiland, P. Kunstmann and H. Pfister, Z. Phys., 176(1963)485.

    Article  Google Scholar 

  21. A. N. Mariano and R. E. Hanneman, J. Appl. Phys., 34(1963)384.

    Article  Google Scholar 

  22. R. G. W. Wyckoff, “Crystal Structures”, (Interscience, New York, 1963).

    Google Scholar 

  23. S. Desgreniers, Phys. Rev. B, 58(1998)14102.

    Article  Google Scholar 

  24. S. O. Kucheyev, J. E. Bradby, J. S. Williams, C. Jagadish and M. V. Swain, Appl. Phys. Lett., 80(2002)956.

    Article  Google Scholar 

  25. L. Gerward and J. S. Olsen, J. Synchrotron Radiat., 2(1995)233.

    Article  Google Scholar 

  26. J. Serrano, A. H. Romero, F. J. Manjon, R. Lauck, M. Cardona and A. Rubio, Phys. Rev. B, 69(2004)094306.

    Article  Google Scholar 

  27. E. Mollwo, in “Landoldt-Börnstein. Zahlenwerte und Funktionen aus Naturwiss. u. Technik. Neue Serie”, Ed.: O. Madelung, M. Schulz and H. Weiss (Springer-Verlag, Berlin u.a., 1982), p. 35.

    Google Scholar 

  28. D. Vogel, P. Krüger and J. Pollmann, Phys. Rev. B, 54(1996)5495.

    Article  Google Scholar 

  29. P. Schröer, P. Krüger and J. Pollmann, Phys. Rev. B, 47(1993)6971.

    Article  Google Scholar 

  30. M. Usuda, N. Hamada, T. Kotani and M. van Schilfgaarde, Phys. Rev. B, 66(2002)125101.

    Article  Google Scholar 

  31. P. Erhart, K. Albe and A. Klein, Phys. Rev. B, 73(2006)205203.

    Article  Google Scholar 

  32. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano and H. Hosono, Nature, 432(2004)488.

    Article  Google Scholar 

  33. A. K. Kulkarni and S. A. Knickerbocker, J. Vac. Sci. Technol. A, 14(1996)1709.

    Article  Google Scholar 

  34. S. A. Knickerbocker and A. K. Kulkarni, J. Vac. Sci. Technol. A, 14(1996)757.

    Article  Google Scholar 

  35. H. Odaka, Y. Shigesato, T. Murakami and S. Iwata, Jpn. J. Appl. Phys., 40(2001)3231.

    Article  Google Scholar 

  36. O. N. Mryasov and A. J. Freeman, Phys. Rev. B, 64(2001)233111/1.

    Google Scholar 

  37. J. Robertson, K. Xiong and S. J. Clark, Thin Solid Films, 496(2006)1.

    Article  Google Scholar 

  38. U. Rau and M. Turcu, Mat. Res. Soc. Symp. Proc., 763(2003)335.

    Google Scholar 

  39. A. Ohtomo, M. Kawasaki, T. Koida, K. Masubuchi, H. Koinuma, Y. Sakurai, Y. Yoshida, T. Yasuda and Y. Segawa, Appl. Phys. Lett., 72(1998)2466.

    Article  Google Scholar 

  40. V. A. Coleman, M. Buda, H. H. Tan, C. Jagadish, M. R. Phillips, K. Koike, S. Sasa, M. Inoue and M. Yano, Semicond. Sci. Technol., 21(2006)L25.

    Article  Google Scholar 

  41. K. Ellmer and A. Klein, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008), p. 32.

    Google Scholar 

  42. D. F. Anthrop and A. W. Searcy, J. Phys. Chem., 68(1964)2335.

    Article  Google Scholar 

  43. D. Schulz, S. Ganschow, D. Klimm, M. Neubert, M. Roßberg, M. Schmidbauer and R. Fornari, J. Cryst. Growth, 296(2006)27.

    Article  Google Scholar 

  44. H. A. Wriedt, Bull. Alloy Phase. Diagrams, 8(1987)166.

    Google Scholar 

  45. M. W. Wolf and J. J. Martin, Phys. Stat. Sol. (a), 17(1973)215.

    Google Scholar 

  46. I. Barin, “Thermochemical Data of Pure Substances”, 3rd ed. (VCH, Weinheim, 1995).

    Book  Google Scholar 

  47. J. E. Jaffe, J. A. Snyder, Z. Lin and A. C. Hess, Phys. Rev. B, 62(2000)1660.

    Article  Google Scholar 

  48. N.-G. Vannerberg, Ark. Kemi, 14(1959)119.

    Google Scholar 

  49. F. Decremps, J. Zhang and R. C. Lieberman, Europhys. Lett., 51(2000)268.

    Article  Google Scholar 

  50. A. Ashrafi and C. Jagadish, J. Appl. Phys., 102(2007)071101.

    Article  Google Scholar 

  51. J. E. Jaffe and A. C. Hess, Phys. Rev. B, 48(1993)7903.

    Article  Google Scholar 

  52. P. Erhart, N. Juslin, O. Goy, K. Nordlund, R. Müller and K. Albe, J. Phys. Condens. Matter, 18(2006)186585.

    Article  Google Scholar 

  53. K. I. Hagemark and P. E. Toren, J. Electrochem. Soc., 122(1975)992.

    Article  Google Scholar 

  54. H. E. Brown, “Zinc Oxide. Properties and Applications”, (Int. Lead Zinc Research Org., New York, 1976).

    Google Scholar 

  55. J. Plachy, Zinc, http://minerals.usgs.gov/minerals/pubs/commodity/zinc/ (2003).

  56. K. Vanheusdalen, C. H. Seager, W. L. Warren, D. R. Tallant and J. A. Voigt, Appl. Phys. Lett., 68(1996)403.

    Article  Google Scholar 

  57. A. H. Kitai, Thin Solid Films, 445(2003)367.

    Article  Google Scholar 

  58. T. Miyata, Y. Mochizuki and T. Minami, IEICE Trans. Electron., E88-C(2005)2065.

    Google Scholar 

  59. N. Saito, H. Haneda, T. Sekiguchi, N. Ohashi, I. Sakaguchi and K. Koumoto, Adv. Mater., 14(2002)418.

    Article  Google Scholar 

  60. A. Ballato, in: Proc. 1996 IEEE Ultrasonics Symp., San Antonio, TX, USA 3-6 Nov. 1996, 1996 (IEEE), p. 575.

    Google Scholar 

  61. B. Drafts, Sensors, 17(2000)68.

    Google Scholar 

  62. J. W. Grate, S. J. Martin and R. W. White, Anal. Chem., 65(1993)987.

    Article  Google Scholar 

  63. J. W. Grate, S. J. Martin and R. W. White, Anal. Chem., 65(1993)940.

    Article  Google Scholar 

  64. S. Seeger, T. Unold and K. Ellmer, in: Proc. 22nd European Photovoltaic Solar Energy Conference, 3–7 September, 2007, Milano, Italy, 2007.

    Google Scholar 

  65. T. Unold, I. Sieber and K. Ellmer, Appl. Phys. Lett., 88(2006)213502.

    Article  Google Scholar 

  66. K. Siemer, J. Klaer, I. Luck, J. Bruns, R. Klenk and D. Bräunig, Sol. Energy Mater. Sol. Cells, 67(2001)159.

    Article  Google Scholar 

  67. D. R. Clarke, J. Am. Ceram. Soc., 82(1999)485.

    Article  Google Scholar 

  68. M. Matsuoka, Jpn. J. Appl. Phys., 10(1971)736.

    Article  Google Scholar 

  69. L. M. Levinson and H. R. Philipp, Am. Ceram. Soc. Bull., 65(1986)639.

    Google Scholar 

  70. T. Minami, H. Sato, H. Nanto and S. Takata, Jpn. J. Appl. Phys., 24(1985)L781.

    Article  Google Scholar 

  71. K. Ellmer, J. Phys. D Appl. Phys., 34(2001)3097.

    Article  Google Scholar 

  72. C. Levy-Clement, R. Tena-Zaera, M. A. Ryan, A. Katty and G. Hodes, Adv. Mater., 17(2005)1512.

    Article  Google Scholar 

  73. J. F. Wager, Science, 300(2003)1245.

    Article  Google Scholar 

  74. E. Scharowsky, Z. Phys., 135(1953)318.

    Article  Google Scholar 

  75. D. G. Thomas and J. J. Lander, J. Chem. Phys., 25(1956)1136.

    Article  Google Scholar 

  76. G. Bogner and E. Mollwo, J. Phys. Chem. Solids, 6(1958)136.

    Article  Google Scholar 

  77. R. A. Laudise, E. D. Kolb and A. J. Caporaso, J. Am. Ceram. Soc., 47(1964)9.

    Article  Google Scholar 

  78. D. Rykl and J. Bauer, Kristall und Technik, 3(1968)375.

    Article  Google Scholar 

  79. K. Maeda, M. Sato, I. Niikura and T. Fukuda, Semicond. Sci. Technol., 20(2005)S49.

    Article  Google Scholar 

  80. J. W. Nielsen and E. F. Dearborn, J. Phys. Chem., 64(1960)1762.

    Article  Google Scholar 

  81. M. Hirose, Y. Furuya and I. Kubo, Jpn. J. Appl. Phys., 9(1970)726.

    Article  Google Scholar 

  82. J. Nause and B. Nemeth, Semicond. Sci. Technol., 20(2005)S45.

    Article  Google Scholar 

  83. I. Gur, N. A. Fromer, M. L. Geier and A. P. Alivisatos, Science, 310(2005)

    Google Scholar 

  84. D. C. Look, D. C. Reynolds, J. R. Sizelove, R. L. Jones, C. W. Litton, G. Cantwell and W. C. Harsch, Solid State Commun., 105(1998)399.

    Article  Google Scholar 

  85. R. Khanna, K. Ip, K. K. Allums, K. Baik, C. R. Abernathy, S. J. Pearton, Y. W. Heo, D. P. Norton, F. Ren, S. Shojah-Ardalan and R. Wilkins, J. Electr. Mat., 34(2005)395.

    Article  Google Scholar 

  86. E. V. Kortunova, P. P. Chvanski and N. G. Nikolaeva, J. Phys. IV France, 126(2005)39.

    Article  Google Scholar 

  87. K. Ellmer, J. Phys. D Appl. Phys., 33(2000)R17.

    Article  Google Scholar 

  88. J. Steinhauser, S. Faÿ, N. Oliveira, E. Vallat-Sauvain, and C. Ballif, Appl. Phys. Lett., 90(2007)142107.

    Google Scholar 

  89. S. Fay and A. Shah, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2007), p. 67.

    Google Scholar 

  90. M. Lorenz, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2007), p. 55.

    Google Scholar 

  91. T. Yoshida, K. Terada, D. Schlettwein, T. Oekermann, T. Sugiura and H. Minoura, Adv. Mater., 12(2000)1214.

    Article  Google Scholar 

  92. I. Mora-Seró, F. Fabregat-Santiago, B. Denier, J. Bisquert, R. Tena-Zaera, J. Elias and C. Lévy-Clément, Appl. Phys. Lett., 89(2006)203117.

    Article  Google Scholar 

  93. J. Tornow and K. Schwarzburg, J. Phys. Chem. C, 111(2007)8692.

    Article  Google Scholar 

  94. T. Zhang, W. Dong, M. Keeter-Brewer, S. Konar, R. N. Njabon and Z. R. Tian, J. Am. Chem. Soc., 128(2006)10960.

    Article  Google Scholar 

  95. B. Szyszka, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008), p. 49.

    Google Scholar 

  96. G. A. Rozgonyi and W. J. Polito, Appl. Phys. Lett., 8(1966)220.

    Article  Google Scholar 

  97. G. A. Rozgonyi and W. J. Polito, J. Vac. Sci. Technol., 6(1968)115.

    Article  Google Scholar 

  98. K. Ellmer and R. Wendt, Surf. Coat. Technol., 93(1997)21.

    Article  Google Scholar 

  99. C. May, R. Menner, J. Strümpfel, M. Oertel and B. Sprecher, Surf. Coat. Technol., 169–170(2003)512.

    Article  Google Scholar 

  100. K. Ellmer and R. Mientus, in: Proc. 4th Int. Symp. on Trends and New Appl. in Thin Films/11th Conf. on High Vacuum, Interfaces and Thin Films, Dresden, March, 1994 (DGM Informationsgesellschaft mbH, Oberursel), p. 131.

    Google Scholar 

  101. D. Depla, S. Heirwegh, S. Mahieu, J. Haemers and R. D. Gryse, J. Appl. Phys., 101(2007)013301.

    Article  Google Scholar 

  102. Y. Ohtsu, Y. Okuno and H. Fujita, J. Appl. Phys., 73(1993)2155.

    Article  Google Scholar 

  103. J. A. Thornton, in “Annual Review of Material Science”, Ed.: R. A. Huggins, R. H. Bube and R. W. Roberts (Annual Rev. Inc., Palo Alto, 1977), p. 239.

    Google Scholar 

  104. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller and B. Rech, Thin Solid Films, 442(2003)80.

    Article  Google Scholar 

  105. J. Hüpkes, J. Müller and B. Rech, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008), p. 56.

    Google Scholar 

  106. J. Ederth, G. A. Niklasson, A. Hultaker, P. Heszler, C. G. Granqvist, A. R. van Doorn, M. J. Jongerius and B. Burgard, J. Appl. Phys., 93(2003)984.

    Article  Google Scholar 

  107. P. S. Clarke, J. W. Orton and A. J. Guest, Phys. Rev. B, 18(1978)1813.

    Article  Google Scholar 

  108. A. R. Hutson, Phys. Rev., 108(1957)222.

    Article  Google Scholar 

  109. E. Ziegler, A. Heinrich, H. Oppermann and G. Stöver, Phys. Stat. Sol. (a), 66(1981)635.

    Google Scholar 

  110. J. J. Lander, J. Phys. Chem. Solids, 15(1960)324.

    Article  Google Scholar 

  111. I. B. Kobiakov, Solid State Commun., 35(1980)305.

    Article  Google Scholar 

  112. L. N. Demyanets, D. V. Kostomarov and I. P. Kuzmina, Inorg. Mater., 38(2002)171.

    Google Scholar 

  113. O. Caporaletti, Solar Energy Mater., 7(1982)65.

    Article  Google Scholar 

  114. D. C. Look, J. W. Hemsky and J. R. Sizelove, Phys. Rev. Lett., 82(1999)2552.

    Article  Google Scholar 

  115. P. Erhart and K. Albe, Phys. Rev. B, 73(2006)115207.

    Article  Google Scholar 

  116. P. Erhart and K. Albe, Appl. Phys. Lett., 88(2006)201918.

    Article  Google Scholar 

  117. K. Hauffe and C. Seyferth, “Reaktionen in und an festen Stoffen”, (Springer-Verlag, Berlin, 1966).

    Book  Google Scholar 

  118. K. Hauffe and J. Block, Z. Phys. Chem., 196(1950)438.

    Google Scholar 

  119. D. G. Thomas, J. Phys. Chem. Solids, 9(1958)31.

    Article  Google Scholar 

  120. F. A. Kröger, “The Chemistry of Imperfect Crystals. Imperfection Chemistry of Crystalline Solids”, 2nd revised Ed. ed. (North-Holland, Amsterdam, 1973).

    Google Scholar 

  121. S. Deubler, J. Meier, R. Schiitz and W. Witthuhn, Nucl. Instrum. Methods Phys. Res. B, 63(1992)223.

    Article  Google Scholar 

  122. T. Agne, M. Deicher, V. Koteski, H.-E. Mahnke, H. Wolf and T. Wichert, Hyperfine Interact., 159(2004)55.

    Article  Google Scholar 

  123. T. Minami, MRS Bull., 25(2000)38.

    Article  Google Scholar 

  124. N. Roberts, R.-P. Wang, A. W. Sleight and W. W. Warren, Phys. Rev. B, 57(1998)5734.

    Article  Google Scholar 

  125. J. Hu and R. G. Gordon, in: Proc. Evolution of Thin-Film and Surface Structure, Boston, Massachusetts, USA, 1990 (MRS, Pittsburgh, PA), p. 457.

    Google Scholar 

  126. A. Sanchez-Juarez, A. Tiburcio-Silver, A. Ortiz, E. P. Zironi and J. Rickards, Thin Solid Films, 333(1998)196.

    Article  Google Scholar 

  127. A. Guillen-Santiago, M. de la Olvera, A. Maldonado, A. Reyes and R. Asomoza, Phys. Stat. Sol. (a), 191(2002)499.

    Google Scholar 

  128. A. R. Hutson, J. Phys. Chem. Solids, 8(1959)467.

    Article  Google Scholar 

  129. P. Wagner and R. Helbig, J. Phys. Chem. Solids, 35(1974)327.

    Article  Google Scholar 

  130. K. I. Hagemark and L. C. Chacka, J. Solid State Chem., 15(1975)261.

    Article  Google Scholar 

  131. H. von Wenckstern, S. Weinhold, G. Biehne, R. Pickenhain, H. Schmidt, H. Hochmuth and M. Grundmann, Adv. Solid State Phys., 45(2005)263.

    Article  Google Scholar 

  132. D. M. Hofmann, A. Hofstaetter, F. Leiter, H. Zhou, F. Henecker, B. K. Meyer, S. O. Orlinskij, J. Schmidt and P. G. Baranov, Phys. Rev. Lett., 88(2002)045504.

    Article  Google Scholar 

  133. E. Mollwo, Z. Phys., 138(1954)478.

    Article  Google Scholar 

  134. D. G. Thomas and J. J. Lander, in “Halbleiter und Phosphore”, Ed.: M. Schön and H. Welker (Vieweg, Braunschweig, 1958), p. 534.

    Google Scholar 

  135. N. Nickel, in “Zinc Oxide – A Material for Micro- and Optoelectronic Applications”, Ed.: N. Nickel and E. Terukov (Springer, Dordrecht, 2005), p. 145.

    Google Scholar 

  136. C. G. van de Walle, Phys. Rev. Lett., 85(2000)1012.

    Article  Google Scholar 

  137. F. Ruske, V. Sittinger, W. Werner, B. Szyszka, K.-U. v. Osten, K. Dietrich and R. Rix, Surf. Coat. Technol., 200(2005)236.

    Google Scholar 

  138. W. Jakubowski, Acta Phys. Pol. A, 37(1970)409.

    Google Scholar 

  139. D. C. Look, Semicond. Sci. Technol., 20(2005)S55.

    Article  Google Scholar 

  140. D. J. Binks and R. W. Grimes, J. Am. Ceram. Soc., 76(1993)2370.

    Article  Google Scholar 

  141. B. K. Meyer, Appl. Phys. A, 88(2007)119.

    Article  Google Scholar 

  142. A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, S. F. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma and M. Kawasaki, Nat Mater., 4(2005)42.

    Article  Google Scholar 

  143. K. Minegishi, Y. Koiwai, Y. Kikuchi, K. Yano, M. Kasuga and A. Shimizu, Jpn. J. Appl. Phys., 36(1997)L1453.

    Article  Google Scholar 

  144. K.-K. Kim, H.-S. Kim, J.-H. Lim and S.-J. Park, Appl. Phys. Lett., 83(2003)63.

    Article  Google Scholar 

  145. B. S. Li, Y. C. Liu, Z. Z. Zhi, D. Z. Shen, Y. M. Lu, J. Y. Zhang, X. W. Fan, R. X. Mu and D. O. Henderson, J. Mater. Res., 18(2003)8.

    Article  Google Scholar 

  146. Y. R. Ryu, T. S. Lee and H. W. White, Appl. Phys. Lett., 83(2003)87.

    Article  Google Scholar 

  147. Z.-Z. Ye, J.-G. Lu, H.-H. Chen, Y.-Z. Zhang, L. Wang, B.-H. Zhao and J.-Y. Huang, J. Cryst. Growth, 253(2003)258.

    Article  Google Scholar 

  148. D. C. Look and B. Claflin, Phys. Stat. Sol. (b), 241(2004)624.

    Google Scholar 

  149. A. Dadgar, A. Krtschil, F. Bertram, S. Giemsch, T. Hempel, P. Veit, A. Diez, N. Oleynik, R. Clos, J. Christen and A. Krost, Superlatt. Microstr., 38(2005)245.

    Article  Google Scholar 

  150. H. von Wenckstern, R. Pickenhain, H. Schmidt, M. Brandt, G. Biehne, M. Lorenz, M. Grundmann and G. Brauer, Appl. Phys. Lett., 89(2006)092122.

    Article  Google Scholar 

  151. J. Fan and R. Freer, J. Appl. Phys., 77(1995)4795.

    Article  Google Scholar 

  152. A. N. Gruzintsev, V. T. Volkov and E. E. Yakimov, Semicond., 37(2003)259.

    Article  Google Scholar 

  153. U. Wahl, E. Rita, J. G. Correia, A. C. Marques, E. Alves and J. C. Soares, Phys. Rev. Lett., 95(2005)215503.

    Article  Google Scholar 

  154. R. E. Dietz, H. Kamimura, M. D. Sturge and A. Yariv, Phys. Rev., 132(1963)1559.

    Article  Google Scholar 

  155. O. F. Schirmer, J. Phys. Chem. Solids, 29(1968)1407.

    Article  Google Scholar 

  156. D. Zwingel, J. Lumin., 5(1972)385.

    Article  Google Scholar 

  157. O. Lopatiuk, L. Chernyak, A. Osinsky and J. Q. Xie, Appl. Phys. Lett., 87(2005)214110.

    Article  Google Scholar 

  158. D. Pfisterer, J. Sann, D. M. Hofmann, M. Plana, A. Neumann, M. Lerch and B. K. Meyer, Phys. Stat. Sol. (a), 243(2005)R1.

    Google Scholar 

  159. B. Claflin, D. C. Look, S. J. Park and G. Cantwell, J. Cryst. Growth, 287(2006)16.

    Article  Google Scholar 

  160. D.-K. Hwang, H.-S. Kim, J.-H. Lim, J.-Y. Oh, J.-H. Yang, S.-J. Park, K.-K. Kim, D. C. Look and Y. S. Park, Appl.Phys. Lett., 86(2005)151917.

    Article  Google Scholar 

  161. M. Chen, Z. L. Pei, X. Wang, Y. H. Yu, X. H. Liu, C. Sun and L. S. Wen, J. Phys. D: Appl. Phys., 33(2000)2538.

    Article  Google Scholar 

  162. K. Ellmer, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008), p. 44.

    Google Scholar 

  163. K. Ellmer and R. Mientus, Thin Solid Films, 516(2008)5829.

    Google Scholar 

  164. D. L. Rode, Phys. Rev. B, 2(1970)4036.

    Article  Google Scholar 

  165. S. S. Devlin, in “Physics and Chemistry of II-VI Compounds”, Ed.: M. Aven and J. S. Prener (North-Holland, Amsterdam, 1967), p. 549.

    Google Scholar 

  166. J. Bardeen and W. Shockley, Phys. Rev., 80(1950)72.

    Article  MathSciNet  MATH  Google Scholar 

  167. K. Seeger, “Semiconductor Physics”, (Springer, Berlin, 1991).

    Google Scholar 

  168. C. Solbrig, Z. Phys., 211(1968)429.

    Article  Google Scholar 

  169. D. L. Rode, in “Semiconductors and Semimetals”, Ed.: R. K. Willardson and A. C. Beer (Academic Press, New York, 1975), p. 1.

    Google Scholar 

  170. J. D. Zook, Phys. Rev., 136(1964)A869.

    Article  Google Scholar 

  171. P. W. Li and K. I. Hagemark, J. Solid State Chem., 12(1975)371.

    Article  Google Scholar 

  172. K. W. Böer, “Survey of Semiconductor Physics. Electrons and Other Particles in Bulk Semiconductors,” (Van Nostrand Reinhold, New York, 1990).

    Google Scholar 

  173. G. L. Pearson and J. Bardeen, Phys. Rev., 75(1949)865.

    Article  Google Scholar 

  174. W. Zawadzki, in “Handbook on Semiconductors”, Ed.: T. S. Moss (North-Holland, Amsterdam, 1982), p. 713.

    Google Scholar 

  175. T. Pisarkiewicz, K. Zakrzewska and E. Leja, Thin Solid Films, 174(1989)217.

    Article  Google Scholar 

  176. E. Conwell and V. F. Weisskopf, Phys. Rev., 77(1950)388.

    Article  MATH  Google Scholar 

  177. E. Conwell and V. F. Weisskopf, Phys. Rev., 69(1946)258.

    Google Scholar 

  178. W. Shockley, “Electrons and Holes in Semiconductors”, (van Nostrand, Toronto, 1950).

    Google Scholar 

  179. R. B. Dingle, Phil. Mag., 46(1955)831.

    MATH  Google Scholar 

  180. I. V. Dakhovskii, T. A. Polyanskaya, A. G. Samoilovich and Y. V. Shartsev, Sov. Phys. Semicond., 4(1971)1857.

    Google Scholar 

  181. D. B. M. Klaassen, Solid State Electron., 35(1992)961.

    Article  Google Scholar 

  182. D. B. M. Klaassen, Solid State Electron., 35(1992)953.

    Article  Google Scholar 

  183. P. Ebert, Z. Zhang, F. Kluge, M. Simon, Z. Zhang and K. Urban, Phys. Rev. Lett., 83(1999)757.

    Article  Google Scholar 

  184. H. Rupprecht, J. Phys. Chem. Solids, 6(1958)144.

    Article  Google Scholar 

  185. W. S. Baer, Phys. Rev., 154(1967)785.

    Article  Google Scholar 

  186. R. C. Neville and C. A. Mead, J. Appl. Phys., 41(1970)3795.

    Article  Google Scholar 

  187. A. Hausmann and W. Teuerle, Z. Phys., 257(1972)299.

    Article  Google Scholar 

  188. K. I. Hagemark, J. Solid State Chem., 16(1976)293.

    Article  Google Scholar 

  189. B. Utsch and A. Hausmann, Z. Phys. B, 21(1975)27.

    Article  Google Scholar 

  190. K. Ellmer and R. Mientus, Thin Solid Films, 516(2008)4620.

    Google Scholar 

  191. G. Masetti, M. Severi and S. Solmi, IEEE Trans. Electron Devices., ED30(1983)764.

    Google Scholar 

  192. D. Mergel and Z. Qiao, J. Appl. Phys., 95(2004)5608.

    Article  Google Scholar 

  193. H. L. Hartnagel, A. L. Dawar, A. K. Jain and C. Jagadish, “Semiconducting Transparent Thin Films”, (Institute of Physics Publishing, Bristol, 1995).

    Google Scholar 

  194. C. Erginsoy, Phys. Rev., 79(1950)1013.

    Article  Google Scholar 

  195. F. J. Schmitte, in “Landoldt-Börnstein. Zahlenwerte und Funktionen aus Naturwiss. u. Technik. Neue Serie”, Ed.: O. Madelung, M. Schulz and H. Weiss (Springer, Berlin, 1983), p. 200.

    Google Scholar 

  196. S. M. Sze, “Physics of Semiconductor Devices”, (John, New York, 1981).

    Google Scholar 

  197. “Handbook Series on Semiconductors. Vol.1: Si, Ge, C(diamond), GaAs, GaP, GaSb, InAs, InP, InSb”; edited by M. Levinshtein, S. Rumyantsev and M. Shur (World Scientific, Singapore, 1996).

    Google Scholar 

  198. S. J. Chen, Y. C. Liu, C. L. Shao, C. S. Xu, Y. X. Liu, L. Wang, B. B. Liu and G. T. Zou, J. Appl. Phys., 99(2006)066102.

    Article  Google Scholar 

  199. A. L. Fahrenbruch and R. H. Bube, “Fundamentals of Solar Cells”, (Academic Press, New York, 1983).

    Google Scholar 

  200. G. Sanon, R. Rup and A. Mansingh, Phys. Rev. B, 44(1991)5672.

    Article  Google Scholar 

  201. H. Fujiwara and M. Kondo, Phys. Rev. B, 71(2005)075109.

    Article  Google Scholar 

  202. T. Minami, H. Sato, K. Ohashi, T. Tomofuji and S. Takata, J. Cryst. Growth, 117(1992)370.

    Article  Google Scholar 

  203. A. Dargys and J. Kundrotas, “Handbook of Physical Properties of Ge, Si, GaAs and InP”, (Science Encycl. Publ., Vilnius, 1994).

    Google Scholar 

  204. A. Schenk, J. Appl. Phys., 79(1996)814.

    Article  Google Scholar 

  205. A. Mang, K. Reimann and S. Rübenacke, Solid State Commun., 94(1995)251.

    Article  Google Scholar 

  206. K. S. Ramaiah, V. S. Raja, A. K. Bhatnagar and R. D. Tomlinson, Semicond. Sci. Technol., 15(2000)676.

    Article  Google Scholar 

  207. Z. M. Jarzebski and J. P. Marton, J. Electrochem. Soc., 123(1976)299C.

    Article  Google Scholar 

  208. T. Wittkowski, J. Jorzick, H. Seitz, B. Schröder, K. Jung and B. Hillebrands, Thin Solid Films, 398–399(2001)465.

    Article  Google Scholar 

  209. K. M. Itoh, W. Walukiewicz, H. D. Fuchs, J. W. Beeman, E. E. Haller, J. W. Farmer and V. I. Ozhogin, Phys. Rev. B, 50(1994)16995.

    Article  Google Scholar 

  210. T. Makino, A. Tsukazaki, A. Ohtomo, M. Kawasaki and H. Koinuma, Jpn. J. Appl. Phys., 45(2006)6346.

    Article  Google Scholar 

  211. J. Y. Seto, J. Appl. Phys., 46(1975)5247.

    Article  Google Scholar 

  212. K. Magnusson and S. Wiklund, J. Appl. Phys., 76(1994)7405.

    Article  Google Scholar 

  213. G. Baccarani, B. Ricco and G. Spadini, J. Appl. Phys., 49(1978)5565.

    Article  Google Scholar 

  214. B. D. Huey, D. Lisjak and D. A. Bonnell, J. Am. Ceram. Soc., 82(1999)1941.

    Article  Google Scholar 

  215. T. Kamins, “Polycrystalline Silicon for Integrated Circuit Applications”, (Kluwer, Boston, 1988).

    Book  Google Scholar 

  216. J. W. Orton and M. J. Powell, Rep. Prog. Phys., 43(1980)1263.

    Article  Google Scholar 

  217. F. R. Blom, F. C. M. v. d. Pol, G. Bauhuis and T. J. A. Popma, Thin Solid Films, 204(1991)365.

    Google Scholar 

  218. D. Gerthsen, D. Litvinov, T. Gruber, C. Kirchner and A. Waag, Appl. Phys. Lett., 81(2002)3972.

    Article  Google Scholar 

  219. V. A. Coleman, J. E. Bradby, C. Jagadish, P. Munroe, Y. W. Heo, S. J. Pearton, D. P. Norton, M. Inoue and M. Yano, Appl. Phys. Lett., 86(2005)203105.

    Article  Google Scholar 

  220. B. Pödör, phys. stat. sol., 16(1966)K167.

    Google Scholar 

  221. Y. Igasaki and H. Saito, J. Appl. Phys., 69(1991)2190.

    Article  Google Scholar 

  222. A. Suzuki, T. Matsushita, N. Wada, Y. Sakamoto and M. Okuda, Jpn. J. Appl. Phys., 35(1996)L56.

    Article  Google Scholar 

  223. Y. Igasaki and H. Saito, J. Appl. Phys., 70(1991)3613.

    Article  Google Scholar 

  224. T. Minami, H. Sato, H. Imamoto and S. Takata, Jpn. J. Appl. Phys., 31(1992)L257.

    Article  Google Scholar 

  225. K. Tominaga, S. Iwamura, I. Fujita, Y. Shintani and O. Tada, Jpn. J. Appl. Phys., 21(1982)999.

    Article  Google Scholar 

  226. J. E. Greene, S. A. Barnett, J.-E. Sundgren and A. Rockett, in “Ion Beam Assisted Film Growth”, Ed.: T. Itoh (Elsevier, Amsterdam, 1989), p. 101.

    Google Scholar 

  227. K. Ellmer, M. Kanis and R. Mientus, in: Proc. 4th Int. Workshop on ZnO and Related Materials, Giessen, Germany, October 3–6, 2006.

    Google Scholar 

  228. T. Minami, S. Suzuki and T. Miyata, Mater. Res. Soc. Symp. Proc., 666(2001)F1.3.1.

    Google Scholar 

  229. S. Brehme, F. Fenske, W. Fuhs, E. Neubauer, M. Poschenrieder, B. Selle and I. Sieber, Thin Solid Films, 342(1999)167.

    Article  Google Scholar 

  230. M. Kon, P. K. Song, Y. Shigesato, P. Frach, S. Ohno and K. Suzuki, Jpn. J. Appl. Phys., 42(2003)263.

    Article  Google Scholar 

  231. M. Lorenz, E. M. Kaidashev, H. von Wenckstern, V. Riede, C. Bundesmann, D. Spemann, G. Benndorf, H. Hochmuth, A. Rahm, H.-C. Semmelhack and M. Grundmann, Solid State Electron., 47(2003)2205.

    Article  Google Scholar 

  232. J. R. Bellingham, W. A. Phillips and C. J. Adkins, J. Mater. Sci. Lett., 11(1992)263.

    Article  Google Scholar 

  233. K. Ellmer and G. Vollweiler, Thin Solid Films, 496(2006)104.

    Article  Google Scholar 

  234. L. L. Kazmerski, W. B. Berry and C. W. Allen, J. Appl. Phys., 43(1972)3515.

    Article  Google Scholar 

  235. J. Oertel, K. Ellmer, W. Bohne, J. Röhrich and H. Tributsch, J. Cryst. Growth, 198–199(1999)1205.

    Article  Google Scholar 

  236. H. Witte, A. Krtschil, E. Schrenk, K. Fluegge, A. Dadgar and A. Krost, J. Appl. Phys., 97(2005)043710.

    Article  Google Scholar 

  237. V. Kazukauskas, G. Kühnel and W. Siegel, Appl. Phys. Lett., 70(1997)1751.

    Article  Google Scholar 

  238. L. Sagalowicz and G. R. Fox, J. Mater. Res., 14(1999)1876.

    Article  Google Scholar 

  239. C. Coskun, D. C. Look, G. C. Farlow and J. R. Sizelove, Semicond. Sci. Technol., 19(2004)752.

    Article  Google Scholar 

  240. N. W. Emanetoglu, C. Gorla, Y. Liu, S. Liang and Y. Lu, Mater. Sci. Semicond. Proc., 2(1999)247.

    Article  Google Scholar 

  241. J. J. Harris, K. J. Lee, J. B. Webb, H. Tang, I. Harrison, L. B. Flannery, T. S. Cheng and C. T. Foxon, Semicond. Sci. Technol., 15(2000)413.

    Article  Google Scholar 

  242. P. R. Emtage, J. Appl. Phys., 48(1977)4372.

    Article  Google Scholar 

  243. P. J. Clarke, J. Vac. Sci. Technol., 14(1977)141.

    Article  Google Scholar 

  244. S. Kasap, C. Koughia, H. Ruda and R. Johanson, in “Handbook of Electronic and Photonic Materials”, Ed.: S. Kasap and P. Capper (Springer, Berlin, 2006), p. 19.

    Google Scholar 

  245. J. H. Werner, in “Polycrystalline Semiconductors III-Physics and Technology”, Ed.: H. P. Strunk, J. Werner, B. Fortin and O. Bonaud (Scitec Publ., Switzerland, Zug, Switzerland, 1993), p. 213.

    Google Scholar 

  246. D. L. Young, T. J. Coutts, V. I. Kaydanov, A. S. Gilmore and W. P. Mulligan, J. Vac. Sci. Technol. A, 18(2000)2978.

    Article  Google Scholar 

  247. G. Galli and J. E. Coker, Appl. Phys. Lett., 16(1970)439.

    Article  Google Scholar 

  248. F. Pizzarello, J. Appl. Phys., 43(1972)3627.

    Article  Google Scholar 

  249. B. M. Ataev, A. M. Bagamadova, A. M. Djabrailov, V. V. Mamedov and R. A. Rabadanov, Thin Solid Films, 260(1995)19.

    Article  Google Scholar 

  250. P. Fons, K. Iwata, A. Yamada, K. Matsubara, S. Niki, K. Nakahara, T. Tanabe and H. Takasu, Appl. Phys. Lett., 77(2000)1801.

    Article  Google Scholar 

  251. P. Kuppusami, S. Fiechter and K. Ellmer, MRS Symp. Proc., 721(2002)93.

    Google Scholar 

  252. H. Kato, M. Sano, K. Miyamoto and T. Yao, J. Cryst. Growth, 237–239(2002)538.

    Article  Google Scholar 

  253. E. M. Kaidashev, M. Lorenz, H. von Wenckstern, A. Rahm, H.-C. Semmelhack, K.-H. Han, G. Benndorf, C. Bundesmann, H. Hochmuth and M. Grundmann, Appl. Phys. Lett., 82(2003)3901.

    Article  Google Scholar 

  254. H. von Wenckstern, M. Brandt, H. Schmidt, G. Biehne, R. Pickenhain, H. Hochmuth, M. Lorenz and M. Grundmann, Appl. Phys. A, 88(2007)135.

    Article  Google Scholar 

  255. D. C. Look and J. R. Sizelove, Phys. Rev. Lett., 82(1999)1237.

    Article  Google Scholar 

  256. H. Tampo, A. Yamada, P. Fons, H. Shibata, K. Matsubara, K. Iwata, S. Niki, K. Nakahara and H. Takasu, Appl. Phys. Lett., 84(2004)4412.

    Article  Google Scholar 

  257. T. Makino, Y. Segawa, A. Tsukazaki, A. Ohtomo and M. Kawasaki, Appl. Phys. Lett., 87(2005)022101.

    Article  Google Scholar 

  258. A. Ohtomo, K. Tamura, K. Saikusa, K. Takahashi, T. Makino, Y. Segawa, H. Koinuma and M. Kawasaki, Appl. Phys. Lett., 75(1999)2635.

    Article  Google Scholar 

  259. K. Miyamoto, M. Sano, H. Kato and T. Yao, J. Cryst. Growth, 265(2004)34.

    Article  Google Scholar 

  260. H. von Wenckstern, H. Schmidt, C. Hanisch, M. Brandt, C. Czekalla, G. Benndorf, G. Biehne, A. Rahm, H. Hochmuth, M. Lorenz and M. Grundmann, Phys. Stat. Sol. (rrl), 4(2007)129.

    Google Scholar 

  261. S. Ghosh, A. Sarkar, S. Chaudhuri and A. K. Pal, Thin Solid Films, 205(1991)64.

    Article  Google Scholar 

  262. J. Szczyrbowski, K. Schmalzbauer and H. Hoffmann, Thin Solid Films, 137(1986)169.

    Article  Google Scholar 

  263. A. Messad, J. Bruneaux, H. Cachet and M. Froment, J. Mater. Sci., 29(1994)5095.

    Article  Google Scholar 

  264. K. Yasui, A. Asano, M. Otsuji, H. Katagiri, A. Masuda, H. Nishiyama, Y. Inoue, M. Takata and T. Akahanea, Mater. Sci. Eng. B, 148(2008)26.

    Google Scholar 

  265. K. Yasui, N. V. Phuong, Y. Kuroki, M. Takata and T. Akahane, Jpn. J. Appl. Phys., 44(2005)684.

    Article  Google Scholar 

  266. D. Marton, K. J. Boyd and J. W. Rabalais, Chem. Phys. Lett., 283(1998)215.

    Article  Google Scholar 

  267. K. Lorenz, E. Alvez, E. Wendler, O. Bilani, W. Wesch and M. Hayes, Appl. Phys. Lett., 87(2005)191904.

    Article  Google Scholar 

  268. S. Mráz and J. M. Schneider, J. Appl. Phys., 100(2006)023503.

    Article  Google Scholar 

  269. S. Mahieu and D. Depla, Appl. Phys. Lett., 90(2007)121117.

    Article  Google Scholar 

  270. C. Bundesmann, R. Schmidt-Grund and M. Schubert, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008), p. 46.

    Google Scholar 

  271. C. Klingshirn, H. Priller, M. Decker, J. Brückner, H. Kalt, R. Hauschild, J. Zeller, A. Waag, A. Bakin, H. Wehmann, K. Thonke, R. Sauer, R. Kling, F. Reuss and C. Kirchner, Adv. Solid State Phys., 45(2005)275.

    Article  Google Scholar 

  272. R. Schmidt, B. Rheinländer, M. Schubert, D. Spemann, T. Butz, J. Lenzner, E. M. Kaidashev, M. Lorenz, A. Rahm, H. C. Semmelhack and M. Grundmann, Appl. Phys. Lett., 82(2003)2260.

    Article  Google Scholar 

  273. M. Schubert, “Infrared Ellipsometry on Semiconductor Layer Structures”, (Springer, Berlin, 2004).

    Google Scholar 

  274. H. Yoshikawa and S. Adachi, Jpn. J. Appl. Phys., 36(1997)6237.

    Article  Google Scholar 

  275. G. E. Jellison and L. A. Boatner, Phys. Rev. B, 58(1998)3586.

    Article  Google Scholar 

  276. S. Ozaki, T. Mishima and S. Adachi, Jpn. J. Appl. Phys., 42(2003)5465.

    Article  Google Scholar 

  277. J. F. Muth, R. M. Kolbas, A. K. Sharma, S. Oktyabrsky and J. Narayan, J. Appl. Phys., 85(1999)7884.

    Article  Google Scholar 

  278. M. Rebien, W. Henrion, M. Bär and C.-H. Fischer, Appl. Phys. Lett., 80(2002)3518.

    Article  Google Scholar 

  279. V. Srikant and D. R. Clarke, J. Appl. Phys., 81(1997)6357.

    Article  Google Scholar 

  280. M. S. Tokumoto, A. Smith, C. V. Santilli, S. H. Pulcinelli, A. F. Craievich, E. Elkaim, A. Traverse and V. Briois, Thin Solid Films, 416(2002)284.

    Article  Google Scholar 

  281. I. Takeuchi, W. Yang, K.-S. Chang, M. A. Aronova, T. Venkatesan, R. D. Vispute and L. A. Bendersky, J. Appl. Phys., 94(2003)7336.

    Article  Google Scholar 

  282. P. Misra, P. K. Sahoo, P. Tripathi, V. N. Kulkarni, R. V. Nandedkar and L. M. Kukreja, Appl. Phys. A, 78(2004)37.

    Article  Google Scholar 

  283. J.-L. Zhao, X.-M. Lia, J.-M. Bian, W.-D. Yu and X.-D. Gao, J. Cryst. Growth, 276(2005)507.

    Article  Google Scholar 

  284. Z.-C. Jin, I. Hamberg and C. G. Granqvist, J. Appl. Phys., 64(1988)5117.

    Article  Google Scholar 

  285. E. Burstein, Phys. Rev., 93(1954)632.

    Article  Google Scholar 

  286. T. S. Moss, Proc. Phys. Soc. London, Sec. B, 67(1954)775.

    Google Scholar 

  287. B. E. Sernelius, Phys. Rev. B, 36(1987)4878.

    Article  Google Scholar 

  288. B. E. Sernelius, K.-F. Berggren, Z.-C. Jin, I. Hamberg and C. G. Granqvist, Phys. Rev. B, 37(1988)10244.

    Article  Google Scholar 

  289. J. D. Ye, S. L. Gu, S. M. Zhu, S. M. Liu, Y. D. Zheng, R. Zhang and Y. Shi, Appl. Phys. Lett., 86(2005)192111.

    Article  Google Scholar 

  290. D. Redfield, Phys. Rev., 130(1963)916.

    Article  Google Scholar 

  291. J. I. Pankove, Phys. Rev., 140(1965)A2059.

    Article  Google Scholar 

  292. D. G. Thomas, J. Phys. Chem. Solids, 15(1960)86.

    Article  Google Scholar 

  293. W. Y. Liang and A. D. Yoffe, Phys. Rev. Lett., 20(1968)59.

    Article  Google Scholar 

  294. Y. P. Varshni, Physica, 34(1967)149.

    Article  Google Scholar 

  295. R. Pässler, Phys. Stat. Sol. (b), 216(1999)975.

    Google Scholar 

  296. C. Klingshirn, Phys. Stat. Sol. (b), 244(2007)3027.

    Google Scholar 

  297. C. Klingshirn, Chemphyschem, 8(2007)782.

    Article  Google Scholar 

  298. H. Nanto, T. Minami, S. Shooji and S. Takata, J. Appl. Phys., 55(1984)1029.

    Article  Google Scholar 

  299. K. Ellmer, K. Diesner, R. Wendt and S. Fiechter, in “Polycrystalline Semiconductors IV-Physics, Chemistry and Technology”, Ed.: S. Pizzini, H. P. Strunk and J. H. Werner (Trans Tech, Zug, Switzerland, 1995), p. 541.

    Google Scholar 

  300. M. Lorenz, in “Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells”, Ed.: K. Ellmer, A. Klein and B. Rech (Springer, Berlin, 2008), p. 55.

    Google Scholar 

  301. J. Nishino, T. Kawarada, S. Ohshio, H. Saitoh, K. Maruyama and K. Kamata, J. Mater. Sci. Lett., 16(1997)629.

    Article  Google Scholar 

  302. I. Sieber, N. Wanderka, I. Urban, I. Dörfel, E. Schierhorn, F. Fenske and W. Fuhs, Thin Solid Films, 330(1998)108.

    Article  Google Scholar 

  303. L. Lutterotti, D. Chateigner, S. Ferrari and J. Ricote, Thin Solid Films, 450(2004)34.

    Article  Google Scholar 

  304. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schöpke, C. Beneking, H. Wagner, A. Löffl and H. W. Schock, Thin Solid Films, 351(1999)247.

    Article  Google Scholar 

  305. C. Ohler, A. Förster, J. Moers, C. Daniels and H. Lüth, J. Phys. D Appl. Phys., 30(1997)1436.

    Article  Google Scholar 

  306. R. Cebulla, R. Wendt and K. Ellmer, J. Appl. Phys., 83(1998)1087.

    Article  Google Scholar 

  307. D. W. Hoffman and J. A. Thornton, J. Vac. Sci. Technol., 17(1980)380.

    Article  Google Scholar 

  308. J. Hinze and K. Ellmer, J. Appl. Phys., 88(2000)2443.

    Article  Google Scholar 

  309. P. Kuppusami, G. Vollweiler, D. Rafaja and K. Ellmer, Appl. Phys. A, 80(2005)183.

    Article  Google Scholar 

  310. E. Müller, D. Litvinov, D. Gerthsen, C. Kirchner, A. Waag, N. Oleynik, A. Dadgar and A. Krost, in “Zinc Oxide – A Material for Micro- and Optoelectronic Applications”, Ed.: N. Nickel and E. Terukov (Springer, Dordrecht, 2005), p. 99.

    Google Scholar 

  311. T. Makino, Y. Segawa, M. Kawasaki, A. Ohtomo, R. Shiroki, K. Tamura, T. Yasuda and H. Koinuma, Appl. Phys. Lett., 78(2001)1237.

    Article  Google Scholar 

  312. P. Fontana and G. Gut, J. Cryst. Growth, 28(1975)165.

    Article  Google Scholar 

  313. P. Singh, J. Mater. Sci. Lett., 9(1990)613.

    Article  Google Scholar 

  314. K. Uematsu, T. Morimoto, Z. Kato, N. Uchida and K. Santo, J. Mater. Sci. Lett., 6(1987)1285.

    Article  Google Scholar 

  315. Y. R. Ryu, T. S. Lee, J. A. Lubguban, A. B. Corman, H. W. White, J. H. Leem, M. S. Han and Y. S. Park, Appl. Phys. Lett., 88(2006)052103.

    Article  Google Scholar 

  316. C. H. Lau, L. Zhuang and K. H. Wong, Phys. Stat. Sol. (b), 244(2007)1533.

    Google Scholar 

  317. C. W. Teng, J. F. Muth, Ü. Özgür, M. J. Bergmann, H. O. Everitt, A. K. Sharma, C. Jin and J. Narayan, Appl. Phys. Lett., 76(2000)979.

    Article  Google Scholar 

  318. T. Glatzel, D. Fuertes Marron, T. Schedel-Niedrig, S. Sadewasser and M. C. Lux-Steiner, Appl. Phys. Lett., 81(2002)2017.

    Article  Google Scholar 

  319. R. Schmidt-Grund, M. Schubert, B. Rheinländer, D. Fritsch, H. Schmidt, E. M. Kaidashev, M. Lorenz, C. M. Herzinger and M. Grundmann, Thin Solid Films, 455-456(2004)500.

    Article  Google Scholar 

  320. T. D. Kang, H. Lee, W.-I. Park and G.-C. Yi, Thin Solid Films, 455-456(2004)609.

    Article  Google Scholar 

  321. K. Matsubara, H. Tampo, H. Shibata, A. Yamada, P. Fons, K. Iwata and S. Niki, Appl. Phys. Lett., 85(2004)1374.

    Article  Google Scholar 

  322. T. Minemoto, T. Negami, s. Nishiwaki, H. Takakura and Y. Hamakawa, Thin Solid Films, 372(2000)173.

    Google Scholar 

  323. S. Siebentritt, Thin Solid Films, 403-404(2002)1.

    Article  Google Scholar 

  324. G. V. Rao, F. Säuberlich and A. Klein, Appl. Phys. Lett., 87(2005)032101.

    Article  Google Scholar 

  325. S. Sadofev, P. Schäfer, Y.-H. Fan, S. Blumstengel, F. Henneberger, D. Schulz and D. Klimm, Appl. Phys. Lett., 91(2007)201923.

    Article  Google Scholar 

  326. F. P. Koffyberg, Can. J. Phys., 49(1971)435.

    Article  Google Scholar 

  327. G. Rupprecht, Z. Phys., 139(1954)504.

    Article  Google Scholar 

  328. C. A. Vincent, J. Electrochem. Soc., 119(1972)515.

    Article  Google Scholar 

  329. S. Narushima, M. Orita, M. Hirano and H. Hosono, Phys. Rev. B, 66(2002)035203.

    Article  Google Scholar 

  330. J. R. Bellingham, W. A. Phillips and C. J. Adkins, J. Phys.: Condens. Matt., 2(1990)6207.

    Google Scholar 

  331. J. R. Bellingham, W. A. Phillips and C. J. Adkins, Thin Solid Films, 195(1991)23.

    Article  Google Scholar 

  332. M. Yan, M. Lane, C. R. Kannewurf and R. P. H. Chang, Appl. Phys. Lett., 78(2001)2342.

    Article  Google Scholar 

  333. R. Dingle, H.-L. Störmer, A. C. Gossard and W. Wiegmann, Appl. Phys. Lett., 33(1978)665.

    Article  Google Scholar 

  334. J. J. Harris, J. A. Pals and R. Woltjer, Rep. Prog. Phys., 52(1989)1217.

    Article  Google Scholar 

  335. I. A. Rauf, Mater. Lett., 18(1993)123.

    Article  Google Scholar 

  336. T. Edahiro, N. Fujimura and T. Ito, J. Appl. Phys., 93(2003)7673.

    Article  Google Scholar 

  337. A. A. Grinberg and S. Luryi, J. Appl. Phys., 61(1987)1181.

    Article  Google Scholar 

  338. D. J. Cohen and S. A. Barnett, J. Appl. Phys., 98(2005)053705.

    Article  Google Scholar 

  339. A. Ohtomo and H. Y. Hwang, Appl. Phys. Lett., 84(2004)1716.

    Article  Google Scholar 

  340. K. Nomura, T. Kamiya, H. Ohta, K. Ueda, M. Hirano and H. Hosono, Appl. Phys. Lett., 85(2004)1993.

    Article  Google Scholar 

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Ellmer, K. (2011). Transparent Conductive Zinc Oxide and Its Derivatives. In: Ginley, D. (eds) Handbook of Transparent Conductors. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-1638-9_7

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