Abstract
Multilayer coatings are key optical components in the EUV, soft X-ray and X-ray range. At Institute of Precision Optical Engineering (IPOE), the development of multilayer optics has been impelled for their wide applications in X-ray laser, plasma diagnostics, astronomical observation and synchrotron radiation. The paper presents our recent results of periodic multilayers of Mo/Si, Cr/C, Cr/Sc, La/B4C, Mo/B4C, Si/C, Si/SiC, Mg/SiC Mo/Y and Ru/Y. To improve the reflectivity of Ru/Y multilayer mirrors, Mo layers were inserted between Ru and Y layer. The Mo barrier layers suppress intermixing between Ru and Y, thereby increasing the reflectivity of Ru/Y multilayer. We also discuss the application of Mo/Si, Mo/Y, Mo/B4C, La/B4C non-periodic multilayers in EUV broadband polarization measurement.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Champeaux, J.-Ph. Troussel, Ph. Villier, B, Vidal, V, Khachroum, T, Vidal, B and Krumerey, M.: ‘Development and realization of non-periodic W/Si multilayer mirrors for 5–14 keV X-ray plasma diagnostic’, Nucl. Instrum. Methods Phys. Res., Sect. A 581, 687–694, 2007
Windt, D. L. Donguy, S. Seely, J. F. Kjornrattanawanich, B. Gullikson, E. M. Walton, C. C. Golub, L. and DeLuca. E.: ‘EUV multilayers for solar physics’, Proc. SPIE 5168, 1–11, 2004
Ziegler, E.: ‘Multilayer optics for synchrotron x-ray applications’, Proc. SPIE 2253, 248–259, 1994
Kantsyrev, V. L, Bruch, R, Phaneuf, R and Publicover, N. G.: ‘New Concepts for X-Ray, Soft X-Ray, and EUV Optical Instrumentation Including Applications in Spectroscopy, Plasma Diagnostics, and Biomedical Microscopy: A Status Report’, J. X-Ray Sci. Technol, 7, 139–158, 1997
Z. S. Wang, H. C. Wang, J. T. Zhu, Y. Xu, Z. Zhang, L.Y. Chen, A G. Michette, A.K. Powell, S.J. Pfauntsch, F. Schäfers, A. Gaupp. M. MacDonald.: ‘Extreme ultraviolet broadband Mo/Y multilayer analyzers’, Appl. Phys. Lett. 89, 24120, 2006
Z. S. Wang, H. C. Wang, J. T. Zhu, Y. Xu, Z. Zhang, L.Y. Chen, A G. Michette, A.K. Powell, S.J. Pfauntsch, F. Schäfers, A. Gaupp. M. MacDonald.: ‘Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet’, Appl. Phys. Lett. 90, 031901, 2007
Z. S. Wang, H. C. Wang, J. T. Zhu, Z. Zhang, Y. Xu, L.Y. Chen, A G. Michette, A.K. Powell, S.J. Pfauntsch, F. Schäfers, A. Gaupp. M. Q. Cui, L. J. Sun, M. MacDonald.: ‘Complete polarization analysis of extreme ultraviolet radiation with a broadband phase retarder and analyzer’, Appl. Phys. Lett. 90. 081910, 2007
Slaughter, J. M. Medower, B. S. Watts, R. N. Tarrio, C. Lucatorto, T. B. and Falco, C. M.: ‘Si/B4C narrow-bandpass mirrors for the Extreme Ultraviolet’, Opt. Lett., 19, 1786–1788, 1994
Grigonis, M. and Knystautas, E. J.: ‘C/Si multilayer mirrors for the 25–30 nm wavelength region’, Appl. Opt. 36, 2839–2842, 1997
Ricardo, P. Wiesmann, R. G. Nowak, C. Michaelsen, C. Bormann, D.: ‘Improved Analyzer Multilayers for Aluminiumand Boron Detection with X-Ray Fluorescence’, App. Opt, 40, 2747–2754, 2001
Thieme, J. Schmahl, G. Rudolph, D. Umbach, E. (eds.): in X-Ray Microscopy and Spectromicroscopy Springer Verlag, 1998
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer
About this paper
Cite this paper
Wang, Z. et al. (2009). Development of Multilayer Optics in EUV, Soft X-Ray and X-Ray Range at IPOE. In: Lewis, C.L.S., Riley, D. (eds) X-Ray Lasers 2008. Springer Proceedings in Physics, vol 130. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-9924-3_45
Download citation
DOI: https://doi.org/10.1007/978-1-4020-9924-3_45
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-9923-6
Online ISBN: 978-1-4020-9924-3
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)