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Magnetron Sputtered Thin Film Cathode Materials For Lithium-Ion Batteries In The System Li–Co–O

  • B. Ketterer
  • H. Vasilchina
  • S. Ulrich
  • M. StÜBer
  • H. Leiste
  • C. Adelhelm
  • T. Kaiser
  • Th. Schimmel
Part of the NATO Science for Peace and Security Series B: Physics and Biophysics book series (NAPSB)

R.F. magnetron sputtered LiCoO2 films were prepared at various working gas pressures, substrate biases and annealing temperatures. The film composition and the intrinsic stress were determined. The structure was examined using X-ray diffraction and Raman spectroscopy. Depending on the deposition parameters, HT-LiCoO2 with a hexagonal layered structure and the cubic spinel-related LT-LiCoO2 were identified after annealing. LT-LiCoO2 is assumed to be stabilized due to the high compressive stress in the films. Layers deposited at a working gas pressure of 10 Pa showed a nanocrystalline rocksalt structure with an unordered cation arrangement. With increasing annealing temperature a cation ordering was observed.

Keywords

lithium ion battery lithium cobalt oxide thin-films cathode materials r.f. magnetron sputtering 

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Copyright information

© Springer Science + Business Media B.V 2009

Authors and Affiliations

  • B. Ketterer
    • 1
  • H. Vasilchina
    • 1
  • S. Ulrich
    • 1
  • M. StÜBer
    • 1
  • H. Leiste
    • 1
  • C. Adelhelm
    • 1
  • T. Kaiser
    • 1
  • Th. Schimmel
    • 2
  1. 1.Forschungszentrum Karlsruhe, IMF IEggenstein-LeopoldshafenGermany
  2. 2.Universität Karlsruhe (TH), Institut für Angewandte PhysikKarlsruheGermany

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