Magnetron Sputtered Thin Film Cathode Materials For Lithium-Ion Batteries In The System Li–Co–O
R.F. magnetron sputtered LiCoO2 films were prepared at various working gas pressures, substrate biases and annealing temperatures. The film composition and the intrinsic stress were determined. The structure was examined using X-ray diffraction and Raman spectroscopy. Depending on the deposition parameters, HT-LiCoO2 with a hexagonal layered structure and the cubic spinel-related LT-LiCoO2 were identified after annealing. LT-LiCoO2 is assumed to be stabilized due to the high compressive stress in the films. Layers deposited at a working gas pressure of 10 Pa showed a nanocrystalline rocksalt structure with an unordered cation arrangement. With increasing annealing temperature a cation ordering was observed.
Keywordslithium ion battery lithium cobalt oxide thin-films cathode materials r.f. magnetron sputtering
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