Monitoring of Molecule Adsorption and Stress Evolutions by In-situ Microcantilever Systems
In this paper, a theoretical analysis is given to two applications of micro-cantilever systems. The first is the detection of molecule adsorption by a two-layer composite cantilever consisting of a porous (nano- or micro-scale) film and a solid layer. In contrast to the classical cantilevers, the static deformation and the vibration frequency shift are greatly influenced by the density and sizes of the pores in the porous films. The second is that the cantilever can be used as a substrate to grow quantum dots (QDs). It is shown that a thin in-situ cantilever setup can monitor QD growth state by choosing the thickness of cantilever.
KeywordsMolecule Adsorption Surface Stress Stress Evolution Solid Layer Surface Modulus
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