Abstract
This paper represents the results of tensile test for NiCo thin films, to investigate the size effect on tensile properties. An axial loading tensile tester developed by authors was used to measure the mechanical characteristics of thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry. The “dog-bone” type specimen was designed and fabricated by electroplating process. The 50 and 150μm width of reduced section respectively were designed on 6 in. wafer. The length of reduced section is 1,000μm and the radius of the blending fillet is 1,000μm to minimize a stress concentration of the specimen. The thickness is 10μm. The elastic moduli of NiCo thin film were about 18 ± 4.1GPa for 50μm width and about 148 ± 8.4GPa for 150μm width. The ultimate tensile strength for the width of 50 and 150μm were 2,431±87.8 and 2,348±93.3MPa, respectively. However, the difference between tensile strengths is a little, as 3.3%.
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References
Hardwick D. A. (1987) The mechanical properties of thin films: a review, Thin Solid Film, 154: 109–124.
Larsen K. P., Rasmussen A. A., et al. (2003) MEMS device for bending test: measurement of fatigue and creep of electroplated nickel, Sensors and Actuators A, 103: 156#x2013;164.
Srikar V. T. and Spearing S. M. (2003) A critical review of microscale mechanical Testing Methods used in the design of micromechanical systems, Experimental Mechanics, 43(3): 238#x2013;247.
Tsuchiya T., Hirata M., Chiba N., Udo R., Yoshitomi Y., Ando T., Sato K., Takashima K., Higo Y., Satome Y., Ogawa H. and Ozaki K. (2003) Cross comparison of thin film tensile-testing methods examined with single crystal silicon, polysilicon, nickel and titanium films, Proceedings of IEEE 16th Annual Conference on Microelectromechanical Systems (MEMS), 666#x2013;669.
Park J-H., Kim C. Y., Choa S. H., Lee C. S., Che W. S. and Song J. H. (2005) New structures and techniques for easy axial loading test of static and fatigue properties of MEMS materials, Key Engineering Materials, 297#x2013;300: 545#x2013;550.
Park J-H., Myung M. S. and Kim Y-J. (2008) Tensile and high cycle fatigue test of Al-3%Ti thin films, Sensors and Actuators A: Physical (submitted).
Allameh S. M., Loua J., Kavishe F., Buchheit T. and Soboyejo W. O. (2004) An investigation of fatigue in LIGA Ni MEMS thin films, Materials Science and Engineering, A 371: 256#x2013;266.
Dieter, G. E. (1988) Mechanical Metallurgy, SI metric ed., McGraw-Hill Book, New York, 20.
Lee H. J., Cronella G. and Bravman J. C. (2000) Stress Relaxation of Free-Standing Aluminim Beams for Micorelectromechanical Systems Applications, Applied Physics Letters, 76 (23): 3415#x2013;3417.
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© 2009 Springer Science+Business Media B.V
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Park, J.H., An, J.H., Jeon, Y.B., Kim, Y.J., Huh, Y.H. (2009). Influence of Width of Specimen on Tensile Properties of NiCo Thin Film. In: Pantelakis, S., Rodopoulos, C. (eds) Engineering Against Fracture. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-9402-6_8
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DOI: https://doi.org/10.1007/978-1-4020-9402-6_8
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-9401-9
Online ISBN: 978-1-4020-9402-6
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